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Guang Pu Xue Yu Guang Pu Fen Xi ; 32(9): 2331-5, 2012 Sep.
Article in Chinese | MEDLINE | ID: mdl-23240390

ABSTRACT

In order to measure the microscopic 3D morphology of the objects with high-precision, a 3D texture measurement system of digital gatling based on structured light was designed, which can calculate the 3D height information with the analytic phase method. First, the authors collected sixteen equal step phase images by the four-step equal step method, and calculated their main value by dividing them into four groups. Then, the authors found the average as the final phase main value. The pretreatment on the fringe was done by the adaptive Wiener filter and wavelet multi-threshold method to eliminate the various effects of noise, projector distortion and CCD camera distortion. Besides, gradient-oriented phase unwrapping algorithm based on multifrequency was introduced to avoid phase discontinuity point in the course phase unwrapping, and it was proven to be effective and stable. Experiments showed that the system's 3D resolution was 2.75 microm, and the high degree accuracy was better than 0.5 microm, when the system was running with the fringe parameter p0 = 22.7 mm(-1). In addition, the system has many advantages such as fast measuring, simple operation and non-contact, which can meet the need of the high precision measurement requirements for the microscopic 3D morphology.

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