1.
Appl Opt
; 39(18): 3138-42, 2000 Jun 20.
Article
in English
| MEDLINE
| ID: mdl-18345244
ABSTRACT
A new method of displacement measurement that uses the transient photoelectromotive force effects that arise in semiconductors illuminated by two frequency-modulated lasers is proposed and demonstrated experimentally. A height resolution of 0.85 microm was achieved experimentally; theoretical analysis charts the path toward eventual improvement of this resolution.