ABSTRACT
The modular magnetic suspension platform depends on multi degree of freedom of Lorentz force actuators for large bearing capacity, high precision positioning and structure miniaturization. To achieve the integration of vertical driving force and horizontal driving force, a novel 2- (two degrees-of-freedom) DOF Lorentz force actuator is developed by designing the pose of the windings and permanent magnets (PMs). The structure and the working principle are introduced. The electromagnetic force mathematical model is established by the equivalent magnetic circuit method to analyze the coupling of magnetic flux. The distribution characteristics of magnetic flux density are analyzed by the finite-element method (FEM). It is found that the coupling of the magnetic flux and the large magnetic field gradient severely reduce the uniformity of the air-gap magnetic field. The electromagnetic force characteristic is investigated by FEM and measurement experiments. The difference between FEM and experiment results is within 10%. The reasons of driving force fluctuation are explained based on the distribution of air-gap magnetic field. The actuator performance are compared under the sliding mode control algorithm and PID control algorithm and the positioning accuracy is 20 µm and 15 µm respectively. Compared with the similar configuration, the motion range and force coefficient of the Lorentz force actuator in this paper are larger. It has a certain guiding significance on the structure design of the multi degree of freed Lorentz force actuator.
