1.
Opt Express
; 31(8): 12912-12921, 2023 Apr 10.
Article
in English
| MEDLINE
| ID: mdl-37157440
ABSTRACT
We consider the impact of intra-wafer systematic spatial variation, pattern density mismatch, and line edge roughness on splitter-tree-based integrated optical phased arrays. These variations can substantially affect the emitted beam profile in the array dimension. We study the effect on different architecture parameters, and the analysis is shown to be consistent with experimental results.