ABSTRACT
An accurate optical coherent ellipsometer (OCE) is proposed and setup in which a two-frequency paired linear polarized laser beam is integrated with a common-path heterodyne interferometer. This OCE is able to precisely measure the optical properties of scattering specimen by measuring ellipsometric parameters (Psi, Delta). In the mean time the degree of polarization P, and degree of coherence Chi of incident two-frequency linear polarized laser beam are measured too. In the experiment, both smooth and ground BK7 glass plates were tested in which the optical parameters (Psi, Delta, P, Chi ) were obtained precisely. Comparing with conventional ellipsometers, OCE can characterize scattering specimen precisely and excludes the scattering effect.
