Broadband, High-Reflectivity Dielectric Mirrors at Wafer Scale: Combining Photonic Crystal and Metasurface Architectures for Advanced Lightsails.

Highly ambitious initiatives aspire to propel a miniature spacecraft to a neighboring star within a human generation, leveraging the radiation pressure of lasers for propulsion. One major challenge for this enormous feat is to build a meter-scale, ultralow mass lightsail with broadband reflectivity. In this work, we present the design and fabrication of a lightsail composed of two distinct dielectric layers with photonic crystal/metasurface structure covering a 4" wafer. We achieved broadband reflection of >70% spanning over the full Doppler-shifted laser wavelength range during spacecraft acceleration with a low total mass in the range of a few grams when scaled up to meter size. Furthermore, we find new paths to reliably fabricate these subwavelength structures over macroscopic areas and then systematically characterize their optical performance, confirming their suitability for future lightsail applications. Our innovative device and precise nanofabrication approaches represent a significant leap toward interstellar exploration.

An integrated microwave-to-optics interface for scalable quantum computing.

Microwave-to-optics transduction is emerging as a vital technology for scaling quantum computers and quantum networks. To establish useful entanglement links between qubit processing units, several key conditions must be simultaneously met: the transducer must add less than a single quantum of input-referred noise and operate with high efficiency, as well as large bandwidth and high repetition rate. Here we present a design for an integrated transducer based on a planar superconducting resonator coupled to a silicon photonic cavity through a mechanical oscillator made of lithium niobate on silicon. We experimentally demonstrate its performance with a transduction efficiency of 0.9% with 1 µW of continuous optical power and a spectral bandwidth of 14.8 MHz. With short optical pulses, we measure the added noise that is limited to a few photons, with a repetition rate of up to 100 kHz. Our device directly couples to a 50 Ω transmission line and can be scaled to a large number of transducers on a single chip, laying the foundations for distributed quantum computing.

Frequency Tunable, Cavity-Enhanced Single Erbium Quantum Emitter in the Telecom Band.

Single quantum emitters embedded in solid-state hosts are an ideal platform for realizing quantum information processors and quantum network nodes. Among the currently investigated candidates, Er^{3+} ions are particularly appealing due to their 1.5 µm optical transition in the telecom band as well as their long spin coherence times. However, the long lifetimes of the excited state-generally in excess of 1 ms-along with the inhomogeneous broadening of the optical transition result in significant challenges. Photon emission rates are prohibitively small, and different emitters generally create photons with distinct spectra, thereby preventing multiphoton interference-a requirement for building large-scale, multinode quantum networks. Here we solve this challenge by demonstrating for the first time linear Stark tuning of the emission frequency of a single Er^{3+} ion. Our ions are embedded in a lithium niobate crystal and couple evanescently to a silicon nanophotonic crystal cavity that provides a strong increase of the measured decay rate. By applying an electric field along the crystal c axis, we achieve a Stark tuning greater than the ion's linewidth without changing the single-photon emission statistics of the ion. These results are a key step towards rare earth ion-based quantum networks.

High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature.

Integrated photonic platforms have proliferated in recent years, each demonstrating its unique strengths and shortcomings. Given the processing incompatibilities of different platforms, a formidable challenge in the field of integrated photonics still remains for combining the strengths of different optical materials in one hybrid integrated platform. Silicon carbide is a material of great interest because of its high refractive index, strong second- and third-order nonlinearities, and broad transparency window in the visible and near-infrared range. However, integrating silicon carbide (SiC) has been difficult, and current approaches rely on transfer bonding techniques that are time-consuming, expensive, and lacking precision in layer thickness. Here, we demonstrate high-index amorphous silicon carbide (a-SiC) films deposited at 150 °C and verify the high performance of the platform by fabricating standard photonic waveguides and ring resonators. The intrinsic quality factors of single-mode ring resonators were in the range of Qint = (4.7-5.7) × 105 corresponding to optical losses between 0.78 and 1.06 dB/cm. We then demonstrate the potential of this platform for future heterogeneous integration with ultralow-loss thin SiN and LiNbO3 platforms.

Dissipative optomechanics in high-frequency nanomechanical resonators.

The coherent transduction of information between microwave and optical domains is a fundamental building block for future quantum networks. A promising way to bridge these widely different frequencies is using high-frequency nanomechanical resonators interacting with low-loss optical modes. State-of-the-art optomechanical devices rely on purely dispersive interactions that are enhanced by a large photon population in the cavity. Additionally, one could use dissipative optomechanics, where photons can be scattered directly from a waveguide into a resonator hence increasing the degree of control of the acousto-optic interplay. Hitherto, such dissipative optomechanical interaction was only demonstrated at low mechanical frequencies, precluding prominent applications such as the quantum state transfer between photonic and phononic domains. Here, we show the first dissipative optomechanical system operating in the sideband-resolved regime, where the mechanical frequency is larger than the optical linewidth. Exploring this unprecedented regime, we demonstrate the impact of dissipative optomechanical coupling in reshaping both mechanical and optical spectra. Our figures represent a two-order-of-magnitude leap in the mechanical frequency and a tenfold increase in the dissipative optomechanical coupling rate compared to previous works. Further advances could enable the individual addressing of mechanical modes and help mitigate optical nonlinearities and absorption in optomechanical devices.

Active-feedback quantum control of an integrated low-frequency mechanical resonator.

Preparing a massive mechanical resonator in a state with quantum limited motional energy provides a promising platform for studying fundamental physics with macroscopic systems and allows to realize a variety of applications, including precise sensing. While several demonstrations of such ground-state cooled systems have been achieved, in particular in sideband-resolved cavity optomechanics, for many systems overcoming the heating from the thermal bath remains a major challenge. In contrast, optomechanical systems in the sideband-unresolved limit are much easier to realize due to the relaxed requirements on their optical properties, and the possibility to use a feedback control schemes to reduce the motional energy. The achievable thermal occupation is ultimately limited by the correlation between the measurement precision and the back-action from the measurement. Here, we demonstrate measurement-based feedback cooling on a fully integrated optomechanical device fabricated using a pick-and-place method, operating in the deep sideband-unresolved limit. With the large optomechanical interaction and a low thermal decoherence rate, we achieve a minimal average phonon occupation of 0.76 when pre-cooled with liquid helium and 3.5 with liquid nitrogen. Significant sideband asymmetry for both bath temperatures verifies the quantum character of the mechanical motion. Our method and device are ideally suited for sensing applications directly operating at the quantum limit, greatly simplifying the operation of an optomechanical system in this regime.

Recent advances in metasurface design and quantum optics applications with machine learning, physics-informed neural networks, and topology optimization methods.

As a two-dimensional planar material with low depth profile, a metasurface can generate non-classical phase distributions for the transmitted and reflected electromagnetic waves at its interface. Thus, it offers more flexibility to control the wave front. A traditional metasurface design process mainly adopts the forward prediction algorithm, such as Finite Difference Time Domain, combined with manual parameter optimization. However, such methods are time-consuming, and it is difficult to keep the practical meta-atom spectrum being consistent with the ideal one. In addition, since the periodic boundary condition is used in the meta-atom design process, while the aperiodic condition is used in the array simulation, the coupling between neighboring meta-atoms leads to inevitable inaccuracy. In this review, representative intelligent methods for metasurface design are introduced and discussed, including machine learning, physics-information neural network, and topology optimization method. We elaborate on the principle of each approach, analyze their advantages and limitations, and discuss their potential applications. We also summarize recent advances in enabled metasurfaces for quantum optics applications. In short, this paper highlights a promising direction for intelligent metasurface designs and applications for future quantum optics research and serves as an up-to-date reference for researchers in the metasurface and metamaterial fields.

A Fiber-Coupled Scanning Magnetometer with Nitrogen-Vacancy Spins in a Diamond Nanobeam.

Magnetic imaging with nitrogen-vacancy (NV) spins in diamond is becoming an established tool for studying nanoscale physics in condensed matter systems. However, the optical access required for NV spin readout remains an important hurdle for operation in challenging environments such as millikelvin cryostats or biological systems. Here, we demonstrate a scanning-NV sensor consisting of a diamond nanobeam that is optically coupled to a tapered optical fiber. This nanobeam sensor combines a natural scanning-probe geometry with high-efficiency through-fiber optical excitation and readout of the NV spins. We demonstrate through-fiber optically interrogated electron spin resonance and proof-of-principle magnetometry operation by imaging spin waves in an yttrium-iron-garnet thin film. Our scanning-nanobeam sensor can be combined with nanophotonic structuring to control the light-matter interaction strength and has potential for applications that benefit from all-fiber sensor access, such as millikelvin systems.

Mechanical overtone frequency combs.

Mechanical frequency combs are poised to bring the applications and utility of optical frequency combs into the mechanical domain. So far, their main challenge has been strict requirements on drive frequencies and power, which complicate operation. We demonstrate a straightforward mechanism to create a frequency comb consisting of mechanical overtones (integer multiples) of a single eigenfrequency, by monolithically integrating a suspended dielectric membrane with a counter-propagating optical trap. The periodic optical field modulates the dielectrophoretic force on the membrane at the overtones of a membrane's motion. These overtones share a fixed frequency and phase relation, and constitute a mechanical frequency comb. The periodic optical field also creates an optothermal parametric drive that requires no additional power or external frequency reference. This combination of effects results in an easy-to-use mechanical frequency comb platform that requires no precise alignment, no additional feedback or control electronics, and only uses a single, mW continuous wave laser beam. This highlights the overtone frequency comb as the straightforward future for applications in sensing, metrology and quantum acoustics.

Ultra-low-noise microwave to optics conversion in gallium phosphide.

Mechanical resonators can act as excellent intermediaries to interface single photons in the microwave and optical domains due to their high quality factors. Nevertheless, the optical pump required to overcome the large energy difference between the frequencies can add significant noise to the transduced signal. Here we exploit the remarkable properties of thin-film gallium phosphide to demonstrate bi-directional on-chip conversion between microwave and optical frequencies, realized by piezoelectric actuation of a Gigahertz-frequency optomechanical resonator. The large optomechanical coupling and the suppression of two-photon absorption in the material allows us to operate the device at optomechanical cooperativities greatly exceeding one. Alternatively, when using a pulsed upconversion pump, we demonstrate that we induce less than one thermal noise phonon. We include a high-impedance on-chip matching resonator to mediate the mechanical load with the 50-Ω source. Our results establish gallium phosphide as a versatile platform for ultra-low-noise conversion of photons between microwave and optical frequencies.

On-chip distribution of quantum information using traveling phonons.

Distributing quantum entanglement on a chip is a crucial step toward realizing scalable quantum processors. Using traveling phonons-quantized guided mechanical wave packets-as a medium to transmit quantum states is now gaining substantial attention due to their small size and low propagation speed compared to other carriers, such as electrons or photons. Moreover, phonons are highly promising candidates to connect heterogeneous quantum systems on a chip, such as microwave and optical photons for long-distance transmission of quantum states via optical fibers. Here, we experimentally demonstrate the feasibility of distributing quantum information using phonons by realizing quantum entanglement between two traveling phonons and creating a time-bin-encoded traveling phononic qubit. The mechanical quantum state is generated in an optomechanical cavity and then launched into a phononic waveguide in which it propagates for around 200 micrometers. We further show how the phononic, together with a photonic qubit, can be used to violate a Bell-type inequality.

Integrated optical-readout of a high-Q mechanical out-of-plane mode.

The rapid development of high-QM macroscopic mechanical resonators has enabled great advances in optomechanics. Further improvements could allow for quantum-limited or quantum-enhanced applications at ambient temperature. Some of the remaining challenges include the integration of high-QM structures on a chip, while simultaneously achieving large coupling strengths through an optical read-out. Here, we present a versatile fabrication method, which allows us to build fully integrated optomechanical structures. We place a photonic crystal cavity directly above a mechanical resonator with high-QM fundamental out-of-plane mode, separated by a small gap. The highly confined optical field has a large overlap with the mechanical mode, enabling strong optomechanical interaction strengths. Furthermore, we implement a novel photonic crystal design, which allows for a very large cavity photon number, a highly important feature for optomechanical experiments and sensor applications. Our versatile approach is not limited to our particular design but allows for integrating an out-of-plane optical read-out into almost any device layout. Additionally, it can be scaled to large arrays and paves the way to realizing quantum experiments and applications with mechanical resonators based on high-QM out-of-plane modes alike.

Hybrid Integration of Silicon Photonic Devices on Lithium Niobate for Optomechanical Wavelength Conversion.

The rapid development of quantum information processors has accelerated the demand for technologies that enable quantum networking. One promising approach uses mechanical resonators as an intermediary between microwave and optical fields. Signals from a superconducting, topological, or spin qubit processor can then be converted coherently to optical states at telecom wavelengths. However, current devices built from homogeneous structures suffer from added noise and a small conversion efficiency. Combining advantageous properties of different materials into a heterogeneous design should allow for superior quantum transduction devices-so far these hybrid approaches have however been hampered by complex fabrication procedures. Here we present a novel integration method, based on previous pick-and-place ideas, that can combine independently fabricated device components of different materials into a single device. The method allows for a precision alignment by continuous optical monitoring during the process. Using our method, we assemble a hybrid silicon-lithium niobate device with state-of-the-art wavelength conversion characteristics.

Fabrication of on-chip probes for double-tip scanning tunneling microscopy.

A reduction of the interprobe distance in multiprobe and double-tip scanning tunneling microscopy to the nanometer scale has been a longstanding and technically difficult challenge. Recent multiprobe systems have allowed for significant progress by achieving distances of ~30 nm using two individually driven, traditional metal wire tips. For situations where simple alignment and fixed separation can be advantageous, we present the fabrication of on-chip double-tip devices that incorporate two mechanically fixed gold tips with a tip separation of only 35 nm. We utilize the excellent mechanical, insulating and dielectric properties of high-quality SiN as a base material to realize easy-to-implement, lithographically defined and mechanically stable tips. With their large contact pads and adjustable footprint, these novel tips can be easily integrated with most existing commercial combined STM/AFM systems.

Microwave-to-optics conversion using a mechanical oscillator in its quantum groundstate.

Conversion between signals in the microwave and optical domains is of great interest both for classical telecommunication, as well as for connecting future superconducting quantum computers into a global quantum network. For quantum applications, the conversion has to be both efficient, as well as operate in a regime of minimal added classical noise. While efficient conversion has been demonstrated using mechanical transducers, they have so far all operated with a substantial thermal noise background. Here, we overcome this limitation and demonstrate coherent conversion between GHz microwave signals and the optical telecom band with a thermal background of less than one phonon. We use an integrated, on-chip electro-opto-mechanical device that couples surface acoustic waves driven by a resonant microwave signal to an optomechanical crystal featuring a 2.7 GHz mechanical mode. We initialize the mechanical mode in its quantum groundstate, which allows us to perform the transduction process with minimal added thermal noise, while maintaining an optomechanical cooperativity >1, so that microwave photons mapped into the mechanical resonator are effectively upconverted to the optical domain. We further verify the preservation of the coherence of the microwave signal throughout the transduction process.

Feedback Cooling of a Room Temperature Mechanical Oscillator close to its Motional Ground State.

Preparing mechanical systems in their lowest possible entropy state, the quantum ground state, starting from a room temperature environment is a key challenge in quantum optomechanics. This would not only enable creating quantum states of truly macroscopic systems, but at the same time also lay the groundwork for a new generation of quantum-limited mechanical sensors in ambient environments. Laser cooling of optomechanical devices using the radiation pressure force combined with cryogenic precooling has been successful at demonstrating ground state preparation of various devices, while a similar demonstration starting from a room temperature environment remains an outstanding goal. Here, we combine integrated nanophotonics with phononic band gap engineering to simultaneously overcome prior limitations in the isolation from the surrounding environment and the achievable mechanical frequencies, as well as limited optomechanical coupling strength, demonstrating a single-photon cooperativity of 200. This new microchip technology allows us to feedback cool a mechanical resonator to around 1 mK, near its motional ground state, from room temperature. Our experiment marks a major step toward accessible, widespread quantum technologies with mechanical resonators.

Gallium Phosphide as a Piezoelectric Platform for Quantum Optomechanics.

Recent years have seen extraordinary progress in creating quantum states of mechanical oscillators, leading to great interest in potential applications for such systems in both fundamental as well as applied quantum science. One example is the use of these devices as transducers between otherwise disparate quantum systems. In this regard, a promising approach is to build integrated piezoelectric optomechanical devices that are then coupled to microwave circuits. Optical absorption, low quality factors, and other challenges have up to now prevented operation in the quantum regime, however. Here, we design and characterize such a piezoelectric optomechanical device fabricated from gallium phosphide in which a 2.9 GHz mechanical mode is coupled to a high quality factor optical resonator in the telecom band. The large electronic band gap and the resulting low optical absorption of this new material, on par with devices fabricated from silicon, allows us to demonstrate quantum behavior of the structure. This not only opens the way for realizing noise-free quantum transduction between microwaves and optics, but in principle also from various color centers with optical transitions in the near visible to the telecom band.

Nanofabricated tips for device-based scanning tunneling microscopy.

We report on the fabrication and performance of a new kind of tip for scanning tunneling microscopy. By fully incorporating a metallic tip on a silicon chip using modern micromachining and nanofabrication techniques, we realize so-called smart tips and show the possibility of device-based STM tips. Contrary to conventional etched metal wire tips, these can be integrated into lithographically defined electrical circuits. We describe a new fabrication method to create a defined apex on a silicon chip and experimentally demonstrate the high performance of the smart tips, both in stability and resolution. In situ tip preparation methods are possible and we verify that they can resolve the herringbone reconstruction and Friedel oscillations on Au(111) surfaces. We further present an overview of possible applications.

Optomechanical Bell Test.

Over the past few decades, experimental tests of Bell-type inequalities have been at the forefront of understanding quantum mechanics and its implications. These strong bounds on specific measurements on a physical system originate from some of the most fundamental concepts of classical physics-in particular that properties of an object are well-defined independent of measurements (realism) and only affected by local interactions (locality). The violation of these bounds unambiguously shows that the measured system does not behave classically, void of any assumption on the validity of quantum theory. It has also found applications in quantum technologies for certifying the suitability of devices for generating quantum randomness, distributing secret keys and for quantum computing. Here we report on the violation of a Bell inequality involving a massive, macroscopic mechanical system. We create light-matter entanglement between the vibrational motion of two silicon optomechanical oscillators, each comprising approx. 10^{10} atoms, and two optical modes. This state allows us to violate a Bell inequality by more than 4 standard deviations, directly confirming the nonclassical behavior of our optomechanical system under the fair sampling assumption.

Integrated Optomechanical Arrays of Two High Reflectivity SiN Membranes.

Multielement cavity optomechanics constitutes a direction to observe novel effects with mechanical resonators. Several exciting ideas include superradiance, increased optomechanical coupling, and quantum effects between distinct mechanical modes among others. Realizing these experiments has so far been difficult, because of the need for extremely precise positioning of the elements relative to one another due to the high-reflectivity required for each element. Here we overcome this challenge and present the fabrication of monolithic arrays of two highly reflective mechanical resonators in a single chip. We characterize the optical spectra and losses of these 200 µm long Fabry-Pérot interferometers, measuring finesse values of up to 220. In addition, we observe an enhancement of the coupling rate between the cavity field and the mechanical center-of-mass mode compared to the single membrane case. Further enhancements in coupling with these devices are predicted, potentially reaching the single-photon strong coupling regime, giving these integrated structures an exciting prospect for future multimode quantum experiments.