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Appl Opt ; 39(18): 3138-42, 2000 Jun 20.
Article in English | MEDLINE | ID: mdl-18345244

ABSTRACT

A new method of displacement measurement that uses the transient photoelectromotive force effects that arise in semiconductors illuminated by two frequency-modulated lasers is proposed and demonstrated experimentally. A height resolution of 0.85 microm was achieved experimentally; theoretical analysis charts the path toward eventual improvement of this resolution.

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