Instantaneous measurement of surface roughness spectra using white-light scattering projected on a spectrometer.

Following on from previous studies on motionless scatterometers based on the use of white light, we propose a new, to the best of our knowledge, experiment of white-light scattering that should overtake the previous ones in most situations. The setup is very simple as it requires only a broadband illumination source and a spectrometer to analyze light scattering at a unique direction. After introducing the principle of the instrument, roughness spectra are extracted for different samples, and the consistency of results is validated at the intersection of bandwidths. The technique will be of great use for samples that cannot be moved.

Immediate and one-point roughness measurements using spectrally shaped light.

Capitalizing on a previous theoretical paper, we propose a novel approach, to our knowledge, that is different from the usual scattering measurements, one that is free of any mechanical movement or scanning. Scattering is measured along a single direction. Wide-band illumination with a properly chosen wavelength spectrum makes the signal proportional to the sample roughness, or to the higher-order roughness moments. Spectral shaping is carried out with gratings and a spatial light modulator. We validate the technique by cross-checking with a classical angle-resolved scattering set-up. Though the bandwidth is reduced, this white light technique may be of key interest for on-line measurements, large components that cannot be displaced, or other parts that do not allow mechanical movement around them.