ABSTRACT
We report the enhanced conductivity of sol-gel silica under-cladding for efficient poling of electro-optic (EO) polymer in a hybrid EO polymer/TiO2 vertical slot waveguide modulator. The electrical volume conductivity of sol-gel silica cladding increases approximately 30 times when the calcining time of the cladding layer is critically reduced to 45 minutes, which increases the in-device EO coefficient of the 600-nm-thick EO polymer film in modulators and reduces the lower halfwave voltage (Vπ) of the modulators. The lowest driving voltage (Vπ) of the TiO2 slot waveguide modulator is 2.0 V for an electrode length (Le) of 10 mm and wavelength of 1550 nm (VπLe = 2.0 V·cm) for the low-index guest-host EO polymer SEO125. The optical propagation loss is reduced to 7 dB/cm.
