1.
J Synchrotron Radiat
; 21(Pt 1): 259-63, 2014 Jan.
Article
in English
| MEDLINE
| ID: mdl-24365946
ABSTRACT
The X-ray lithography beamline on Indus-2 is now operational, with two modes of operation. With a pair of X-ray mirrors it is possible to tune the energy spectrum between 1 and 20â keV with a controlled spectral bandwidth. In its 'no optics' mode, hard X-rays up to 40â keV are available. Features and performance of the beamline are presented along with some example structures. Structures fabricated include honeycomb structures in PMMA using a stainless steel stencil mask and a compound refractive X-ray lens using a polyimide-gold mask in SU-8.