ABSTRACT
We demonstrate a reflective wavefront sensor grating suitable for the characterization of high-quality x-ray beamlines and optical systems with high power densities. Operating at glancing incidence angles, the optical element is deeply etched with a two-level pattern of shearing interferometry gratings and Hartmann wavefront sensor grids. Transverse features block unwanted light, enabling binary amplitude in reflection with high pattern contrast. We present surface characterization and soft x-ray reflectometry of a prototype grating array to demonstrate function prior to wavefront measurement applications. A simulation of device performance is shown.
ABSTRACT
Micro-opto-electro-mechanical systems (MOEMS) Deformable Mirrors (DM) are key components for next generation optical instruments implementing innovative adaptive optics systems, both in existing telescopes and in the future ELTs. Characterizing these components well is critical for next generation instruments. This is done by interferometry, including surface quality measurement in static and dynamical modes, at ambient and in vacuum/cryo. We use a compact cryo-vacuum chamber designed for reaching 10â»6 mbar and 160 K in front of our custom Michelson interferometer, which is able to measure performance of the DM at actuator/segment level and at the entire mirror level, with a lateral resolution of 2 µm and a sub-nanometer z-resolution. We tested the PTT 111 DM from Iris AO: an array of single crystalline silicon hexagonal mirrors with a pitch of 606 µm, able to move in tip, tilt, and piston (stroke 5â»7 µm, tilt ±5 mrad). The device could be operated successfully from ambient to 160 K. An additional, mainly focus-like, 500 nm deformation of the entire mirror is measured at 160 K; we were able to recover the best flat in cryo by correcting the focus and local tip-tilts on all segments, reaching 12 nm rms. Finally, the goal of these studies is to test DMs in cryo and vacuum conditions as well as to improve their architecture for stable operation in harsh environments.
ABSTRACT
The performance of a MEMS (micro-electro-mechanical-system) segmented deformable mirror was evaluated in an adaptive optics (AO) scanning laser ophthalmoscope. The tested AO mirror (Iris AO, Inc, Berkeley, CA) is composed of 37 hexagonal segments that allow piston/tip/tilt motion up to 5 µm stroke and ±5 mrad angle over a 3.5 mm optical aperture. The control system that implements the closed-loop operation employs a 1:1 matched 37-lenslet Shack-Hartmann wavefront sensor whose measurements are used to apply modal corrections to the deformable mirror. After a preliminary evaluation of the AO mirror optical performance, retinal images from 4 normal subjects over a 0.9°x0.9° field size were acquired through a 6.4 mm ocular pupil, showing resolved retinal features at the cellular level. Cone photoreceptors were observed as close as 0.25 degrees from the foveal center. In general, the quality of these images is comparable to that obtained using deformable mirrors based on different technologies.
