1.
IEEE Trans Ultrason Ferroelectr Freq Control
; 53(2): 492-6, 2006 Feb.
Article
in English
| MEDLINE
| ID: mdl-16529125
ABSTRACT
Solidly mounted film bulk acoustic resonators (FBAR) operating at 850 MHz in the shear vibration mode have been fabricated. C-axis inclined zinc oxide (ZnO) thin films realized by modified reactive magnetron sputtering were used: Coupling factors k2 of 1.7% and Q-factors of 312 were determined in air. Q-factors of 192 were measured in water, making these devices attractive for sensing applications in liquids, e.g., biosensing.
