Femtosecond Laser Percussion Drilling of Silicon Using Repetitive Single Pulse, MHz-, and GHz-Burst Regimes.

In this contribution, we present novel results on top-down drilling in silicon, the most important semiconductor material, focusing specifically on the influence of the laser parameters. We compare the holes obtained with repetitive single pulses, as well as in different MHz- and GHz-burst regimes. The deepest holes were obtained in GHz-burst mode, where we achieved holes of almost 1 mm depth and 35 µm diameter, which corresponds to an aspect ratio of 27, which is higher than the ones reported so far in the literature, to the best of our knowledge. In addition, we study the influence of the energy repartition within the burst in GHz-burst mode.

Bessel Beam Dielectrics Cutting with Femtosecond Laser in GHz-Burst Mode.

We report, for the first time to the best of our knowledge, Bessel beam dielectrics cutting with a femtosecond laser in GHz-burst mode. The non-diffractive beam shaping is based on the use of an axicon and allows for cutting glasses up to 1 mm thickness with an excellent cutting quality. Moreover, we present a comparison of the cutting results with the state-of-the-art method, consisting of short MHz-bursts of femtosecond pulses. We further illustrate the influence of the laser beam parameters such as the burst energy and the pitch between consecutive Bessel beams on the machining quality of the cutting plane and provide process windows for both regimes.

Comparative Study of Percussion Drilling in Glasses with a Femtosecond Laser in Single Pulse, MHz-Burst, and GHz-Burst Regimes and Optimization of the Hole Aspect Ratio.

In this contribution, we present a comparative study on top-down drilling in sodalime glass, with a femtosecond laser operating in single-pulse, MHz-burst and GHz-burst modes, respectively. We investigate the hole depth, drilling rate, and hole morphology for these three regimes while keeping the same experimental conditions. We demonstrate that, for both burst regimes, the burst length has to be adapted for optimizing the hole depth. In the GHz-burst regime, the lower the ablation rate the longer the holes. The three drilling regimes lead to different hole morphologies, where the GHz-burst mode results in the best hole quality featuring glossy inner walls and an almost cylindrical morphology. Furthermore, we obtain crack-free holes, the deepest measuring 3.7 mm in length and 25 µm in entrance diameter corresponding to an aspect ratio of 150, which is the highest aspect ratio reported thus far with femtosecond GHz-burst drilling to the best of our knowledge.

Advances in Femtosecond Laser GHz-Burst Drilling of Glasses: Influence of Burst Shape and Duration.

The femtosecond GHz-burst mode laser processing has attracted much attention in the last few years. Very recently, the first percussion drilling results obtained in glasses using this new regime were reported. In this study, we present our latest results on top-down drilling in glasses, focusing specifically on the influence of burst duration and shape on the hole drilling rate and the quality of the drilled holes, wherein holes of very high quality with a smooth and glossy inner surface can be obtained. We show that a decreasing energy repartition of the pulses within the burst can increase the drilling rate, but the holes saturate at lower depths and present lower quality than holes drilled with an increasing or flat energy distribution. Moreover, we give an insight into the phenomena that may occur during drilling as a function of the burst shape.

Percussion drilling in glasses and process dynamics with femtosecond laser GHz-bursts.

We report for the first time to our knowledge on top-down percussion drilling of high-quality deep holes in different glasses with femtosecond laser pulses in GHz-burst mode. We reveal the dynamics of the percussion drilling process by pump-probe shadowgraphy and thermal camera imaging demonstrating that the drilling process in GHz-burst mode is fundamentally different from single-pulse processing and confirming the presence of thermal accumulation. Moreover, we show a comparison to drilling by femtosecond single-pulses containing an equal laser fluence in sodalime, alkali-free alumina-borosilicate, fused silica, and sapphire.

Nonlinear absorption in lithium triborate frequency converters for high-power ultrafast lasers.

We report on an analysis of the nonlinear absorption in lithium triborate (LBO) used for second and third harmonic generation of ultrashort laser pulses at average powers in the order of kW and with sub-picosecond pulse duration. Thermographic imaging of the LBO crystals together with a simple analytical model revealed the presence of nonlinear absorption in both harmonic generation processes. Subsequent processing with a numerical model considering the nonlinear mixing, the absorption, and the heat conduction was used to estimate the absorption coefficients. Average powers exceeding 100 W in the ultraviolet and 400 W in the visible spectral range were obtained while maintaining a good beam quality by avoiding excessive nonlinear absorption.

Systematic study of laser ablation with GHz bursts of femtosecond pulses.

We report on crater formation, line scribing and cavity milling experiments on Silicon, Copper, Aluminum and stainless steel with GHz bursts of femtosecond pulses. The intra-burst repetition rate has been varied between 0.88 and 3.52 GHz, the number of pulses per burst between 50 and 3200, the burst fluence between 8 and 80 J/cm2. For these experiments, a 100-W femtosecond GHz-burst laser has been developed on an industrial laser basis, delivering a total burst energy up to 1 mJ at 100 kHz, with an adjustable number of pulses per burst. The results highlight the conditions to obtain high-ablation efficiency, show how to optimize the machining quality and point out the burst duration as the relevant parameter for femtosecond GHz machining.

High-efficiency femtosecond ablation of silicon with GHz repetition rate laser source.

We report on silicon ablation with a 20 W GHz amplified femtosecond laser source. This novel laser delivers burst energies up to 400 µJ, providing flexible intra-pulse repetition rates of 0.88 or 3.52 GHz, up to 200 pulses with ∼350 fs pulse duration. High-efficiency, high-quality ablation can be achieved through optimally determining the number of pulses, intra-pulse repetition, and average pulse energy within a burst. Due to such optimization, we demonstrate a specific ablation rate of 2.5 mm3/min/W with a burst containing 200 pulses at 0.88 GHz, which is the highest one reported so far for fs laser ablation, to the best of our knowledge. GHz ablation is sensitive to the selection of laser parameters. We conceptually discuss the contributions of the pulses within a burst to heat-accumulation-based incubation and material ablation.

Simple Yb:YAG femtosecond booster amplifier using divided-pulse amplification.

A hybrid-system approach using a low-gain Yb:YAG single crystal booster amplifier behind a state-of-the-art industrial high-power femtosecond fiber system is studied to significantly increase the output pulse energy of the fiber amplifier. With this system, more than 60 W of average power is demonstrated at 100 kHz for pulse duration of 400 fs, corresponding to an energy per pulse of 600 µJ. Reducing the repetition rate, the energy is increased up to 2.5 mJ (before compression), which corresponds to the limitation due to laser damage threshold of the optical coatings. To scale further the energy, passive divided-pulse amplification is then implemented at the entrance of the bulk amplifier. Using this geometry, a safe nominal operating point is presented with output pulse energies of 3 mJ before and 2.3 mJ after compression and with a pulse duration of 520 fs, corresponding to a peak power of 4.4 GW.

Hybrid high-energy high-power pulsewidth-tunable picosecond source.

A hybrid ytterbium-doped fiber-bulk laser source allowing the generation of 3 ps, 350 µJ, 116 MW peak power Fourier transform-limited pulses at 50 kHz repetition rate and 1030 nm wavelength is described. Pulse duration tunability is provided by an adjustable spectral compression-based seeder system. Energy scaling capabilities of the architecture by use of the divided-pulse amplification method are investigated. This source provides a robust, compact, and versatile solution for applications such as RF photocathode guns, x- and γ-ray generation by inverse Compton scattering, and optical parametric chirped-pulse amplification pumping.

Nonlinear compression of high energy fiber amplifier pulses in air-filled hypocycloid-core Kagome fiber.

We report on the generation of 34 fs and 50 µJ pulses from a high energy fiber amplifier system with nonlinear compression in an air-filled hypocycloid-core Kagome fiber. The unique properties of such fibers allow bridging the gap between solid core fibers-based and hollow capillary-based post-compression setups, thereby operating with pulse energies obtained with current state-of-the-art fiber systems. The overall transmission of the compression setup is over 70%. Together with Yb-doped fiber amplifier technologies, Kagome fibers therefore appear as a promising tool for efficient generation of pulses with durations below 50 fs, energies ranging from 10 to several hundreds of µJ, and high average powers.

High-energy chirped- and divided-pulse Sagnac femtosecond fiber amplifier.

We report on the generation of 1.1-mJ, 300-fs pulses at 50 kHz by implementing an amplifier architecture whereby four stretched pulse replicas are created in the temporal and spatial domains, allowing pulse energy scaling by the same factor. The whole spatiotemporal coherent combining geometry is passive, avoiding the need for active electronic stabilization loop systems. The combining efficiency remains above 90% at all power levels.

Passively mode-locked Yb:CaF2 thin-disk laser.

We report on the first demonstration of a passively (SESAM) mode-locked Yb:CaF(2) thin-disk laser operating at a repetition rate of 35 MHz with close to diffraction-limited beam quality (M(2) ≈ 1.1) at an average output power of up to 6.6 W. The optical efficiency was 15.3%. Nearly transform limited pulses with a duration of 445 fs and a spectral width of 2.6 nm at full width half maximum (FWHM) were obtained at the maximum output power. This corresponds to a pulse-energy of approximately 0.19 µJ and a peak-power of 0.4 MW.

Generation of 150-fs pulses from a diode-pumped Yb:KYW nonlinear regenerative amplifier.

Generation of sub-150-fs-level pulses has been obtained from an Yb-doped crystal-based regenerative amplifier by applying an innovative amplification scheme. This scheme is based on optimization of the linear and non-linear phase during the amplification process inside the regenerative amplifier cavity. This technique with Yb:KYW allows to achieve pulse durations from diode-pumped Yb-doped regenerative amplifiers that were up to now only accessible with more complex Ti:sapphire amplifiers. With this Yb-doped tungstate crystal used in regenerative amplifiers, 145 fs pulses centered at 1026 nm with a spectral bandwidth of 14 nm at 50 kHz for an average power of 1.6 W have been generated.

Two-channel pulse synthesis to overcome gain narrowing in femtosecond fiber amplifiers.

We demonstrate spectral coherent beam combining of two femtosecond fiber chirped-pulse amplifiers seeded by a common oscillator. Using active phase stabilization based on an electro-optic phase modulator, an average power of 10 W before compression and a high gain factor of 30 dB are obtained. At this gain value, 130 fs pulses with a spectral width of 19 nm can be generated, highlighting the strong potential of pulse synthesis for the reduction of the minimum duration of ultrashort pulses in fiber chirped-pulse amplifiers.

Sub-100-fs Yb:CALGO nonlinear regenerative amplifier.

We report on the first diode-pumped Yb:CaGdAlO4 regenerative amplifier in the sub-100-fs regime. It generates pulses at a central wavelength of 1047 nm with up to 24 µJ energy (after compression) at a repetition rate of 50 kHz. The measured pulse duration is 97 fs, with a spectral bandwidth of 19 nm. We describe in detail how nonlinear effects are optimally used to compensate gain narrowing in order to overcome the 100 fs barrier.

Energy scaling of a nonlinear compression setup using passive coherent combining.

Passive spatial and temporal coherent combining schemes are implemented to scale the output energy of a nonlinear temporal compression setup. By generating 32 replicas of the incident femtosecond pulses, the output of a high-energy fiber chirped-pulse amplifier can be compressed using self-phase modulation in a large-mode-area rod-type fiber at peak-power levels well beyond the self-focusing power. We demonstrate the generation of 71 fs 7.5 µJ pulses at 100 kHz repetition rate, corresponding to a peak power of 86 MW.

Femtosecond fiber chirped- and divided-pulse amplification system.

We implement both chirped pulse amplification and divided pulse amplification in the same femtosecond fiber amplifier setup. This scheme allows an equivalent stretched pulse duration of 2.4 ns in a compact tabletop system. The generation of 77 W of compressed average power at 4.8 MHz, together with 320 fs and 430 µJ pulses at a repetition rate of 96 kHz, is demonstrated using a distributed mode-filtering, rod-type, ytterbium-doped fiber. Limitations in the temporal recombining efficiency due to gain saturation inside the fiber amplifier are identified.

Yb:YAG single crystal fiber power amplifier for femtosecond sources.

We demonstrate a versatile femtosecond power amplifier using a Yb:YAG single crystal fiber operating from 10 kHz to 10 MHz. For a total pump power of 75 W, up to 30 W is generated from the double-pass power amplifier. At a repetition rate of 10 kHz, an output energy of 1 mJ is obtained after recompression. In this configuration, the pulse duration is 380 fs, corresponding to a peak power of 2.2 GW. The M2 beam quality factor is better than 1.1 for investigated parameters.

Temporal cleaning of a high-energy fiber-based ultrafast laser using cross-polarized wave generation.

We report the use of cross-polarized wave generation to perform both pulse shortening and temporal cleaning of a high-energy ytterbium-doped fiber-based femtosecond laser system. The nonlinear processes allow both a highly efficient nonlinear conversion of 20% and a large compression ratio of 3.5, with inherently improved coherent and incoherent contrasts. This results in the generation of 37 µJ, 115 fs pulses at a repetition rate of 100 kHz with high temporal quality.