Enabling High Precision Gradient Index Control in Subsurface Multiphoton Lithography.

Multiphoton lithography inside a mesoporous host can create optical components with continuously tunable refractive indices in three-dimensional (3D) space. However, the process is very sensitive at exposure doses near the photoresist threshold, leading previous work to reliably achieve only a fraction of the available refractive index range for a given material system. Here, we present a method for greatly enhancing the uniformity of the subsurface micro-optics, increasing the reliable index range from 0.12 (in prior work) to 0.37 and decreasing the standard deviation (SD) at threshold from 0.13 to 0.0021. Three modifications to the previous method enable higher uniformity in all three spatial dimensions: (1) calibrating the planar write field of mirror galvanometers using a spatially varying optical transmission function which corrects for large-scale optical aberrations; (2) periodically relocating the piezoelectrically driven stage, termed piezo-galvo dithering, to reduce small-scale errors in writing; and (3) enforcing a constant time between each lateral cross section to reduce variation across all writing depths. With this new method, accurate fabrication of optics of any index between n = 1.20 and 1.57 (SD < 0.012 across the full range) was achieved inside a volume of porous silica. We demonstrate the importance of this increased accuracy and precision by fabricating and characterizing calibrated two-dimensional (2D) line gratings and flat gradient index lenses with significantly better performance than the corresponding control devices. As a visual representation, the University of Illinois logo made with 2D line gratings shows significant improvement in its color uniformity across its width.

Hybrid achromatic microlenses with high numerical apertures and focusing efficiencies across the visible.

Compact visible wavelength achromats are essential for miniaturized and lightweight optics. However, fabrication of such achromats has proved to be exceptionally challenging. Here, using subsurface 3D printing inside mesoporous hosts we densely integrate aligned refractive and diffractive elements, forming thin high performance hybrid achromatic imaging micro-optics. Focusing efficiencies of 51-70% are achieved for 15µm thick, 90µm diameter, 0.3 numerical aperture microlenses. Chromatic focal length errors of less than 3% allow these microlenses to form high-quality images under broadband illumination (400-700 nm). Numerical apertures upwards of 0.47 are also achieved at the cost of some focusing efficiency, demonstrating the flexibility of this approach. Furthermore, larger area images are reconstructed from an array of hybrid achromatic microlenses, laying the groundwork for achromatic light-field imagers and displays. The presented approach precisely combines optical components within 3D space to achieve thin lens systems with high focusing efficiencies, high numerical apertures, and low chromatic focusing errors, providing a pathway towards achromatic micro-optical systems.

Highly linear lithium niobate Michelson interferometer modulators assisted by spiral Bragg grating reflectors.

Highly linear electro-optic modulators are key components in analog microwave photonic links, offering on-chip direct mixing of optical and RF fields. In this work, we demonstrate a monolithic integrated Michelson interferometer modulator on thin-film lithium niobate (LN), that achieves linearized performance by modulating Bragg grating reflectors placed at the end of Michelson arms. The modulator utilizes spiral-shaped waveguide Bragg gratings on Z-cut LN with top and bottom electrodes to realize extensive reflectors, essential for linearized performance, in a highly integrated form. Optical waveguides are realized using rib etching of LN with precisely engineered bottom and top cladding layers made of silicon dioxide and SU-8 polymer, respectively. The compact design fits a 3 mm long grating in an 80 µm × 80 µm area, achieving a broad operating bandwidth up to 18 GHz. A spurious free dynamic range (SFDR) of 101.2 dB·Hz2/3 is demonstrated at 1 GHz, compared to 91.5 dB·Hz2/3 for a reference Mach-Zehnder modulator fabricated on the same chip. Further enhancement in SFDR could be achieved by reducing fiber-to-chip coupling loss. The proposed demonstration could significantly improve the linearity of analog modulator-based integrated optical links.

Compact MZI modulators on thin film Z-cut lithium niobate.

In this paper, we designed, implemented, and characterized compact Mach-Zehnder interferometer-based electro-optic modulators. The modulator utilizes spiral-shaped optical waveguides on Z-cut lithium niobate and the preeminent electro-optic effect which is applied using top and bottom electrodes. Optical waveguides are made of rib etched lithium niobate waveguides with bottom silicon oxide cladding, while SU8 polymer covers the top and sides of the rib waveguides. The proposed implementation resulted in low optical losses < 1.3 dB/cm. Moreover, we achieved compact modulators that fit 0.286 cm and 2 cm long optical waveguides in 110 µm × 110 µm and 300 µm × 300 µm areas, respectively. For single arm modulation, the modulators achieved a VπL of 7.4 V.cm and 6.4 V.cm and 3-dB bandwidths of 9.3 GHz and 2.05 GHz, respectively. Push-pull modulation is expected to cut these VπL in half. The proposed configuration avoids traveling wave modulation complexities and represents a key development towards miniature and highly integrated photonic circuits.

Direct laser writing of volumetric gradient index lenses and waveguides.

Direct laser writing (DLW) has been shown to render 3D polymeric optical components, including lenses, beam expanders, and mirrors, with submicrometer precision. However, these printed structures are limited to the refractive index and dispersive properties of the photopolymer. Here, we present the subsurface controllable refractive index via beam exposure (SCRIBE) method, a lithographic approach that enables the tuning of the refractive index over a range of greater than 0.3 by performing DLW inside photoresist-filled nanoporous silicon and silica scaffolds. Adjusting the laser exposure during printing enables 3D submicron control of the polymer infilling and thus the refractive index and chromatic dispersion. Combining SCRIBE's unprecedented index range and 3D writing accuracy has realized the world's smallest (15 µm diameter) spherical Luneburg lens operating at visible wavelengths. SCRIBE's ability to tune the chromatic dispersion alongside the refractive index was leveraged to render achromatic doublets in a single printing step, eliminating the need for multiple photoresins and writing sequences. SCRIBE also has the potential to form multicomponent optics by cascading optical elements within a scaffold. As a demonstration, stacked focusing structures that generate photonic nanojets were fabricated inside porous silicon. Finally, an all-pass ring resonator was coupled to a subsurface 3D waveguide. The measured quality factor of 4600 at 1550 nm suggests the possibility of compact photonic systems with optical interconnects that traverse multiple planes. SCRIBE is uniquely suited for constructing such photonic integrated circuits due to its ability to integrate multiple optical components, including lenses and waveguides, without additional printed supports.

Ultra-efficient and fully isotropic monolithic microring modulators in a thin-film lithium niobate photonics platform.

The large electro-optic coefficient, r33, of thin-film lithium niobate (LN) on insulator makes it an excellent material platform for high-efficiency optical modulators. Using the fundamental transverse magnetic optical mode in Z-cut LN enables isotropic in-plane devices; however, realizing a strong vertical electric field to capitalize on r33 has been challenging. Here we present a symmetric electrode configuration to boost the vertical field strength inside a fully-etched single-mode LN waveguide. We use this design paradigm to demonstrate an ultra-compact fully isotropic microring modulator with a high electro-optic tuning efficiency of 9 pm/V, extinction ratio of 20 dB, and modulation bandwidth beyond 28 GHz. Under quasi-static operation, the tuning efficiency of the modulator reaches 20 pm/V. Fast, efficient, high-contrast modulation will be critical in future optical communication systems while large quasi-static efficiency will enable post-fabrication trimming, thermal compensation, and even complete reconfiguration of microring-based sensor arrays and photonic integrated circuits.

Quasi-Newtonian Environmental Scanning Electron Microscopy (QN-ESEM) for Monitoring Material Dynamics in High-Pressure Gaseous Environments.

Environmental scanning electron microscopy (ESEM) is a powerful technique that enables imaging of diverse specimens (e.g., biomaterials, chemical materials, nanomaterials) in a hydrated or native state while simultaneously maintaining micro-to-nanoscale resolution. However, it is difficult to achieve high signal-to-noise and artifact-free secondary electron images in a high-pressure gaseous environment due to the intensive electron-gas collisions. In addition, nanotextured substrates can mask the signal from a weakly scattering sample. These drawbacks limit the study of material dynamics under extreme conditions and correspondingly our understanding in many fields. In this work, an imaging framework called Quasi-Newtonian ESEM is proposed, which introduces the concepts of quasi-force and quasi-work by referencing the scattering force in light-matter interactions, to break these barriers without any hardware changes. It is shown that quasi-force is a more fundamental quantity that has a more significant connection with the sample morphology than intensity in the strongly scattering regime. Experimental and theoretical studies on the dynamics of droplet condensation in a high-pressure environment (up to 2500 Pa) successfully demonstrate the effectiveness and robustness of the framework and that the overwhelmed signal of interest in ESEM images can be reconstructed through information stored in the time domain, i.e., frames captured at different moments.

Visualizable detection of nanoscale objects using anti-symmetric excitation and non-resonance amplification.

Why can we not see nanoscale objects under a light microscope? The textbook answers are that their relative signals are weak and their separation is smaller than Abbe's resolution limit. Thus, significant effort has gone into developing ultraviolet imaging, oil and solid immersion objectives, nonlinear methods, fluorescence dyes, evanescent wave tailoring, and point-spread function engineering. In this work, we introduce a new optical sensing framework based on the concepts of electromagnetic canyons and non-resonance amplification, to directly view on a widefield microscope λ/31-scale (25-nm radius) objects in the near-field region of nanowire-based sensors across a 726-µm × 582-µm field of view. Our work provides a simple but highly efficient framework that can transform conventional diffraction-limited optical microscopes for nanoscale visualization. Given the ubiquity of microscopy and importance of visualizing viruses, molecules, nanoparticles, semiconductor defects, and other nanoscale objects, we believe our proposed framework will impact many science and engineering fields.

Fundamental electro-optic limitations of thin-film lithium niobate microring modulators.

We investigate the impact of waveguide curvature on the electro-optic efficiency of microring resonators in thin-film X-cut or Y-cut lithium niobate (in-plane extraordinary axis) and derive explicit relations on the response. It is shown that such microring modulators have a fundamental upper bound on their electro-optic performance (∼50% filling factor) which corresponds to a specific arrangement of metal electrodes surrounding the microring and yields nearly identical results for X-cut and Y-cut designs. We further show that this limitation does not exist (i.e., 100% filling factor is possible) with Z-cut microring modulators or can be circumvented (i.e., ∼100% filling factor is possible) in X-cut and Y-cut modulators that use a race-track configuration with segmented electrodes. Comparison of our analytical results with multiphysics simulations and measured electro-optic efficiencies of microring resonators in the literature demonstrates the validity and accuracy of our approach.

Voxelized topology optimization for fabrication-compatible inverse design of 3D photonic devices.

Topology optimization for photonic device design, has been mostly used to optimize binary structures based on refractive index as the free parameter for each design cell. Typically, a constraint on the optimization variable to be z-invariant and a smoothing operation on small features are applied to make the structure fabricable by conventional lithography. To enable topology optimization to design fabricable 3D structures using emerging methods like grayscale lithography and focused ion beam milling, we propose here a framework that uses the refractive index step position as the free parameter for each 3D voxel. This choice of framework enables us to reuse the same mesh in each iteration and thereby reduce the time for optimization. We apply the framework to the fabricable design of both free-space and integrated photonic devices, at different wavelengths, demonstrating high-efficiency ultra-compact designs with wide wavelength tunability.

High performance fully etched isotropic microring resonators in thin-film lithium niobate on insulator platform.

We present our design, fabrication, and experimental results for very high-performance isotropic microring resonators with small radii (∼ 30 µm) based on single-mode strip waveguides and transverse magnetic (TM) polarization in a fully etched lithium niobate (Z-cut) thin-film on insulator. The loss of the devices is predicted to be < 10 dB/cm, and is measured to be ∼ 7 dB/cm. The measured optical responses of microring resonators exhibit an extinction of ∼ 25 dB (close to critical coupling), a 3 dB optical bandwidth of 49 pm (∼ 6 GHz) for all-pass structures, an extinction of ∼ 10 dB for add-drop structures, and a free spectral range of ∼ 5.26 nm, all of which are in excellent agreement with the design. This work is the first step towards ultra-compact and fully isotropic optical modulators in thin-film lithium niobate on insulator.

Sensing Sub-10 nm Wide Perturbations in Background Nanopatterns Using Optical Pseudoelectrodynamics Microscopy (OPEM).

Using light as a probe to investigate perturbations with deep subwavelength dimensions in large-scale wafers is challenging because of the diffraction limit and the weak Rayleigh scattering. In this Letter, we report on a nondestructive noninterference far-field imaging method, which is built upon electrodynamic principles (mechanical work and force) of the light-matter interaction, rather than the intrinsic properties of light. We demonstrate sensing of nanoscale perturbations with sub-10 nm features in semiconductor nanopatterns. This framework is implemented using a visible-light bright-field microscope with a broadband source and a through-focus scanning apparatus. This work creates a new paradigm for exploring light-matter interactions at the nanoscale using microscopy that can potentially be extended to many other problems, for example, bioimaging, material analysis, and nanometrology.

Realization of alignment-tolerant grating couplers for z-cut thin-film lithium niobate.

We present the design, modeling, fabrication, and characterization of grating coupler devices for z-cut lithium niobate near 1550 nm. We first experimentally measure the sensitivity of the insertion loss of a conventional grating coupler to translational misalignment through a three-factor full factorial design of experiment. Next, we design grating couplers that are significantly less sensitive to misalignment. The fabricated devices experienced less than 7 dB of excess insertion loss for combined misalignments of up to ± 5 µm in plane and up to -2 µm or + 10 µm out of plane.

Optical inspection of nanoscale structures using a novel machine learning based synthetic image generation algorithm.

In this paper, we present a novel interpretable machine learning technique that uses unique physical insights about noisy optical images and a few training samples to classify nanoscale defects in noisy optical images of a semiconductor wafer. Using this technique, we not only detected both parallel bridge defects and previously undetectable perpendicular bridge defects in a 9-nm node wafer using visible light microscopy [Proc. SPIE9424, 942416 (2015)], but we also accurately classified their shapes and estimated their sizes. Detection and classification of nanoscale defects in optical images is a challenging task. The quality of images is affected by diffraction and noise. Machine learning techniques can reduce noise and recognize patterns using a large training set. However, for detecting a rare "killer" defect, acquisition of a sufficient training set of high quality experimental images can be prohibitively expensive. In addition, there are technical challenges involved in using electromagnetic simulations and optimization of the machine learning algorithm. This paper proposes solutions to address each of the aforementioned challenges.

Regularized pseudo-phase imaging for inspecting and sensing nanoscale features.

Recovering tiny nanoscale features using a general optical imaging system is challenging because of poor signal to noise ratio. Rayleigh scattering implies that the detectable signal of an object of size d illuminated by light of wavelength λ is proportional to d6/λ4, which may be several orders of magnitude weaker than that of additive and multiplicative perturbations in the background. In this article, we solve this fundamental issue by introducing the regularized pseudo-phase, an observation quantity for polychromatic visible light microscopy that seems to be more sensitive than conventional intensity images for characterizing nanoscale features. We achieve a significant improvement in signal to noise ratio without making any changes to the imaging hardware. In addition, this framework not only retains the advantages of conventional denoising techniques, but also endows this new measurand (i.e., the pseudo-phase) with an explicit physical meaning analogous to optical phase. Experiments on a NIST reference material 8820 sample demonstrate that we can measure nanoscale defects, minute amounts of tilt in patterned samples, and severely noise-polluted nanostructure profiles with the pseudo-phase framework even when using a low-cost bright-field microscope.

Enhanced Environmental Scanning Electron Microscopy Using Phase Reconstruction and Its Application in Condensation.

Environmental scanning electron microscopy (ESEM) is a broadly utilized nanoscale inspection technique capable of imaging wet or insulating samples. It extends the application of conventional scanning electron microscopy (SEM) and has been extensively used to study the behavior of liquid, polymer, and biomaterials by allowing for a gaseous environment. However, the presence of gas in the chamber can severely degrade the image resolution and contrast. This typically limits the ESEM operating pressure below 1000 Pa. The dynamic interactions, which require even-higher sensitivity and resolution, are particularly challenging to resolve at high-pressure conditions. Here, we present an enhanced ESEM technique using phase reconstruction to extend the limits of the ESEM operating pressure while improving the image quality, which is useful for sensing weak scattering from transparent or nanoscale samples. We applied this method to investigate the dynamics of condensing droplets, as an example case, which is of fundamental importance and has many industrial applications. We visualized dynamic processes such as single-droplet growth and droplet coalescence where the operating pressure range was extended from 1000 to 2500 Pa. Moreover, we detected the distribution of nucleation sites on the nanostructured surfaces. Such nanoscale sensing has been challenging previously due to the limitation of resolution and sensitivity. Our work provides a simple approach for high-performance ESEM imaging at high-pressure conditions without changes to the hardware and can be widely applied to investigate a broad range of static and dynamic processes.

All-dielectric concentration of electromagnetic fields at the nanoscale: the role of photonic nanojets.

The photonic nanojet (PNJ) is a narrow high-energy beam that was originally found on the back side of all-dielectric spherical structures. It is a unique type of energy concentration mode. The field of PNJs has experienced rapid growth in the past decade: nonspherical and even pixelized PNJ generators based on new physics and principles along with extended photonic applications from linear optics to nonlinear optics have driven the re-evaluation of the role of PNJs in optics and photonics. In this article, we give a comprehensive review for the emerging sub-topics in the past decade with a focus on two specific areas: (1) PNJ generators based on natural materials, artificial materials and nanostructures, and even programmable systems instead of conventional dielectric geometries such as microspheres, cubes, and trihedral prisms, and (2) the emerging novel applications in both linear and nonlinear optics that are built upon the specific features of PNJs. The extraordinary features of PNJs including subwavelength concentration of electromagnetic energy, high intensity focusing spot, and lower Joule heating as compared to plasmonic resonance systems, have made PNJs attractive to diverse fields spanning from optical imaging, nanofabrication, and integrated photonics to biosensing, optical tweezers, and disease diagnosis.

Spectrometer-Free Plasmonic Biosensing with Metal-Insulator-Metal Nanocup Arrays.

The development of high performing and accessible sensors is crucial to future point-of-care diagnostic sensing systems. Here, we report on a gold-titanium dioxide-gold metal-insulator-metal plasmonic nanocup array device for spectrometer-free refractometric sensing with a performance exceeding conventional surface plasmon resonance sensors. This device shows distinct spectral properties such that a superstrate refractive index increase causes a transmission intensity increase at the peak resonance wavelength. There is no spectral shift at this peak and there are spectral regions with no transmission intensity change, which can be used as internal device references. The sensing mechanism, plasmon-cavity coupling optimization, and material properties are studied using electromagnetic simulations. The optimal device structure is determined using simulation and experimental parameter sweeps to tune the cavity confinement and the resonance coupling. An experimental sensitivity of 800 ΔT%/RIU is demonstrated. Spectrometer-free, imaged-based detection is also carried out for the cancer biomarker carcinoembryonic antigen with a 10 ng/mL limit of detection. The high performance and distinct spectral features of this metal-insulator-metal plasmonic nanocup array make this device promising for future portable optical sensing systems with minimal instrumentation requirements.

Diffraction phase microscopy imaging and multi-physics modeling of the nanoscale thermal expansion of a suspended resistor.

We studied the nanoscale thermal expansion of a suspended resistor both theoretically and experimentally and obtained consistent results. In the theoretical analysis, we used a three-dimensional coupled electrical-thermal-mechanical simulation and obtained the temperature and displacement field of the suspended resistor under a direct current (DC) input voltage. In the experiment, we recorded a sequence of images of the axial thermal expansion of the central bridge region of the suspended resistor at a rate of 1.8 frames/s by using epi-illumination diffraction phase microscopy (epi-DPM). This method accurately measured nanometer level relative height changes of the resistor in a temporally and spatially resolved manner. Upon application of a 2 V step in voltage, the resistor exhibited a steady-state increase in resistance of 1.14 Ω and in relative height of 3.5 nm, which agreed reasonably well with the predicted values of 1.08 Ω and 4.4 nm, respectively.

Realization of palladium-based optomechanical cantilever hydrogen sensor.

Hydrogen has attracted attention as an alternative fuel source and as an energy storage medium. However, the flammability of hydrogen at low concentrations makes it a safety concern. Thus, gas concentration measurements are a vital safety issue. Here we present the experimental realization of a palladium thin film cantilever optomechanical hydrogen gas sensor. We measured the instantaneous shape of the cantilever to nanometer-level accuracy using diffraction phase microscopy. Thus, we were able to quantify changes in the curvature of the cantilever as a function of hydrogen concentration and observed that the sensor's minimum detection limit was well below the 250 p.p.m. limit of our test equipment. Using the change in curvature versus the hydrogen curve for calibration, we accurately determined the hydrogen concentrations for a random sequence of exposures. In addition, we calculated the change in film stress as a function of hydrogen concentration and observed a greater sensitivity at lower concentrations.