Fabrication of fluidic submicron-channels by pulsed laser-induced buckling of SiOx films on fused silica.

Recently, considerable attention has been drawn to the field of micro/nanofluidic channels. However, current methods for fabricating micro/nanochannels are complex, costly, and time-intensive. In the present work, we successfully fabricated transparent submicron-channels on fused silica substrates (SiO2) using a straightforward laser process. To achieve this, a single-pulse excimer laser irradiation in a rear side configuration was employed to treat a thin film of UV-absorbing silicon suboxide (SiOx) through the transparent SiO2 substrate. A polydimethylsiloxane (PDMS) superstrate (coating layer) was applied over the SiOx film before laser exposure, serving as a confinement for controlled structure formation induced by the laser. Under optimal laser fluence, the thin SiOx film buckled, leading to the formation of channels with a width ranging from 10 to 20 µm and a height of 800 to 1200 nm, exhibiting a bell-like cross-sections following the so-called Euler buckling mode. Wider channels displayed morphologies resembling varicose or telephone cord modes. Subsequent high-temperature annealing led to the oxidation of SiOx, resulting transparent SiO2 channels on the fused silica substrate. The manufactured nanochannels exhibited promising potential for effectively transporting fluids of diverse viscosities. Various fluids were conveyed through these nanochannels via capillary action and in accordance with the Lucas-Washburn equation.

High-Resolution Laser Interference Ablation and Amorphization of Silicon.

The laser interference patterning of a silicon surface via UV femtosecond pulse irradiation, resulting in 350 nm periodic structures, is demonstrated. The structuring process was performed using a laser with a 450 fs pulse duration at a wavelength of 248 nm in combination with a mask projection setup. Depending on the laser fluence, single-pulse irradiation leads to amorphization, structure formation via lateral melt flow or the formation of voids via peculiar melt coalescence. Through multipulse irradiation, combined patterns of interference structures and laser-induced periodic surface structures (LIPSS) are observed.

Freeform shaping of fused silica substrates via viscous deformation induced by a laser patterned, stressed film.

Freeform optics enable improved optical solutions but their fabrication usually requires complicated precision machining processes. We report on an approach for freeform shaping of optical surfaces via a stress-induced viscous deformation of glass plates. We studied the deformation of fused silica substrates covered by specifically laser patterned films of substoichiometric silicon oxide during annealing at about 1100 °C in an oxidizing ambient. The obtained large deformation of the substrates can be understood by a mostly viscous deformation but can be described in analogy to a purely elastic deformation. Our results demonstrate the feasibility of a method for freeform shaping of individual optical substrates that only requires the preparation of a flat surface.

Editorial: Special Issue "Laser-Generated Periodic Nanostructures".

The study of laser-fabricated periodic nanostructures is one of the leading topics of today's photonics research [...].

Formation of Periodic Nanoridge Patterns by Ultrashort Single Pulse UV Laser Irradiation of Gold.

A direct comparison of simulation and experimental results of UV laser-induced surface nanostructuring of gold is presented. Theoretical simulations and experiments are performed on an identical spatial scale. The experimental results have been obtained by using a laser wavelength of 248 nm and a pulse length of 1.6 ps. A mask projection setup is applied to generate a spatially periodic intensity profile on a gold surface with a sinusoidal shape and periods of 270 nm, 350 nm, and 500 nm. The formation of structures at the surface upon single pulse irradiation is analyzed by scanning and transmission electron microscopy (SEM and TEM). For the simulations, a hybrid atomistic-continuum model capable of capturing the essential mechanisms responsible for the nanostructuring process is used to model the interaction of the laser pulse with the gold target and the subsequent time evolution of the system. The formation of narrow ridges composed of two colliding side walls is found in the simulation as well as in the experiment and the structures generated as a result of the material processing are categorized depending on the range of applied fluencies and periodicities.

Fabrication of Periodic Nanostructures on Silicon Suboxide Films with Plasmonic Near-Field Ablation Induced by Low-Fluence Femtosecond Laser Pulses.

Silicon suboxide (SiOx, x ≈ 1) is a substoichiometric silicon oxide with a large refractive index and optical absorption coefficient that oxidizes to silica (SiO2) by annealing in air at ~1000 °C. We demonstrate that nanostructures with a groove period of 200-330 nm can be formed in air on a silicon suboxide film with 800 nm, 100 fs, and 10 Hz laser pulses at a fluence an order of magnitude lower than that needed for glass materials such as fused silica and borosilicate glass. Experimental results show that high-density electrons can be produced with low-fluence femtosecond laser pulses, and plasmonic near-fields are subsequently excited to create nanostructures on the surface because silicon suboxide has a larger optical absorption coefficient than glass. Calculations using a model target reproduce the observed groove periods well and explain the mechanism of the nanostructure formation.

Figure correction of borosilicate glass substrates by nanosecond UV excimer laser irradiation.

The mechanical stress in thin films can have a deleterious effect on the quality of optical components by deforming the underlying substrate. In addition, the substrate might be deformed by gravity or stress induced by mounting. We suggest a method to compensate the substrate deformation by laser generated tensile stresses in the backside of the substrate. We show results for irradiation of the borosilicate glass Schott D263M with an ArF excimer laser. We measured the integrated stress in dependence of the laser fluence and corrected a sample for the deformation by a chromium coating. We show that also antibiaxial plane stress components can be induced. For precise corrections a scheme for stabilization of the generated surface stresses still needs to be developed.

Excimer Laser Induced Spatially Resolved Formation and Implantation of Plasmonic Particles in Glass.

Metallic nanoparticles are important building blocks for plasmonic applications. The spatially defined arrangement of these nanoparticles in a stable glass matrix is obtained here by nanosecond excimer laser irradiation at 193 nm. Two approaches are addressed: (1) Laser induced formation of particles from a dopant material pre-incorporated in the glass, (2) Particle formation and implantation by irradiation of material pre-coated on top of the glass. Silver nanoparticles are formed inside Ag⁺ doped glass (method 1). Gold nanoparticles are implanted by irradiation of gold coated glass (method 2). In the latter case, with a few laser pulses the original gold film disintegrates into particles which are then embedded in the softened glass matrix. A micron sized spatial resolution (periodic arrangements with 2 µm period) is obtained in both cases by irradiating the samples with an interference beam pattern generated by a phase mask. The plasmonic absorption of the nanoparticles leads to a contrast of the optical density between irradiated and non-irradiated lines of up to 0.6.

Pulsed laser-induced formation of silica nanogrids.

Silica grids with micron to sub-micron mesh sizes and wire diameters of 50 nm are fabricated on fused silica substrates. They are formed by single-pulse structured excimer laser irradiation of a UV-absorbing silicon suboxide (SiOx) coating through the transparent substrate. A polydimethylsiloxane (PDMS) superstrate (cover layer) coated on top of the SiOx film prior to laser exposure serves as confinement for controlled laser-induced structure formation. At sufficiently high laser fluence, this process leads to grids consisting of a periodic loop network connected to the substrate at regular positions. By an additional high-temperature annealing, the residual SiOx is oxidized, and a pure SiO2 grid is obtained. PACS: 81.07.-b; 81.07.Gf; 81.65.Cf.

Fabrication and characterization of homogeneous surface-enhanced Raman scattering substrates by single pulse UV-laser treatment of gold and silver films.

The fabrication of SERS-active substrates, which offer high enhancement factors as well as spatially homogeneous distribution of the enhancement, plays an important role in the expansion of surface-enhanced Raman scattering (SERS) spectroscopy to a powerful, quantitative, and noninvasive measurement technique for analytical applications. In this paper, a novel method for the fabrication of SERS-active substrates by laser treatment of 20, 40, and 60 nm thick gold and of 40 nm thick silver films supported on quartz glass is presented. Single 308 nm UV-laser pulses were applied to melt the thin gold and silver films. During the cooling process of the noble metal, particles were formed. The particle size and density were imaged by atomic force microscopy. By varying the fluence, the size of the particles can be controlled. The enhancement factors of the nanostructures were determined by recording self-assembled monolayers of benzenethiol. The intensity of the SERS signal from benzenethiol is correlated to the mean particle size and thus to the fluence. Enhancement factors up to 10(6) with a high reproducibility were reached. Finally we have analyzed the temperature dependence of the SERS effect by recording the intensity of benzenethiol vibrations from 300 to 120 K. The temperature dependence of the SERS effect is discussed with regard to the metal properties.

Direct light-coupling to thin-film waveguides using a grating-structured GRIN lens.

We present a novel coupling scheme using a collimating gradient-index (GRIN) element provided with a high frequency grating to couple light from a single mode optical fiber directly to planar thin-film waveguides. The waveguide devices are used, for example, for an efficient fluorescence excitation in biosensor applications. The external coupler can be multiply reused and supersedes the conventional internal gratings. FEM simulations and experimental results show that the new technique can provide similar coupling efficiencies as common internal grating couplers.

Optical coherence tomography for process control of laser micromachining.

In situ surface imaging for nondestructive evaluation (NDE) by optical coherence tomography (OCT) before, during, and after ablative laser processing is presented. Furthermore, it is shown that the ability of in situ characterization is beneficial for samples such as optical fibers, which are difficult to handle in the standard analysis. Surface images taken by the OCT are compared with these common analysis tools such as scanning electron microscopy (SEM), reflected-light, and confocal microscopy. An axial resolution of approximately 126 nm for surface detection and a lateral resolution <2.5 microm are obtained and the potential of the setup to imaging structures with high aspect ratio is demonstrated.

F2-laser-machined submicrometer gratings in thin dielectric films for resonant grating waveguide applications.

Surface-relief gratings with submicrometer modulation periods were ablated by F2-laser radiation in thin metal-oxide films to produce resonant grating waveguide structures. For 150 nm films of Nb2O5, grating amplitudes in the range of 5-50 nm could be reproducibly excised with a controlled exposure of a laser energy density and a number of pulses within a narrow processing window. Resonant coupling of 800 nm ultrashort pulsed laser light into the resulting grating waveguide structure is verified with reflection and transmission spectra and satisfactorily modeled by coupled-mode theory. The laser-fabricated grating waveguides are attractive for high damage threshold reflectors and biosensor applications.

Do sperm cells remember?

Spontaneous alternation behavior (SAB) is the universal tendency of animals, including unicellular organisms, to alternate directional choices at consecutive left/right branchings while traversing a maze. Occurrence of SAB implies short-term memory, as a current decision is statistically dependent on previous ones. We developed a procedure to assess SAB in human spermatozoa. A total of 1302 progressively motile spermatozoa from healthy donors were observed as they entered one of two mazes, both fabricated by eximer laser ablation. The control maze was a simple T-maze (width=depth=20 microm, distance between entrance and free choice T-intersection=600 microm). The experimental maze was identical to the control maze except for a forced right-turn 600 microm before the T-intersection. We recorded individual sperm cells' left/right decisions at the T-intersections in both mazes. Of the 714 spermatozoa entering the control maze, 49.1% turned to the left (not significantly different from the chance expectation of 50.0%). Of the 588 spermatozoa entering the experimental maze, 58.6% turned left after the initial forced right turn (significant SAB; P=0.041, Wilcoxon). The statistical dependency of a directional decision on a previous one suggests a physiological 'memory' in human spermatozoa. Among the possible underlying mechanisms are refractory processes in structures responsible for flagellar beating, a postulation which deserves further scrutiny with video-monitored single-cell testing.