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Micromachines (Basel) ; 14(5)2023 May 09.
Article in English | MEDLINE | ID: mdl-37241638

ABSTRACT

The absorption grating is a critical component of neutron phase contrast imaging technology, and its quality directly influences the sensitivity of the imaging system. Gadolinium (Gd) is a preferred neutron absorption material due to its high absorption coefficient, but its use in micro-nanofabrication poses significant challenges. In this study, we employed the particle filling method to fabricate neutron absorption gratings, and a pressurized filling method was introduced to enhance the filling rate. The filling rate was determined by the pressure on the surface of the particles, and the results demonstrate that the pressurized filling method can significantly increase the filling rate. Meanwhile, we investigated the effects of different pressures, groove widths, and Young's modulus of the material on the particle filling rate through simulations. The results indicate that higher pressure and wider grating grooves lead to a significant increase in particle filling rate, and the pressurized filling method can be utilized to fabricate large-size grating and produce uniformly filled absorption gratings. To further improve the efficiency of the pressurized filling method, we proposed a process optimization approach, resulting in a significant improvement in the fabrication efficiency.

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