Analysis and Compensation of Bias Drift for a Micromachined Spinning-rotor Gyroscope with Electrostatic Suspension.

Bias stability is one of primary characteristics of precise gyroscopes for inertial navigation. Analysis of various sources of the bias drift in a micromachined electrostatically suspended gyroscope (MESG) indicates that the bias stability is dominated by the temperature-induced drift. The analytical results of temperature drift resulting from the rotor structure and capacitive position sensing electronics are modeled and analyzed to characterize the drift mechanism of the MESG. The experimental results indicate that the bias drift is mainly composed of two components, i.e., rapidly changing temperature drift and slowly changing time drift. Both the short-term and long-term bias drift of the MESG are tested and discussed to achieve online bias compensation. Finally, a neural network based-bias compensation scheme is presented and verified experimentally with improved bias stability of the MESG.

Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers.

Micromachined resonant accelerometers (MRAs), especially those devices fabricated by silicon on glass technology, suffer from temperature drift error caused by inherent thermal stress. This paper proposes two structure designs to attenuate the effect of thermal stress. The first MRA structure is realized by optimizing the locations of the bonding anchors and utilizing a special-shaped substrate to isolate the thermal stress generated during the die attach process. The second structure is designed using an isolation frame fixed by a single anchor to replace all dispersed anchors associated with the suspension beams and micro-levers. Simulated and experimental results show that both of the MRA structures can effectively reduce the thermal stress effect. The experimental results on one MRA prototype indicate that the differential temperature sensitivity reduces down to 1.9 µg/°C and its 15-day bias stability reaches 1.4 µg.

Spin Rate Effects in a Micromachined Electrostatically Suspended Gyroscope.

Spin rate of a high-speed spinning-rotor gyroscope will make a significant impact on angular rate sensor performances such as the scale factor, resolution, measurement range, and bias stability. This paper presents the spin rate effects on performance indicators of a microelectromechanical systems (MEMS) gyroscope where a free-spinning rotor is electrostatically suspended in an evacuated vacuum cavity and functions as a dual-axis angular rate sensor. Theoretical models of the scale factor and measurement range of such a spinning-rotor gyroscope are derived. The experimental results indicate that the measured scale factors at different settings of the spin rate match well with the theoretical predication. In order to separate the disturbance component of the rotation control loop on the gyroscope output, a testing strategy is proposed by operating the gyroscope at different spin rates. Experimental results on a prototype gyroscope show that the squared drive voltage generated by the rotation control loop is approximately proportional to the noise of the gyroscope output. It was further investigated that an improved performance of such spinning-rotor gyroscopes can be achieved by operating the gyroscope rotor at an optimal spin rate.

A Three-Stage Accelerometer Self-Calibration Technique for Space-Stable Inertial Navigation Systems.

As a specific force sensor, the tri-axis accelerometer is one of the core instruments in an inertial navigation system (INS). During navigation, its measurement error directly induces constant or alternating navigation errors of the same order of magnitude. Moreover, it also affects the estimation accuracy of gyro drift coefficients during the initial alignment and calibration, which will indirectly result in navigation errors accumulating over time. Calibration can effectively improve measurement accuracy of the accelerometer. Device-level calibration can identify all of the parameters in the error model, and the system-level calibration can accurately estimate part of these parameters. Combining the advantages of both the methods and making full use of the precise angulation of the space-stabilized platform, this paper proposes a three-stage accelerometer self-calibration technique that can be implemented directly in the space-stable INS. The device-level calibration is divided into two steps considering the large amount of parameters. The first step is coarse calibration, which identifies parameters except for the nonlinear terms, and the second step is fine calibration, which not only identifies the nonlinear parameters, but also improves the accuracy of the parameters identified in the first step. The follow-on system-level calibration is carried out on part of the parameters using specific force error and attitude error to further improve the calibration accuracy. Simulation result shows that by using the proposed three-stage calibration technique in the space-stable INS, the estimation accuracy of accelerometer error can reach 1 × 10 - 6   g order of magnitude. Experiment results show that after the three-stage calibration, the accuracy of latitude, longitude, and attitude angles has increased by over 45% and the accuracy of velocity has increased by over 22% during navigation.

Hybrid Transverse Polar Navigation for High-Precision and Long-Term INSs.

Transverse navigation has been proposed to help inertial navigation systems (INSs) fill the gap of polar navigation ability. However, as the transverse system does not have the ability of navigate globally, a complicated switch between the transverse and the traditional algorithms is necessary when the system moves across the polar circles. To maintain the inner continuity and consistency of the core algorithm, a hybrid transverse polar navigation is proposed in this research based on a combination of Earth-fixed-frame mechanization and transverse-frame outputs. Furthermore, a thorough analysis of kinematic error characteristics, proper damping technology and corresponding long-term contributions of main error sources is conducted for the high-precision INSs. According to the analytical expressions of the long-term navigation errors in polar areas, the 24-h period symmetrical oscillation with a slowly divergent amplitude dominates the transverse horizontal position errors, and the first-order drift dominates the transverse azimuth error, which results from the gyro drift coefficients that occur in corresponding directions. Simulations are conducted to validate the theoretical analysis and the deduced analytical expressions. The results show that the proposed hybrid transverse navigation can ensure the same accuracy and oscillation characteristics in polar areas as the traditional algorithm in low and mid latitude regions.

Squeeze-Film Air Damping of a Five-Axis Electrostatic Bearing for Rotary Micromotors.

Air-film damping, which dominates over other losses, plays a significant role in the dynamic response of many micro-fabricated devices with a movable mass suspended by various bearing mechanisms. Modeling the damping characteristics accurately will be greatly helpful to the bearing design, control, and test in various micromotor devices. This paper presents the simulated and experimental squeeze-film air damping results of an electrostatic bearing for use in a rotary high-speed micromotor. It is shown that the boundary condition to solve the three-dimensional Reynolds equation, which governs the squeeze-film damping in the air gap between the rotor and its surrounding stator sealed in a three-layer evacuated cavity, behaves with strong cross-axis coupling characteristics. To accurately characterize the damping effect, a set of multiphysics finite-element simulations are performed by computing both the rotor velocity and the distribution of the viscous damping force acting on the rotor. The damping characteristics varying with several key structure parameters are simulated and discussed to optimize the device structure for desirable rotor dynamics. An electrical measurement method is also proposed and applied to validate the numerical results of the damping coefficients experimentally. Given that the frequency response of the electric bearing is critically dependent on the damping coefficients at atmospheric pressure, a solution to the air-film damping measurement problem is presented by taking approximate curve fitting of multi-axis experimental frequency responses. The measured squeeze-film damping coefficients for the five-axis electric bearing agrees well with the numerical solutions. This indicates that numerical multiphysics simulation is an effective method to accurately examine the air-film damping effect for complex device geometry and arbitrary boundary condition. The accurate damping coefficients obtained by FEM simulation will greatly simplify the design of the five-axis bearing control system and facilitate the initial suspension test of the rotor for various micromotor devices.

Gravity Compensation Using EGM2008 for High-Precision Long-Term Inertial Navigation Systems.

The gravity disturbance vector is one of the major error sources in high-precision and long-term inertial navigation applications. Specific to the inertial navigation systems (INSs) with high-order horizontal damping networks, analyses of the error propagation show that the gravity-induced errors exist almost exclusively in the horizontal channels and are mostly caused by deflections of the vertical (DOV). Low-frequency components of the DOV propagate into the latitude and longitude errors at a ratio of 1:1 and time-varying fluctuations in the DOV excite Schuler oscillation. This paper presents two gravity compensation methods using the Earth Gravitational Model 2008 (EGM2008), namely, interpolation from the off-line database and computing gravity vectors directly using the spherical harmonic model. Particular attention is given to the error contribution of the gravity update interval and computing time delay. It is recommended for the marine navigation that a gravity vector should be calculated within 1 s and updated every 100 s at most. To meet this demand, the time duration of calculating the current gravity vector using EGM2008 has been reduced to less than 1 s by optimizing the calculation procedure. A few off-line experiments were conducted using the data of a shipborne INS collected during an actual sea test. With the aid of EGM2008, most of the low-frequency components of the position errors caused by the gravity disturbance vector have been removed and the Schuler oscillation has been attenuated effectively. In the rugged terrain, the horizontal position error could be reduced at best 48.85% of its regional maximum. The experimental results match with the theoretical analysis and indicate that EGM2008 is suitable for gravity compensation of the high-precision and long-term INSs.

Miniature Fourier transform spectrometer with a dual closed-loop controlled electrothermal micromirror.

A large piston-displacement electrothermal micromirror with closed-loop control of both piston scan and tilting of the mirror plate is demonstrated for use in a miniature Fourier transform spectrometer. Constant scan velocity in an ultra large piston scan range has been demonstrated by the proposed closed-loop piston control scheme which can be easily implemented without considerably increasing system complexity. The experimental results show that the usable linear scan range generated by the micromirror has been extended up to 505 µm. The measured spectral resolution in a compact spectrometer reaches 20 cm-1, or 0.57 nm at 532 nm wavelength. Compared to other presented systems, this microspectrometer will benefit from the closed-loop thermal actuator approach utilizing both the piston servo and tilt control to provide more consistent spectral response, improved spectral resolution and enhanced robustness to disturbances.

Design and Fabrication of a Differential Electrostatic Accelerometer for Space-Station Testing of the Equivalence Principle.

The differential electrostatic space accelerometer is an equivalence principle (EP) experiment instrument proposed to operate onboard China's space station in the 2020s. It is designed to compare the spin-spin interaction between two rotating extended bodies and the Earth to a precision of 10(-12), which is five orders of magnitude better than terrestrial experiment results to date. To achieve the targeted test accuracy, the sensitive space accelerometer will use the very soft space environment provided by a quasi-drag-free floating capsule and long-time observation of the free-fall mass motion for integration of the measurements over 20 orbits. In this work, we describe the design and capability of the differential accelerometer to test weak space acceleration. Modeling and simulation results of the electrostatic suspension and electrostatic motor are presented based on attainable space microgravity condition. Noise evaluation shows that the electrostatic actuation and residual non-gravitational acceleration are two major noise sources. The evaluated differential acceleration noise is 1.01 × 10(-9) m/s²/Hz(1/2) at the NEP signal frequency of 0.182 mHz, by neglecting small acceleration disturbances. The preliminary work on development of the first instrument prototype is introduced for on-ground technological assessments. This development has already confirmed several crucial fabrication processes and measurement techniques and it will open the way to the construction of the final differential space accelerometer.

Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer.

A micromachined electrostatically-suspended accelerometer (MESA) is a kind of three-axis inertial sensor based on fully-contactless electrostatic suspension of the proof mass (PM). It has the potential to offer broad bandwidth, high sensitivity, wide dynamic range and, thus, would be perfectly suited for land seismic acquisition. Previous experiments showed that it is hard to lift up the PM successfully during initial levitation as the mass needs to be levitated simultaneously in all six degrees of freedom (DoFs). By analyzing the coupling electrostatic forces and torques between three lateral axes, it is found there exists a self-locking zone due to the cross-axis coupling effect. To minimize the cross-axis coupling and solve the initial levitation problem, this paper proposes an effective control scheme by delaying the operation of one lateral actuator. The experimental result demonstrates that the PM can be levitated up with six-DoF suspension operation at any initial position. We also propose a feed-forward compensation approach to minimize the negative stiffness effect inherent in electrostatic suspension. The experiment results demonstrate that a more broadband linear amplitude-frequency response and higher suspension stiffness can be achieved, which is crucial to maintain high vector fidelity for potential use as a three-component MEMS geophone. The preliminary performance tests of the three-axis linear accelerometer were conducted under normal atmospheric pressure and room temperature. The main results and noise analysis are presented. It is shown that vacuum packaging of the MEMS sensor is essential to extend the bandwidth and lower the noise floor, especially for low-noise seismic data acquisition.