On-Chip Curing by Microwave for Long Term Usage of Electronic Devices in Harsh Environments.

Microwave-induced thermal curing is demonstrated to improve the reliability and to prolong the lifetime of chips containing nanoscale electron devices. A film containing graphite powder with high microwave absorbing efficiency was fabricated at low cost. The film is flexible, bendable, foldable, and attachable to a chip. A commercial off-the-shelf chip and a representative 3-dimensional (3D) metal-oxide-semiconductor field-effect transistor (MOSFET), known as FinFET, were utilized to verify the curing behaviors of the microwave-induced heat treatment. The heat effectively cured not only total ionizing dose (TID) damage from the external environment, but also internal electrical stress such as hot-carrier injection (HCI), which are representative sources of damages in MOSFET insulators. Then, the characteristics of the pre- and post-curing electron devices are investigated using electrical measurements and numerical simulations.

Nano-electromechanical Switch Based on a Physical Unclonable Function for Highly Robust and Stable Performance in Harsh Environments.

A physical unclonable function (PUF) device using a nano-electromechanical (NEM) switch was demonstrated. The most important feature of the NEM-switch-based PUF is its use of stiction. Stiction is one of the chronic problems associated with micro- and nano-electromechanical system (MEMS/NEMS) devices; however, here, it was utilized to intentionally implement a PUF for hardware-based security. The stiction is caused by capillary and van der Waals forces, producing strong adhesion, which can be utilized to design a highly robust and stable PUF. The probability that stiction will occur on either of two gates in the NEM switch is the same, and consequently, the occurrence of the stiction is random and unique, which is critical to its PUF performance. This uniqueness was evaluated by measuring the interchip Hamming distance (interchip HD), which characterizes how different responses are made when the same challenge is applied. Uniformity was also evaluated by the proportion of "1" or "0" in the response bit-string. The reliability of the proposed PUF device was assessed by stress tests under harsh environments such as high temperature, high dose radiation, and microwaves.

A Superamphiphobic Sponge with Mechanical Durability and a Self-Cleaning Effect.

A robust superamphiphobic sponge (SA-sponge) is proposed by using a single initiated chemical vapor deposition (i-CVD) process. Poly(3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,10-heptadecafluorodecyl methacrylate) (PFDMA) is deposited on a commercial sponge by the polymerization of fluoroalkyl acrylates during the i-CVD process. This PFDMA is conformally coated onto both the exterior and interior of the sponge structure by a single step of the i-CVD process at nearly room temperature. Due to the inherent porous structure of the sponge and the hydrophobic property of the fluorine-based PFDMA, the demonstrated SA-sponge shows not only superhydrophobicity but also superoleophobicity. Furthermore, the fabricated SA-sponge is robust with regard to physical and chemical damage. The fabricated SA-sponge can be utilized for multi-purpose applications such as gas-permeable liquid separators.

Nature-replicated nano-in-micro structures for triboelectric energy harvesting.

Triboelectric nanogenerators with nature-replicated interface structures are presented. Effective contact areas of the triboelectric surfaces are largely enhanced because of the densely packed nano-in-micro hierarchical structures in nature. The enlarged contact area causes stronger triboelectric charge density, which results in output power increment. The interface engineering also allows the improved humidity resistance, which is an important parameter for the stable energy harvesting.

Design strategy for a piezoelectric nanogenerator with a well-ordered nanoshell array.

The piezoelectric nanogenerator (PNG) has been spotlighted as a promising candidate for use as a sustainable power source in wireless system applications. For the further development of PNGs, structural optimization is essential, but the structural analysis progress in this area has been scant. In the present study, we proposed a PNG with a well-ordered nanoshell array structure. The nanoshell structure has been considered as an effective core nanostructure for PNGs due to its effective stress confinement effect but has not been experimentally introduced thus far due to the challenging fabrication method required. To produce a controllable nanoshell structure, a top-down silicon nanofabrication technique which involves advanced spacer lithography is introduced. A comprehensive design strategy to enhance the piezoelectric performance is proposed in terms of the nanoshell diameter and shell-to-shell space. Both simulated and measured data confirm that an extremely high density of a structure is not always the best answer to maximize the performance. The highest amount of power can be achieved when the shell diameter and shell-to-shell space are within their proper ranges. The structural design strategy studied in this work provides a guideline for the further structural developments of PNG.

A polydimethylsiloxane (PDMS) sponge for the selective absorption of oil from water.

We present a sugar-templated polydimethylsiloxane (PDMS) sponge for the selective absorption of oil from water. The process for fabricating the PDMS sponge does not require any intricate synthesis processes or equipment and it is not environmentally hazardous, thus promoting potential in environmental applications. The proposed PDMS sponge can be elastically deformed into any shape, and it can be compressed repeatedly in air or liquids without collapsing. Therefore, absorbed oils and organic solvents can be readily removed and reused by simply squeezing the PDMS sponge, enabling excellent recyclability. Furthermore, through appropriately combining various sugar particles, the absorption capacity of the PDMS sponge is favorably optimized.

Multi-layer nanogap array for high-performance SERS substrate.

A multi-layer nanogap array composed of three linearly aligned gold nanogaps is fabricated for a surface-enhanced Raman spectroscopy (SERS) substrate. The overall process for the proposed structure is simple and reliable with the use of a photolithography-free fabrication process, which includes only deposition and etching. Chemical vapor deposition (CVD) is employed to form a uniform and highly controllable nanogap array. The nanogap width, a crucial parameter in SERS, is determined by the sacrificial film thickness of CVD. Experiments on nanogap width and polarization angle dependence are carried out to characterize the fabricated multi-layer nanogap array as an SERS substrate.

Analytical modeling and thermodynamic analysis of robust superhydrophobic surfaces with inverse-trapezoidal microstructures.

A polydimethylsiloxane (PDMS) elastomer surface with perfectly ordered microstructures having an inverse-trapezoidal cross-sectional profile (simply PDMS trapezoids) showed superhydrophobic and transparent characteristics under visible light as reported in our previous work. The addition of a fluoropolymer (Teflon) coating enhances both features and provides oleophobicity. This paper focuses on the analytical modeling of the fabricated PDMS trapezoids structure and thermodynamic analysis based on the Gibbs free energy analysis. Additionally, the wetting characteristics of the fabricated PDMS trapezoids surface before and after the application of the Teflon coating are analytically explained. The Gibbs free energy analysis reveals that, due to the Teflon coating, the Cassie-Baxter state becomes energetically more favorable than the Wenzel state and the contact angle difference between the Cassie-Baxter state and the Wenzel state decreases. These two findings support the robustness of the superhydrophobicity of the fabricated Teflon-coated PDMS trapezoids. This is then verified via the impinging test of a water droplet at a high speed. The dependencies of the design parameters in the PDMS trapezoids on the hydrophobicity are also comprehensively studied through a thermodynamic analysis. Geometrical dependency on the hydrophobicity shows that overhang microstructures do not have a significant influence on the hydrophobicity. In contrast, the intrinsic contact angle of the structural material is most important in determining the apparent contact angle. On the other hand, the experimental results showed that the side angles of the overhangs are critical not for the hydrophobic but for the oleophobic property with liquids of a low surface tension. Understanding of design parameters in the PDMS trapezoids surface gives more information for implementation of superhydrophobic surfaces.

Superhydrophobic cylindrical nanoshell array.

A superhydrophobic property was demonstrated on a cylindrical poly crystalline silicon nanoshell array due to its geometrical properties, even without a hydrophobic coating. The proposed structure showed superior water-repellency compared to a conventional pillar structure with an identical structural dimension. This superhydrophobic property is attributed to an air pillar that exists in the nanoshell. Through the calculation of capillary pressure, the stability of the air pillar was confirmed. Furthermore, a droplet impinging test was conducted on the fabricated cylindrical nanoshell array to verify the robust Cassie state of the proposed structure under a dynamic condition.