ABSTRACT
This work presents the single-chip integration of a multi-frequency surface acoustic wave resonator (SAWR) based humidity sensor. Graphene oxide (GO), a humidity-sensing material, is integrated onto a confined sensing area of SAWR via electrospray deposition (ESD). The ESD method allows ng-resolution deposition of GO, optimizing the amount of sensing material. The proposed sensor consists of SWARs at three different resonant frequencies (180, 200 and 250 MHz) with a shared common sensing region, thus allowing direct analysis of sensor performances at different operating frequencies. Our findings reveal that the resonant frequency of the sensor impacts both measurement sensitivity and stability. A higher operating frequency ensures better sensitivity but suffers from a larger damping effect from absorbed water molecules. The maximum measurement sensitivity of 17.4 ppm/RH% is achieved with low drift. In addition, the developed sensor exhibits improved stability and sensitivity by as much as 150% and 75% in frequency shift and Quality factor (Q), respectively, by carefully selecting the operating frequencies at a given RH% range. Finally, the sensors are used for various hygienic applications, such as non-contact proximity detection and face mask inspection.
ABSTRACT
The mass concentration of fine dust or particles acts as a standard measure to express the severity of air pollution. In connection with this, many related sensor technologies have been suggested for both indoor and outdoor uses. Among several technologies, the direct measurement of the dust mass using resonant platforms is the most preferable as it possesses multiple advantages including high sensitivity, low limit of detection, and a rapid response time. Such sensor performances directly rely on the adhesion quality between the sensor substrate and dust. In this work, we introduce a thermally controlled dust capturing scheme by integrating a polystyrene (PS) layer and microheater on quartz crystal microbalance (QCM). The Pt microheater can rapidly heat the sensor up to 100 °C, allowing a controlled switching between the soft and hard conditions of the PS film at a rapid rate. When the film is soft, the sensor can capture dust particle efficiently and we can calibrate the attached particle mass by measuring the resonance response. Compared to a bare QCM, our sensor used in this study exhibits 11 times larger detectable mass range. In addition, heated QCMs show a performance that is comparable to a high-cost particle sensing equipment such as an aerodynamic particle sizer and optical particle counter.
Subject(s)
Dust , Quartz Crystal Microbalance Techniques , Polystyrenes , QuartzABSTRACT
This study presents the effects of bottom electrode designs on the operation of laterally vibrating aluminum nitride (AlN) contour-mode resonators (CMRs). A total of 160 CMRs were analyzed with varying bottom electrode areas at two resonant frequencies (f0) of about 230 MHz and 1.1 GHz. Specifically, we analyzed the impact of bottom electrode coverage rates on the resonator quality factor (Q) and electromechanical coupling (k2), which are important parameters for Radio Frequency (RF) and sensing applications. From our experiments, Q exhibited different trends to electrode coverage rates depending on the device resonant frequencies, while k2 increased with the coverage rate regardless of f0. Along with experimental measurements, our finite element analysis (FEA) revealed that the bottom electrode coverage rate determines the active (or vibrating) region of the resonator and, thus, directly impacts Q. Additionally, to alleviate thermoelastic damping (TED) and focus on mechanical damping effects, we analyzed the device performance at 10 K. Our findings indicated that a careful design of bottom electrodes could further improve both Q and k2 of AlN CMRs, which ultimately determines the power budget and noise level of the resonator in integrated oscillators and sensor systems.
