Characterization of Sensitivity of Time Domain MEMS Accelerometer.

This paper characterizes the sensitivity of a time domain MEMS accelerometer. The sensitivity is defined by the increment in the measured time interval per gravitational acceleration. Two sensitivities exist, and they can be enhanced by decreasing the amplitude and frequency. The sensitivity with minor nonlinearity is chosen to evaluate the time domain sensor. The experimental results of the developed accelerometer demonstrate that the sensitivities span from -68.91 µs/g to -124.96 µs/g and the 1σ noises span from 8.59 mg to 6.2 mg (amplitude of 626 nm: -68.91 µs/g and 10.21 mg; amplitude of 455 nm: -94.51 µs/g and 7.76 mg; amplitude of 342 nm: -124.96 µs/g and 6.23 mg), which indicates the bigger the amplitude, the smaller the sensitivity and the bigger the 1σ noise. The adjustable sensitivity provides a theoretical foundation for range self-adaption, and all the results can be extended to other time domain inertial sensors, e.g., a gyroscope or an inclinometer.

Micromechanical mode-localized electric current sensor.

This paper outlines the design of a novel mode-localized electric current sensor based on a mechanically sensitive element of weakly coupled resonator systems. With the advantage of a high voltage sensitivity of weakly coupled resonator systems, the current under test is converted to voltage via a silicon shunt resistor, which causes stiffness perturbation to one resonator. The mode-localization phenomenon alters the energy distribution in the weakly coupled resonator system. A theoretical model of current sensing is established, and the performance of the current sensor is determined: the sensitivity of the electric current sensor is 567/A, the noise floor is 69.3 nA/√Hz, the resolution is 183.6 nA, and the bias instability is 81.6 nA. The mode-localized electric current sensor provides a new approach for measuring sub-microampere currents for applications in nuclear physics, including for photocurrent signals and transistor leakage currents. It could also become a key component of a portable mode-localized multimeter when combined with a mode-localized voltmeter. In addition, it has the potential for use in studying sensor arrays to achieve higher resolution.

Design of a Capacitive MEMS Accelerometer with Softened Beams.

Lower stiffness can improve the performance of capacitive-based microelectromechanical systems sensors. In this paper, softened beams, achieved by the electrostatic assembly approach, are proposed to lower the stiffness of a capacitive MEMS accelerometer. The experiments show that the stiffness of the accelerometer is reduced by 43% with softened beams and the sensitivity is increased by 72.6%. As a result, the noise of the accelerometer is reduced to 26.2 µg/√Hz with an improvement of 44.5%, and bias instability is reduced to 5.05 µg with an enhancement of 38.7%. The electrostatic assembly-based stiffness softening technique is proven to be effective and can be used in many types of MEMS devices.

Single Living Cell Analysis Nanoplatform for High-Throughput Interrogation of Gene Mutation and Cellular Behavior.

The genetic heterogeneities in cancer cells pose challenges to achieving precise drug treatment in a widely applicable manner. Most single-cell gene analysis methods rely on cell lysis for gene extraction and identification, showing limited capacity to provide the correlation of genetic properties and real-time cellular behaviors. Here, we report a single living cell analysis nanoplatform that enables interrogating gene properties and drug resistance in millions of single cells. We designed a Domino-probe to identify intracellular target RNAs while releasing 10-fold amplified fluorescence signals. An on-chip addressable microwell-nanopore array was developed for enhanced electro-delivery of the Domino-probe and in situ observation of cell behaviors. The proof-of-concept of the system was validated in primary lung cancer cell samples, revealing the positive-correlation of the ratio of EGFR mutant cells with their drug susceptibilities. This platform provides a high-throughput yet precise tool for exploring the relationship between intracellular genes and cell behaviors at the single-cell level.

On-chip multiplexed single-cell patterning and controllable intracellular delivery.

Conventional electroporation approaches show limitations in the delivery of macromolecules in vitro and in vivo. These limitations include low efficiency, noticeable cell damage and nonuniform delivery of cells. Here, we present a simple 3D electroporation platform that enables massively parallel single-cell manipulation and the intracellular delivery of macromolecules and small molecules. A pyramid pit micropore array chip was fabricated based on a silicon wet-etching method. A controllable vacuum system was adopted to trap a single cell on each micropore. Using this chip, safe single-cell electroporation was performed at low voltage. Cargoes of various sizes ranging from oligonucleotides (molecular beacons, 22 bp) to plasmid DNA (CRISPR-Cas9 expression vectors, >9 kb) were delivered into targeted cells with a significantly higher transfection efficiency than that of multiple benchmark methods (e.g., commercial electroporation devices and Lipofectamine). The delivered dose of the chemotherapeutic drug could be controlled by adjusting the applied voltage. By using CRISPR-Cas9 transfection with this system, the p62 gene and CXCR7 gene were knocked out in tumor cells, which effectively inhibited their cellular activity. Overall, this vacuum-assisted micropore array platform provides a simple, efficient, high-throughput intracellular delivery method that may facilitate on-chip cell manipulation, intracellular investigation and cancer therapy.

Energy Loss in a MEMS Disk Resonator Gyroscope.

Analysing and minimizing energy loss is crucial for high performance disk resonator gyroscopes (DRGs). Generally, the primary energy loss mechanism for high vacuum packaged microelectromechanical system (MEMS) resonators includes thermoelastic damping, anchor loss, and electronic damping. In this paper, the thermoelastic damping, anchor loss, and electronic damping for our DRG design are calculated by combining finite element analysis and theoretical derivation. Thermoelastic damping is the dominant energy loss mechanism and contributes over 90% of the total dissipated energy. Benefiting from a symmetrical structure, the anchor loss is low and can be neglected. However, the electronic damping determined by the testing circuit contributes 2.6%-9.6% when the bias voltage increases from 10 V to 20 V, which has a considerable impact on the total quality factor (Q). For comparison, the gyroscope is fabricated and seal-packaged with a measured maximum Q range of 141k to 132k when the bias voltage varies. In conclusion, thermoelastic damping and electronic damping essentially determine the Q of the DRG. Thus, optimizing the resonance structure and testing the circuit to reduce energy loss is prioritized for a high-performance DRG design.

A Microgripper with a Post-Assembly Self-Locking Mechanism.

In this work, we report a new design for an electrostatically actuated microgripper with a post-assembly self-locking mechanism. The microgripper arms are driven by rotary comb actuators, enabling the microgripper to grip objects of any size from 0 to 100 µm. The post-assembly mechanism is driven by elastic deformation energy and static electricity to produce self-locking and releasing actions. The mechanism enables the microgripper arms to grip for long periods without continuously applying the external driving signal, which significantly reduces the effects and damage to the gripped objects caused by these external driving signals. The microgripper was fabricated using a Silicon-On-Insulator (SOI) wafer with a 30 µm structural layer. Test results show that this gripper achieves a displacement of 100 µm with a driving voltage of 33 V, and a metal wire with a diameter of about 1.6 mil is successfully gripped to demonstrate the feasibility of this post-assembly self-locking mechanism.

Ice shear fracture on nanowires with different wetting states.

Understanding the function of nanoscale structure morphology in ice adhesion properties is important in deicing applications. The correlation between ice adhesion and nanowire morphology as well as the corresponding ice shear fracture mechanism are presented for the first time. Ice adhesion on nanowires was measured using a tangential ice-detaching instrument that was developed in-house. Stress analysis was performed using a COMSOL software. Nanowire surface shifted from Wenzel to Cassie transition and Cassie wetting states when the nanowire length was increased. Tangential ice-detaching forces were greater on the hydrophilic surface than those on the hydrophobic surface. Ice-ice internal shear fracture occurred on the ice and force probe contact area at the Wenzel state or on the ice and nanowire contact area at Cassie transition and Cassie state. Different lengths of nanowires caused different wetting states; thus, different fracture areas were formed, which resulted in different tangential ice-detaching forces. This paper presents a new way of tailoring surface ice adhesion via rational design of nanowire morphology with different wetting states.