High-Accuracy Contact Resistance Measurement Method for Liquid Metal by Considering Current-Density Distribution in Transfer Length Method Measurement.

Liquid metals (LMs) are used as stretchable conductors in various stretchable electronic devices. Moreover, such devices using Ga-based LMs have attracted considerable attention. Herein, we propose a method for accurately determining the contact resistance (Rc) between galinstan and Cu electrodes by considering the current-density distribution in transfer length method (TLM) measurement. Conventional TLM measurements assume that the sheet resistance of the metal electrode (Rshe) is negligible compared with that of the object (Rsho), such as Si. However, this assumption may be problematic because the Rsho of Ga-based liquid metals (LMs) is close to the Rshe. Therefore, we developed a method of applying current to each measuring electrode and compared it with the conventional method of applying current to the outer electrodes. Simulation results indicated that Rshe cannot be ignored for galinstan, and the measured resistance in the contact area (RcTotal) included <10% of the Rc component when current was applied to the outer electrodes. In contrast, RcTotal included the entire Rc component when current was applied to each electrode. Furthermore, we found that the volume resistances of the object and electrode included in RcTotal cannot be ignored. Therefore, for accurate measurement, current must be applied to each electrode, and Rc must be determined from the intersections of the measured and simulated RcTotal. The obtained contact resistivity (ρc), i.e., the contact resistance per unit contact area, was 0.115 mΩ·mm2. The maximum error was 0.085 mΩ·mm2, which was lower than the ρc of the solders (≥10-1 mΩ·mm2) with the lowest ρc among the electrical interface materials between the electronic components and wiring. This study provides valuable insight into the Rc measurement of LMs, along with new opportunities for the development of stretchable electronics using LMs.

Spiral Chiral Metamaterial Structure Shape for Optical Activity Improvements.

We report on a spiral structure suitable for obtaining a large optical response. We constructed a structural mechanics model of the shape of the planar spiral structure when deformed and verified the effectiveness of the model. As a verification structure, we fabricated a large-scale spiral structure that operates in the GHz band by laser processing. Based on the GHz radio wave experiments, a more uniform deformation structure exhibited a higher cross-polarization component. This result suggests that uniform deformation structures can improve circular dichroism. Since large-scale devices enable speedy prototype verification, the obtained knowledge can be exported to miniaturized-scale devices, such as MEMS terahertz metamaterials.

Conduction Conditions for Self-Healing of Metal Interconnect Using Copper Microparticles Dispersed with Silicone Oil.

This study clarifies the conditions for the bridging and conduction of a gap on a metal interconnect using copper microparticles dispersed with silicon oil. An AC voltage applied to a metal interconnect with a gap covered by a dispersion of metal microparticles traps the metal microparticles in the gap owing to the influence of a dielectrophoretic force on the interconnect, thus forming a metal microparticle chain. The current was tuned independently of the applied voltage by changing the external resistance. An AC voltage of 32 kHz was applied to a 10 µm wide gap on a metal interconnect covered with 3 µm diameter copper microparticles dispersed with silicone oil. Consequently, the copper microparticle chains physically bridged the interconnect and exhibited electrical conductivity at an applied voltage of 14 Vrms or higher and a post-bridging current of 350 mArms or lower. It was shown that the copper microparticle chains did not exhibit electrical conductivity at low applied voltages, even if the microparticle chains bridged the gap. A voltage higher than a certain value was required to achieve electrical conductivity, whereas an excessive voltage caused bubble formation and destroyed the bridges. These phenomena were explained based on the applied voltage and reference value of the current after bridging.

Origami-Type Flexible Thermoelectric Generator Fabricated by Self-Folding.

The flexibility of thermoelectric generators (TEGs) is important for low-contact thermal resistance to curved heat sources. However, approaches that depend on soft materials, which are used in most existing studies, have the problem of low performance in terms of the substrate's thermal conductivity and the thermoelectric conversion efficiency of the thermoelectric (TE) elements. In this study, we propose a method to fabricate "Origami-TEG", a TEG with an origami structure that enables both flexibility and the usage of high-performance rigid materials by self-folding. By applying the principle of the linkage mechanism to self-folding, we realized a fabrication process in which the TE element-mounting process and the active-material-addition process were separated in time. The fabricated origami-TEG showed similar internal resistance and maximum output power when attached to heat sources with flat and curved surfaces. Furthermore, it exhibited high-performance stability against both stretching and bending deformations.

Large Curvature Self-Folding Method of a Thick Metal Layer for Hinged Origami/Kirigami Stretchable Electronic Devices.

A self-folding method that can fold a thick (~10 µm) metal layer with a large curvature (>1 mm−1) and is resistant to repetitive folding deformation is proposed. Given the successful usage of hinged origami/kirigami structures forms in deployable structures, they show strong potential for application in stretchable electronic devices. There are, however, two key difficulties in applying origami/kirigami methods to stretchable electronic devices. The first is that a thick metal layer used as the conductive layer of electronic devices is too hard for self-folding as it is. Secondly, a thick metal layer breaks on repetitive folding deformation at a large curvature. To overcome these difficulties, this paper proposes a self-folding method using hinges on a thick metal layer by applying a meander structure. Such a structure can be folded at a large curvature even by weak driving forces (such as those produced by self-folding) and has mechanical resistance to repetitive folding deformation due to the local torsional deformation of the meander structure. To verify the method, the large curvature self-folding of thick metal layers and their mechanical resistance to repetitive folding deformation is experimentally demonstrated. In addition, an origami/kirigami hybrid stretchable electronic device with light-emitting diodes (LEDs) is fabricated using a double-tiling structure called the perforated extruded Miura-ori.

Quantification of Visual Texture and Presentation of Intermediate Visual Texture by Spatial Mixing.

We proposed a method to display an intermediate visual texture by spatial mixing. In addition to color information, the visual texture is an important element that characterizes the nature of an object's surface. While the system to display various color information has well matured in engineering, there is no method to reproduce visual textures in ambient light. In our method, the matte and glossy surfaces are used as "primary visual textures", and an intermediate visual texture is displayed by spatially mixing the primary visual textures. In this paper, we first quantified the visual texture of an object's surface based on measured intensities of scattered and reflected lights. Next, based on the quantification, we evaluated spatially mixed surfaces consisting of two primary visual textures, an acrylic plate and a holed sheet of drawing paper, by changing the area proportion of the two primary visual textures. Finally, a sensory evaluation showed significant differences between each intermediate visual texture, and the results corresponded to a trend in the optical evaluation. This study illustrates that visual textures could be quantified based on the intensity of scattered and reflected light and reveals the applicability of our method to the display for intermediate visual texture.

Method to Reduce the Contact Resistivity between Galinstan and a Copper Electrode for Electrical Connection in Flexible Devices.

This study demonstrates a method to mount electronic components using gallium-based liquid metals (LMs) with reduced contact resistivity between the LM and a copper (Cu) electrode. Gallium-based LMs have low volume resistivity and low melting points, and they are used as electronic components such as interconnects and sensors of stretchable electronic devices. However, the high contact resistivity of the oxide layer on the surface of the Ga-based LMs becomes a problem when the Ga-based LMs are used in contact with rigid electronic components. To overcome this problem, we studied herein the effect of the oxide layer on contact resistivity via the contact methods of the Ga-based LM (galinstan) and the Cu film. Through the placement of galinstan after the placement of the Cu film and application of vacuum to reduce the effect of the oxide layer, the contact resistivity was reduced to 0.59 × 10-7 Ωm2, which was 90% lower than that in the case where the Cu film was placed on galinstan on which the oxide layer grew (5.7 × 10-7 Ωm2) (day 1). Additionally, it was found that the contact resistivity decreased in the same order (10-8 Ωm2) over time regardless of the methods in which galinstan was applied (day 103). Furthermore, alloy formation on the Cu film surface was confirmed via elemental analysis. Finally, the mounting method using galinstan was demonstrated, which enabled the change in contact resistance to be maintained as low as 7.2% during 100% stretching deformation repeated 100 times (day 1 and day 130). Our results show that low and stable contact resistance with a high stretch tolerance can be achieved via the mounting method using galinstan based on our contact methods. This mounting method, therefore, expands the range of materials suitable for use as substrates and provides new opportunities for the development of stretchable electronics.

Design of a Kirigami Structure with a Large Uniform Deformation Region.

We designed a kirigami structure with a particular shape at both ends to provide a large uniform deformation region when stretched. When a kirigami structure is stretched, non-deformation regions, where the regions' cuts do not open, and non-uniform deformation regions, where the regions' cuts are not uniformly deformed, are produced. The extent of the non-deformation and non-uniform deformation regions increases in proportion to the number of cut cycles in the width direction n w this reduces the percentage of the uniform deformation region. We propose a method that increases the uniform deformation region in a kirigami structure by deforming the shape of the ends from a rectangle to a trapezoid when stretched. The proposed kirigami structure has separation lines at both ends that separate cuts in the width direction, and the position of contacts at both ends are moved to the center. The proposed kirigami structure has a large uniform deformation region, even when n w is large, as evidenced by calculating the area of open cuts under stretching. The product of our study realizes a stretchable electro device with a large area, which maintains the position of evenly mounted functional elements when stretched.

An Origami Heat Radiation Fin for Use in a Stretchable Thermoelectric Generator.

Recently, some studies have addressed the use of a folded substrate to realize stretchable electronic devices including stretchable thermoelectric generators (TEGs). However, the utilization of the folded substrate as a heat radiation fin has not been achieved. Herein, we have proposed the construction of a TEG with an origami-like folded structure substrate called an "origami-fin" that can achieve a high heat radiation performance and is also highly stretchable. The origami-fin increases the stretchability of the TEG by bending a non-stretchable material into a folded shape, and it also works as a heat radiator because of its large surface area compared to that of a flat structure. We evaluated the heat radiation performance of the origami-fin and the stability of the performance when it was stretched. The results demonstrate that the origami-fin works as a heat radiator and enhances the output of the TEG, while also exhibiting a high stretchability with only a slight output reduction.

Syringe-Injectable, Self-Expandable, and Ultraconformable Magnetic Ultrathin Films.

Syringe-injectable biomaterials and medical devices are important as minimally invasive implants for diagnosis, therapy, and regenerative medicine. Free-standing polymeric nanosheets with a thickness less than 1 µm and a flexural rigidity less than 10-2 nN m are a promising platform of syringe-injectable, implantable devices that provide conformable and long-term stable adhesion to the target biological tissues for in situ delivery of therapeutic materials. Here, we developed free-standing ultrathin films (<1 µm thick) based on polyurethane-based shape-memory polymer (SMP) and magnetic nanoparticles (MNP), termed MNP-SMP nanosheets. With the temperature-mediated shape-memory effect of SMP, we overcome the limitation in the manipulation of the conventional polymer nanosheets. In particular, we demonstrated the following four capabilities using the 710 nm thick MNP-SMP nanosheet with the glass transition temperature (Tg) of 25 °C: (1) syringe-injectability through the medical needles, (2) self-expandability after ejection, (3) conformability and removability on the biological surfaces, and (4) guidability in an external magnetic field. The MNP-SMP nanosheets were readily interfaced with an additional layer of poly(lactic-co-glycolic acid) (PLGA) to extend their functionality as a carrier of molecular and cellular drugs. The MNP-SMP nanosheets will contribute to the development of advanced syringe-injectable medical devices as a platform to deliver drugs, sensors, cells, and engineered tissues to the specific site or lesion in the body for minimally invasive diagnosis and therapy.

Design of Rigidity and Breaking Strain for a Kirigami Structure with Non-Uniform Deformed Regions.

We modeled a kirigami structure by considering the influence of non-uniform deforming cuts in order to theoretically design the mechanical characteristics of the structure. It is known that the end regions of kirigami structures are non-uniformly deformed when stretched, because the deformation is inhibited at the regions close to both the ends connected to the uncut region in the longitudinal direction. The non-uniform deformation affects the overall mechanical characteristics of the structure. Our model was intended to elucidate how cuts at both ends influence these characteristics. We focused on the difference in the deformation degree caused by a cut between the regions close to the ends and the center of the stretched kirigami device. We proposed a model comprising of connected springs in series with different rigidities in the regions close to the ends and the center. The spring model showed good prediction tendency with regard to the curve of the stress-strain diagram obtained using the tensile test with a test piece. Therefore, the results show that it is possible to theoretically design the mechanical characteristics of a kirigami structure, and that such a design can well predict the influence of cuts, which induce non-uniform deformation at both ends.

Resistance Change Mechanism of Electronic Component Mounting through Contact Pressure Using Elastic Adhesive.

For mounting electronic components through contact pressure using elastic adhesives, a high contact resistance is an inevitable issue in achieving solderless wiring in a low-temperature and low-cost process. To decrease the contact resistance, we investigated the resistance change mechanism by measuring the contact resistance with various contact pressures and copper layer thicknesses. The contact resistivity decreased to 4.2 × 10-8 Ω·m2 as the contact pressure increased to 800 kPa and the copper layer thickness decreased to 5 µm. In addition, we measured the change in the total resistance with various copper layer thicknesses, including the contact and wiring resistance, and obtained the minimum combined resistance of 123 mΩ with a copper-layer thickness of 30 µm using our mounting method. In this measurement, a low contact resistance was obtained with a 5-µm-thick copper layer and a contact pressure of 200 kPa or more; however, there is a trade-off with respect to the copper layer thickness in obtaining the minimum combined resistance because of the increasing wiring resistance. Subsequently, based on these measurements, we developed a sandwich structure to decrease the contact resistance, and a contact resistivity of 8.0 × 10-8 Ω·m2 was obtained with the proposed structure.

Radially arranged dihedral corner reflector array for wide viewing angle of floating image without virtual image.

We proposed a new type of dihedral corner reflector array (DCRA) called "radially arranged DCRA". Our radially arranged DCRA could display a floating, three-dimensional image with a wide viewing angle without producing virtual images because dihedral corner reflectors were radially arranged for the designed paths of rays. In this research, we designed a reflector array pattern and evaluated the viewing angle of the floating image displayed by our radially arranged DCRA. During evaluation, we measured the reflection ratio of the radially arranged DCRA and demonstrated a floating image. Compared with a conventional DCRA, our radially arranged DCRA could expand the viewing angle from ± 30° to ± 90° without producing virtual images.

Crack-Configuration Analysis of Metal Conductive Track Embedded in Stretchable Elastomer.

This paper reports the analysis of the crack configuration of a stretched metal conductive track that is embedded in a stretchable elastomer. The factor determining the crack configurations is analyzed by modeling as well as experiments. The modeling analysis indicates that the crack configuration is determined by the ratio of the elongation stiffness of the track and elastomer, and is classified into two types: multiple-crack growth and single-crack growth. When the track stiffness is considerably lower than the elastomer stiffness, multiple-crack growth type occurs; in the opposite case, single-crack growth type occurs. Hence, to verify the modeling analysis, metal conductive tracks with different thicknesses are fabricated, and the cracks are studied with respect to the crack width, number of cracks, and crack propagation speed. In this study, two conventional metal-track shapes are studied: straight-shaped tracks with track thickness of 0.04⁻1.17 µm, and wave-shaped tracks with track thickness of 2⁻10 µm. For straight-shaped tracks, multiple-crack growth type occurred, when the track thickness was 0.04 µm, and the crack configuration gradually changed to a single crack, with the increase in the track thickness. For wave-shaped tracks with track thickness of 2⁻10 µm, only single-crack growth type occurred; however, the crack propagation speed decreased and the maximum stretchability of the track increased, with the increase in the track thickness.

Design of Substrate Stretchability Using Origami-Like Folding Deformation for Flexible Thermoelectric Generator.

A stretchable thermoelectric (TE) generator was developed by using rigid BiTe-based TE elements and a non-stretchable substrate with origami-like folding deformation. Our stretchable TE generator contains flat sections, on which the rigid TE elements are arranged, and folded sections, which produce and guarantee the stretchability of a device. First, a simple stretchable device with a single pair of p-type and n-type BiTe-based TE elements was designed and fabricated. The TE elements were sandwiched between two folded polyimide-copper substrates. The length of the wiring between the flat sections changed from 1.0 mm in the folded state to 1.8 mm in the deployed state. It was also confirmed that the single-pair device could generate power in both the folded and deployed states. After this, a stretchable TE generator with eight pairs of p-type and n-type BiTe-based TE elements connected in series was created. The stretchable TE generator was capable of withstanding a stretching deformation of 20% and could also produce an output voltage in both the folded and deployed states.

Rapid prototyping of fluoropolymer microchannels by xurography for improved solvent resistance.

Microchannels made of fluoropolymers show potential merits due to their excellent solvent resistance, but such channels have not been widely used because of the complexity to fabricate them. This communication describes a method to prototype microfluidic devices using fluoropolymer films. The fabrication requires only two steps; cutting fluoropolymer films with a desktop cutting plotter and applying heat and pressure to laminate them. The method is rapid, simple, and low-cost. The conditions for heat press were identified for two common fluoropolymers: polytetrafluoroethylene and fluorinated ethylene propylene. The laminated films were confirmed to remain sealed with an internal pressure of at least 300 kPa. The fabricated devices were tested for the resistance to a set of organic solvents that would not be compatible with typical devices fabricated in polydimethylsiloxane. To highlight the potential of the fluoropolymer devices fabricated in this method, generation of droplets in a continuous stream of organic solvent using a T-junction channel was demonstrated. Our method offers a simple avenue to prototype microfluidic devices to conduct experiments involving organic solvents such as organic chemistry and in-channel synthesis of microparticles.

Micropatterning of Multiple Photonic Colloidal Crystal Gels for Flexible Structural Color Films.

We herein report the micropatterning of flexible multiple photonic colloidal crystal gels (PCCGs) using single-layered microchannels. These patterned PCCGs exhibit structural colors that can be tuned by adjustment of the diameter and concentration of the colloidal particles in precursor solutions of N-isopropylacrylamide (NIPAM) or polyethylene glycol diacrylate (PEGDA). The precursor solutions containing dispersed colloidal particles were selectively injected into single-layered microchannels where they polymerized rapidly. The shape, density, and height of the patterned PCCG pixels were determined by the microchannels, which in turn determined the optical properties of the PCCG arrays. Furthermore, the preparation of three different types of PCCGs exhibiting three different structural colors at a high pixel density was demonstrated successfully using the single-layered polydimethylsiloxane (PDMS) microchannels. Finally, the optical reflective properties and the mechanical flexibility of the patterned multiple PCCG arrays were evaluated. We expect that our method for the preparation of such patterned PCCG arrays will contribute to the development of flexible optical devices.

Optomechanical and photothermal interactions in suspended photonic crystal membranes.

We present here an optomechanical system fabricated with novel stress management techniques that allow us to suspend an ultrathin defect-free silicon photonic-crystal membrane above a Silicon-on-Insulator (SOI) substrate with a gap that is tunable to below 200 nm. Our devices are able to generate strong attractive and repulsive optical forces over a large surface area with simple in- and out- coupling and feature the strongest repulsive optomechanical coupling in any geometry to date (gOM/2π ≈65 GHz/nm). The interplay between the optomechanical and photo-thermal-mechanical dynamics is explored, and the latter is used to achieve cooling and amplification of the mechanical mode, demonstrating that our platform is well-suited for potential applications in low-power mass, force, and refractive-index sensing as well as optomechanical accelerometry.

Bonding, antibonding and tunable optical forces in asymmetric membranes.

We demonstrate that tunable attractive (bonding) and repulsive (anti-bonding) forces can arise in highly asymmetric structures coupled to external radiation, a consequence of the bonding/anti-bonding level repulsion of guided-wave resonances that was first predicted in symmetric systems. Our focus is a geometry consisting of a photonic-crystal (holey) membrane suspended above an unpatterned layered substrate, supporting planar waveguide modes that can couple via the periodic modulation of the holey membrane. Asymmetric geometries have a clear advantage in ease of fabrication and experimental characterization compared to symmetric double-membrane structures. We show that the asymmetry can also lead to unusual behavior in the force magnitudes of a bonding/antibonding pair as the membrane separation changes, including nonmonotonic dependences on the separation. We propose a computational method that obtains the entire force spectrum via a single time-domain simulation, by Fourier-transforming the response to a short pulse and thereby obtaining the frequency-dependent stress tensor. We point out that by operating with two, instead of a single frequency, these evanescent forces can be exploited to tune the spring constant of the membrane without changing its equilibrium separation.

Differential pressure measurement using a free-flying insect-like ornithopter with an MEMS sensor.

This paper presents direct measurements of the aerodynamic forces on the wing of a free-flying, insect-like ornithopter that was modeled on a hawk moth (Manduca sexta). A micro differential pressure sensor was fabricated with micro electro mechanical systems (MEMS) technology and attached to the wing of the ornithopter. The sensor chip was less than 0.1% of the wing area. The mass of the sensor chip was 2.0 mg, which was less than 1% of the wing mass. Thus, the sensor was both small and light in comparison with the wing, resulting in a measurement system that had a minimal impact on the aerodynamics of the wing. With this sensor, the 'pressure coefficient' of the ornithopter wing was measured during both steady airflow and actual free flight. The maximum pressure coefficient observed for steady airflow conditions was 1.4 at an angle of attack of 30 degrees . In flapping flight, the coefficient was around 2.0 for angles of attack that ranged from 25 degrees to 40 degrees . Therefore, a larger aerodynamic force was generated during the downstroke in free flight compared to steady airflow conditions.