Pixelated gradient thickness optical filter for visible light spectroscopy.

A miniature low-cost pixelated gradient thickness optical filter is proposed to achieve spectroscopy in the visible wavelength range. The optical filter consists of a two-dimensional array of metal-dielectric-metal thin films arranged in Fabry-Pérot filter configurations with discretely varying cavity thicknesses. The wavelength-selective characterization of each filter is performed by measuring the transmittance over the visible wavelength range. The pixelated gradient thickness filter is equipped with a CMOS image sensor, and its performance as a spectroscopic module is evaluated by illuminating different monochromatic wavelengths on it. The target spectra are successfully reconstructed from the output signals recorded in the sensor from the respective pixelated gradient thickness filters. The technological competence of the proposed filter will enable its use in handheld devices to widen its application range in day-to-day life.

Terahertz stretchable metamaterials with deformable dolmen resonators for uniaxial strain measurement.

In this study, we propose a terahertz stretchable metamaterial that can measure uniaxial strain. Gold dolmen resonators formed on a sheet of polydimethylsiloxane (PDMS) is deformed by strain, and its resonance peak exhibits the gradual decrease in reflectance without a frequency shift, which is suitable for imaging applications at a single frequency. The metamaterial was designed by mechanical and electromagnetic simulations and fabricated by microfabrication including a transfer process of gold structures from a glass substrate to a PDMS sheet. By measuring the reflectance and observing the deformation under different strains, the reflectance decrease was obtained at 0.292 THz despite the appearance of wrinkles on gold structures. Linear response and repeatability up to 20% strain were also confirmed. Furthermore, the strain measurement through a sheet of paper was demonstrated, suggesting that our method can be applied even in situations where opaque obstacles in the visible region exist.

Tunable Fabry-Perot interferometer operated in the terahertz range based on an effective refractive index control using pitch-variable subwavelength gratings.

We constructed a tunable Fabry-Perot interferometer (FPI) by controlling the effective refractive index of pitch-variable subwavelength gratings (PV-SWGs) that were incorporated into an FP cavity. The period of the PV-SWG can be varied to change the effective refractive index and shift the optical resonant frequency of the FPI. Compared with conventional methods that tune the optical resonance by adding fillers or deforming the cavity, the proposed FPI obtained a higher transmission and quality factor (Q-factor) for the transmittance peak, and its resonant frequency can be shifted by simply stretching the PV-SWG. A peak transmittance of 0.87, a Q-factor of 34, and a frequency shift of 17 GHz were obtained by the PV-SWG-based FPI for THz incomes around the frequency of 0.303 THz. As the effective refractive index and the working frequency can be tailored by altering the geometry design of the PV-SWG, the FPI holds significance for the development of THz communications and for applications at different wave bands.

Reconfigurable THz metamaterial based on microelectromechanical cantilever switches with a dimpled tip.

We numerically and experimentally proposed a reconfigurable THz metamaterial (MM) by employing microelectromechanical cantilevers into a ladder-shaped MM (LS-MM). A fixed-free cantilever array with a dimpled tip behaved as Ohmic switches to reshape the LS-MM so as to actively regular the transmission response of THz waves. The cantilever tip was designed to be a concave dimple to improve the operational life without sacrificing the mechanical resonant frequency (fmr), and a fmr of 635 kHz was demonstrated. The device actively achieved a 115-GHz change in transmittance resonant frequency and a 1.82-rad difference in transmission phase shift, which can practically benefit advancing THz applications such as fast THz imaging and 6 G communications.

Micro-fabricated Si subwavelength grating for frequency-domain THz beam steering covering the 0.3-0.5 THz frequency band.

We designed and fabricated beam steering subwavelength grating (BS-SWG) with high efficiency, wide angles, and broadband beam steering in the terahertz (THz) range. Beam steering technology in the THz range by a fixed structure and frequency sweep has to date lacked a device combining high efficiency and a wide beam steering angle. A subwavelength structure using float zone Si, a low-loss dielectric, could combine both of these aspects, but no experimental demonstration in the THz range has been performed to our knowledge. The BS-SWG was designed with an efficiency of 0.708 at 0.4 THz and beam steering angles of -72.1°--34.8° by sweeping the incident frequency from 0.3 THz to 0.5 THz including the Beyond 5 G/6 G communication bands. An efficiency of 0.354 at 0.400 THz and beam steering angles of -74°--34° were experimentally achieved, demonstrating the potential of high-efficiency, wide-angle beam steering for THz communications, imaging, and radar applications.

Measurement of cellular thermal properties and their temperature dependence based on frequency spectra via an on-chip-integrated microthermistor.

To understand the mechanism of intracellular thermal transport, thermal properties must be elucidated, particularly thermal conductivity and specific heat capacity. However, these properties have not been extensively studied. In this study, we developed a cellular temperature measurement device with a high temperature resolution of 1.17 m °C under wet conditions and with the ability to introduce intracellular local heating using a focused infrared laser to cultured cells on the device surface. Using this device, we evaluated the thermal properties of single cells based on their temperature signals and responses. Measurements were taken using on-chip-integrated microthermistors with high temperature resolution at varying surrounding temperatures and frequencies of local infrared irradiation on cells prepared on the sensors. Frequency spectra were used to determine the intensities of the temperature signals with respect to heating times. Signal intensities at 37 °C and a frequency lower than 2 Hz were larger than those at 25 °C, which were similar to those of water. The apparent thermal conductivity and specific heat capacity, which were determined at different surrounding temperatures and local heating frequencies, were lower than and similar to those of water at 37 °C and 25 °C, respectively. Our results indicate that the thermal properties of cells depend on both temperatures and physiological activities in addition to local heating frequencies.

Quality factor control of mechanical resonators using variable phononic bandgap on periodic microstructures.

The quality factor (Q-factor) is an important parameter for mechanical resonant sensors, and the optimal values depend on its application. Therefore, Q-factor control is essential for microelectromechanical systems (MEMS). Conventional methods have some restrictions, such as additional and complicated equipment or nanoscale dimensions; thus, structural methods are one of the reasonable solutions for simplifying the system. In this study, we demonstrate Q-factor control using a variable phononic bandgap by changing the length of the periodic microstructure. For this, silicon microstructure is used because it has both periodicity and a spring structure. The bandgap change is experimentally confirmed by measuring the Q-factors of mechanical resonators with different resonant frequencies. The bandgap range varies depending on the extended structure length, followed by a change in the Q-factor value. In addition, the effects of the periodic structure on the Q-factor enhancement and the influence of stress on the structural length were evaluated. Although microstructures can improve the Q-factors irrespective of periodicity; the result of the periodic microstructure is found to be efficient. The proposed method is feasible as the novel Q-factor control technique has good compatibility with conventional MEMS.

Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices.

This work reports investigation on the deposition and evaluation of an aluminum-doped zinc oxide (AZO) thin film and its novel applications to micro- and nano-devices. The AZO thin film is deposited successfully by atomic layer deposition (ALD). 50 nm-thick AZO film with high uniformity is checked by scanning electron microscopy. The element composition of the deposited film with various aluminum dopant concentration is analyzed by energy-dispersive X-ray spectroscopy. In addition, a polycrystalline feature of the deposited film is confirmed by selected area electron diffraction and high-resolution transmission electron microscopy. The lowest sheet resistance of the deposited AZO film is found at 0.7 kΩ/□ with the aluminum dopant concentration at 5 at.%. A novel method employed the ALD in combination with the sacrificial silicon structures is proposed which opens the way to create the ultra-high aspect ratio AZO structures. Moreover, based on this finding, three kinds of micro- and nano-devices employing the deposited AZO thin film have been proposed and demonstrated. Firstly, nanowalled micro-hollows with an aspect ratio of 300 and a height of 15 µm are successfully produced . Secondly, micro- and nano-fluidics, including a hollow fluidic channel with a nanowall structure as a resonator and a fluidic capillary window as an optical modulator is proposed and demonstrated. Lastly, nanomechanical resonators consisting of a bridged nanobeam structure and a vertical nanomechanical capacitive resonator are fabricated and evaluated.

Magnetostrictive Performance of Electrodeposited TbxDy(1-x)Fey Thin Film with Microcantilever Structures.

The microfabrication with a magnetostrictive TbxDy(1-x)Fey thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of TbxDy(1-x)Fey is deposited on a metal seed layer by electrodeposition using a potentiostat in an aqueous solution. Bi-material cantilever structures with the Tb0.36Dy0.64Fe1.9 thin-film are fabricated using microfabrication, and the magnetic actuation performances are evaluated under the application of a magnetic field. The actuators show large magnetostriction coefficients of approximately 1250 ppm at a magnetic field of 11000 Oe.

Nano and Microsensors for Mammalian Cell Studies.

This review presents several sensors with dimensions at the nano- and micro-scale used for biological applications. Two types of cantilever beams employed as highly sensitive temperature sensors with biological applications will be presented. One type of cantilever beam is fabricated from composite materials and is operated in the deflection mode. In order to achieve the high sensitivity required for detection of heat generated by a single mammalian cell, the cantilever beam temperature sensor presented in this review was microprocessed with a length at the microscale and a thickness in the nanoscale dimension. The second type of cantilever beam presented in this review was operated in the resonant frequency regime. The working principle of the vibrating cantilever beam temperature sensor is based on shifts in resonant frequency in response to temperature variations generated by mammalian cells. Besides the cantilever beam biosensors, two biosensors based on the electric cell-substrate impedance sensing (ECIS) used to monitor mammalian cells attachment and viability will be presented in this review. These ECIS sensors have dimensions at the microscale, with the gold films used for electrodes having thickness at the nanoscale. These micro/nano biosensors and their mammalian cell applications presented in the review demonstrates the diversity of the biosensor technology and applications.

Ion transport by gating voltage to nanopores produced via metal-assisted chemical etching method.

In this work, we report a simple and low-cost way to create nanopores that can be employed for various applications in nanofluidics. Nano sized Ag particles in the range from 1 to 20 nm are formed on a silicon substrate with a de-wetting method. Then the silicon nanopores with an approximate 15 nm average diameter and 200 µm height are successfully produced by the metal-assisted chemical etching method. In addition, electrically driven ion transport in the nanopores is demonstrated for nanofluidic applications. Ion transport through the nanopores is observed and could be controlled by an application of a gating voltage to the nanopores.

Design and Fabrication of Capacitive Silicon Nanomechanical Resonators with Selective Vibration of a High-Order Mode.

This paper reports the design and fabrication of capacitive silicon nanomechanical resonators with the selective vibration of a high-order mode. Fixed-fixed beam capacitive silicon resonators have been successfully produced by the use of electron beam lithography, photolithography, deep reactive ion etching, and anodic bonding methods. All resonators with different vibration modes are designed to have the same resonant frequency for performance comparison. Measurement results show that higher-order mode capacitive silicon resonators can achieve lower insertion loss compared to that of lower-order mode capacitive silicon resonators. The motional resistance of the fourth mode vibration resonator is improved by 83%, 90%, and 93% over the third, second, and first mode vibration resonators, respectively.

Highly sensitive thermometer using a vacuum-packed Si resonator in a microfluidic chip for the thermal measurement of single cells.

A highly sensitive thermometer system for a living cell is proposed, fabricated, and evaluated. The system possesses a resonant thermal sensor surrounded by vacuum in a microfluidic chip. The measurement principle relies on resonant frequency tracking of the resonator in temperature variations due to the heat from a sample cell; the heat is conducted from the sample cell in the microfluidic channel via a heat guide connecting the resonator to a sample stage. This configuration can reduce heat loss from the resonator to the surroundings and damping in water. Two types of resonators are prepared, i.e., a cantilevered resonator and a double-supported resonator. The resonator sizes as a sensor are 30 × 50 × 1.5 µm in the cantilevered resonator, 30 × 75 × 0.40 µm in the double-supported one, respectively. The temperature and thermal resolutions of 79 µK and 1.90 nW, respectively, are achieved using the double-supported resonator. Two types of heat emissions from single brown fat cells are detected; one is continuous heat generation in the presence of chemical stimulation by a norepinephrine solution, and the other is pulsed without any stimulation.

Efficacy of the Osaka Medical College (OMC) brace in the treatment of adolescent idiopathic scoliosis following Scoliosis Research Society brace studies criteria.

BACKGROUND: The efficacy of brace treatment for patients with adolescent idiopathic scoliosis (AIS) remains controversial. To make comparisons among studies more valid and reliable, the Scoliosis Research Society (SRS) has standardized criteria for brace studies in patients with AIS. The purpose of this study was to evaluate the efficacy of the Osaka Medical College (OMC) brace for AIS in accordance with the modified standardized criteria proposed by the SRS committee on bracing and non-operative management. METHODS: From 1999 through 2010, 31 consecutive patients with AIS who were newly prescribed the OMC brace and met the modified SRS criteria were studied. The study included 2 boys and 29 girls with a mean age of 12 years and 0 month. Patients were instructed to wear the brace for a minimum of 20 hours per day at the beginning of brace treatment. The mean duration of brace treatment was 4 years and 8 months. We examined the initial brace correction rate and the clinical outcomes of main curves evaluated by curve progression and surgical rate, and the compliance evaluated by the instruction adherence rate for all cases. The clinical course of the brace treatment was considered progression if ≥6° curvature increase occurred and improvement if ≥6° curvature decrease occurred according to SRS judgment criteria. RESULTS: The average initial brace correction rate was 46.8%. In 10 cases the curve progressed, 6 cases the curve improved, and 15 cases the curve remained unchanged (success rate: 67.7%). The mean instruction adherence rate, that was defined the percentage of the visits that patients declared they mostly followed our instruction to total visits, was 53.7%. The success rate was statistically higher in the patient group whose instruction adherence rate was greater than 50% (88.2%) as compared with in those 50% or less (42.8%). CONCLUSIONS: OMC brace treatment for AIS patients could alter the natural history and significantly decreased the progression of curves to the threshold for surgical intervention. Better instruction adherence of brace wear associated with greater success.

Predictive factors of Osaka Medical College (OMC) brace treatment in patients with adolescent idiopathic scoliosis.

BACKGROUND: Factors influencing clinical course of brace treatment apply to adolescent idiopathic scoliosis (AIS) patients remain unclear. By making clear them, we may select suitable patients for brace treatment and alleviate overtreatment. The purpose of this study was to explore predictive factors of Osaka Medical College (OMC) brace treatment for AIS patients in accordance with the modified standardized criteria proposed by the Scoliosis Research Society (SRS) committee on bracing and non-operative management. METHODS: From 1999 through 2010, 31 consecutive patients with AIS who were newly prescribed the OMC brace and met the modified SRS criteria were studied. The study included 2 boys and 29 girls with a mean age of 12 years and 0 month. We investigated the clinical course and evaluated the impacts of compliance, initial brace correction rate, curve flexibility, curve pattern, Cobb angle, chronological age, and Risser stage to clinical outcomes. The clinical course of the brace treatment was considered progression if ≥6° curvature increase occurred and improvement if ≥6° curvature decrease occurred according to SRS judgment criteria. RESULTS: The curve progressed in 10 cases, the curve improved in 6 cases, and the curve remained unchanged in 15 cases (success rate: 67.7%). The success rate was statistically higher in the patient group whose instruction adherence rate was greater than 50% as compared with in those 50% or less. Initial brace correction rate, curve flexibility, curve pattern, the magnitude of Cobb angle, chronological age, and Risser stage did not have any significant effect for clinical courses. However, success rate was insignificantly higher in the cases whose Cobb angle in brace was smaller than that in hanging position. CONCLUSIONS: OMC brace treatment could alter the natural history of AIS, however, that was significantly affected by compliance of brace wear.

Temperature changes in brown adipocytes detected with a bimaterial microcantilever.

Mammalian cells must produce heat to maintain body temperature and support other biological activities. Methods to measure a cell's thermogenic ability by inserting a thermometer into the cell or measuring the rate of oxygen consumption in a closed vessel can disturb its natural state. Here, we developed a noninvasive system for measuring a cell's heat production with a bimaterial microcantilever. This method is suitable for investigating the heat-generating properties of cells in their native state, because changes in cell temperature can be measured from the bending of the microcantilever, without damaging the cell and restricting its supply of dissolved oxygen. Thus, we were able to measure increases in cell temperature of <1 K in a small number of murine brown adipocytes (n = 4-7 cells) stimulated with norepinephrine, and observed a slow increase in temperature over several hours. This long-term heat production suggests that, in addition to converting fatty acids into heat energy, brown adipocytes may also adjust protein expression to raise their own temperature, to generate more heat. We expect this bimaterial microcantilever system to prove useful for determining a cell's state by measuring thermal characteristics.

Significance of hanging total spine x-ray to estimate the indicative correction angle by brace wearing in idiopathic scoliosis patients.

BACKGROUND: Although most idiopathic scoliosis patients subject to conservative treatment in daily clinical practice, there have been no ideal methods to evaluate the spinal flexibility for the patients who are scheduled the brace treatment. The purpose of this study was to investigate the value of hanging total spine x-ray to estimate the indicative correction angle by brace wearing in idiopathic scoliosis patients. METHODS: One hundred seventy-six consecutive patients with idiopathic scoliosis who were newly prescribed the Osaka Medical College (OMC) brace were studied. The study included 14 boys and 162 girls with a mean age of 13 years and 1 month. The type of curves consisted of 62 thoracic, 23 thoracolumbar, 22 lumbar, 42 double major, 14 double thoracic, and 13 triple curve pattern. We compared the Cobb angles on initial brace wearing (BA) and in hanging position (HA). Of those, 108 patients who had main thoracic curves were selected and evaluated the corrective ability of OMC brace. These subjects were divided into three groups according to the relation between BA and HA (BA < HA group, BA = HA group, and BA > HA group), and then, maturity was compared among them. RESULTS: The average Cobb angle in upright position (UA) of all cases was 31.0 ± 7.8°. The average BA and HA of all cases were 20.3 ± 9.5° and 21.1 ± 8.4°, respectively. The average chronological age was lowest in BA < HA group. And also, maturity in BA < HA group was the lowest among each of them. The rate of BA < HA cases were decreased as the Risser stage of the patients were progressed. CONCLUSIONS: The use of hanging total spine x-ray served as a useful tool to estimate the degree of correction possible curve within the OMC brace for main thoracic curve in idiopathic scoliosis. Maturity had some influence on the correlation between HA and BA. Namely, in immature patients, HA tended to be larger than BA. In contrast, in mature patients, HA had a tendency to be smaller than BA. With consideration for spinal flexibility based on maturity, in mature patients, larger BA than HA may be allowed. However, in immature patients, smaller BA than HA should be aimed.