ABSTRACT
In the present paper, apparatus and theory of surface analysis is introduced, and the progress in the application of laser ablation ICP-MS to microanalysis in ferrous, nonferrous and semiconductor field is reviewed in detail. Compared with traditional surface analytical tools, such as SEM/EDS (scanning electron microscopy/energy dispersive spectrum), EPMA (electron probe microanalysis analysis), AES (auger energy spectrum), etc. the advantage is little or no sample preparation, adjustable spatial resolution according to analytical demand, multi-element analysis and high sensitivity. It is now a powerful complementary method to traditional surface analytical tool. With the development of LA-ICP-MS technology maturing, more and more analytical workers will use this powerful tool in the future, and LA-ICP-MS will be a super star in elemental analysis field just like LIBS (Laser-induced breakdown spectroscopy).
ABSTRACT
In the present paper, under optimum experimental condition, two middle-low alloy slab and homogeneous samples were analyzed under the condition of spatial resolution about 100 microm by scanning mode. Element 2D intensity distribution can be converted into 2D concentration distribution via establishing calibration curve. The results showed that there is a central segregation for C, Si, Mn, P, S and Cu for 86 # slab sample, and C, Si, P and Ti for 174 # slab sample, the width of segregation band was estimated, and it agrees well with metallographic analysis. Homogeneous sample was analyzed by scanning mode, the result showed that C, Si, Mn, P, S and so on are well distributed, and there is no segregation band existing. 2D distribution of element intensity or concentration can be used to indirectly reflect sample's homogeneity. Compared with traditional metallographic analysis, LIBS can not only show central segregation bands position and width, but also provide 2D concentration distribution for C, Si, Mn, P, S etc in detail. This method can be used to characterize segregation band position and its width rapidly, and provide theoretical guidance for improving metallurgical process.
