ABSTRACT
The application of advanced error-separating shearing techniques to the precise calibration of autocollimators with Small Angle Generators (SAGs) was carried out for the first time. The experimental realization was achieved using the High Precision Small Angle Generator (HPSAG) of TUBITAK UME under classical dimensional metrology laboratory environmental conditions. The standard uncertainty value of 5 mas (24.2 nrad) reached by classical calibration method was improved to the level of 1.38 mas (6.7 nrad). Shearing techniques, which offer a unique opportunity to separate the errors of devices without recourse to any external standard, were first adapted by Physikalisch-Technische Bundesanstalt (PTB) to the calibration of autocollimators with angle encoders. It has been demonstrated experimentally in a clean room environment using the primary angle standard of PTB (WMT 220). The application of the technique to a different type of angle measurement system extends the range of the shearing technique further and reveals other advantages. For example, the angular scales of the SAGs are based on linear measurement systems (e.g., capacitive nanosensors for the HPSAG). Therefore, SAGs show different systematic errors when compared to angle encoders. In addition to the error-separation of HPSAG and the autocollimator, detailed investigations on error sources were carried out. Apart from determination of the systematic errors of the capacitive sensor used in the HPSAG, it was also demonstrated that the shearing method enables the unique opportunity to characterize other error sources such as errors due to temperature drift in long term measurements. This proves that the shearing technique is a very powerful method for investigating angle measuring systems, for their improvement, and for specifying precautions to be taken during the measurements.
ABSTRACT
During the last ten years, deflectometric profilometers have become indispensable tools for the precision form measurement of optical surfaces. They have proven to be especially suitable for characterizing beam-shaping optical surfaces for x-ray beamline applications at synchrotrons and free electron lasers. Deflectometric profilometers use surface slope (angle) to assess topography and utilize commercial autocollimators for the contactless slope measurement. To this purpose, the autocollimator beam is deflected by a movable optical square (or pentaprism) towards the surface where a co-moving aperture limits and defines the beam footprint. In this paper, we focus on the precise and reproducible alignment of the aperture relative to the autocollimator's optical axis. Its alignment needs to be maintained while it is scanned across the surface under test. The reproducibility of the autocollimator's measuring conditions during calibration and during its use in the profilometer is of crucial importance to providing precise and traceable angle metrology. In the first part of the paper, we present the aperture alignment procedure developed at the Advanced Light Source, Lawrence Berkeley National Laboratory, USA, for the use of their deflectometric profilometers. In the second part, we investigate the topic further by providing extensive ray tracing simulations and calibrations of a commercial autocollimator performed at the Physikalisch-Technische Bundesanstalt, Germany, for evaluating the effects of the positioning of the aperture on the autocollimator's angle response. The investigations which we performed are crucial for reaching fundamental metrological limits in deflectometric profilometry.
