ABSTRACT
We describe a transportable distance measurement system based on synthetic wavelength interferometry. Two frequency-doubled Nd:yttrium aluminum garnet lasers at 532 nm are used to generate a synthetic wavelength of approximately 2.5 cm. A nonpolarizing interferometric system has been set up to eliminate polarization cross-talk issue. A superheterodyne detection was performed to measure the synthetic phase and to determine absolute distances. The capability to achieve fringe interpolation of 2pi/5600 has been demonstrated and an agreement in distance measurement at the 4 microm level has been achieved, compared to an optical interferometric 3 m long displacement bench.
ABSTRACT
We propose and demonstrate a displacement control method at the subnanometric scale based on a Michelson interferometer combined with a polarimeter and a phase-locked loop electronic board. Step by step displacements with a step value of 5 nm are presented. A repeatability of 0.47 nm is obtained from back and forth displacements over 1 mum range. We show that a residual ellipticity of less than 10 degrees on the polarization state leads to a positioning error of less than 1 nm. Such system could be used over millimeter range displacements in a controlled surrounding environment leading to numerous applications in nanometrology.
ABSTRACT
A new system, consisting of a double-channel Fabry-Perot etalon and laser diodes emitting around 780 nm, is described and proposed for use for measuring air-refractive index. The principle of this refractometer is based on frequency measurements between optical laser sources. It permits quasi-instantaneous measurement with a resolution of better than 10(-9) and uncertainty in the 10(-8) range. Some preliminary results on the stability of this system and the measurements of the refractive index of air with this apparatus are presented. The first measurements of the index of air at 780 nm are, within an experimental uncertainty of the order of 2 x 10(-8), in agreement with the predicted values by the so-called revised Edlén equations. This result is, to the best of our knowledge, the first to extend to the near IR the validity of the revised Edlén equation derived for the wavelength range of 350-650 nm.
