Robust atomic force microscopy using multiple sensors.

Atomic force microscopy typically relies on high-resolution high-bandwidth cantilever deflection measurements based control for imaging and estimating sample topography and properties. More precisely, in amplitude-modulation atomic force microscopy (AM-AFM), the control effort that regulates deflection amplitude is used as an estimate of sample topography; similarly, contact-mode AFM uses regulation of deflection signal to generate sample topography. In this article, a control design scheme based on an additional feedback mechanism that uses vertical z-piezo motion sensor, which augments the deflection based control scheme, is proposed and evaluated. The proposed scheme exploits the fact that the piezo motion sensor, though inferior to the cantilever deflection signal in terms of resolution and bandwidth, provides information on piezo actuator dynamics that is not easily retrievable from the deflection signal. The augmented design results in significant improvements in imaging bandwidth and robustness, especially in AM-AFM, where the complicated underlying nonlinear dynamics inhibits estimating piezo motions from deflection signals. In AM-AFM experiments, the two-sensor based design demonstrates a substantial improvement in robustness to modeling uncertainties by practically eliminating the peak in the sensitivity plot without affecting the closed-loop bandwidth when compared to a design that does not use the piezo-position sensor based feedback. The contact-mode imaging results, which use proportional-integral controllers for cantilever-deflection regulation, demonstrate improvements in bandwidth and robustness to modeling uncertainties, respectively, by over 30% and 20%. The piezo-sensor based feedback is developed using H∞ control framework.

Fast and robust control of nanopositioning systems: Performance limits enabled by field programmable analog arrays.

This paper aims at control design and its implementation for robust high-bandwidth precision (nanoscale) positioning systems. Even though modern model-based control theoretic designs for robust broadband high-resolution positioning have enabled orders of magnitude improvement in performance over existing model independent designs, their scope is severely limited by the inefficacies of digital implementation of the control designs. High-order control laws that result from model-based designs typically have to be approximated with reduced-order systems to facilitate digital implementation. Digital systems, even those that have very high sampling frequencies, provide low effective control bandwidth when implementing high-order systems. In this context, field programmable analog arrays (FPAAs) provide a good alternative to the use of digital-logic based processors since they enable very high implementation speeds, moreover with cheaper resources. The superior flexibility of digital systems in terms of the implementable mathematical and logical functions does not give significant edge over FPAAs when implementing linear dynamic control laws. In this paper, we pose the control design objectives for positioning systems in different configurations as optimal control problems and demonstrate significant improvements in performance when the resulting control laws are applied using FPAAs as opposed to their digital counterparts. An improvement of over 200% in positioning bandwidth is achieved over an earlier digital signal processor (DSP) based implementation for the same system and same control design, even when for the DSP-based system, the sampling frequency is about 100 times the desired positioning bandwidth.