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Opt Express ; 11(12): 1406-10, 2003 Jun 16.
Article in English | MEDLINE | ID: mdl-19466012

ABSTRACT

This letter presents a method to fabricate high quality, high refractive index titanium oxide thin films by applying liquid phase spin-on deposition combined with low temperature annealing. The synthesis of the liquid form titanium oxide material is carried out using a sol-gel synthesis technique. The material can be annealed at low temperature (150 C degrees ) to achieve relatively high refractive index of 1.94 at 632.8 nm wavelength, whereas annealing at 350 C degrees results in index of 2.03 at 632.8 nm. Film depositions are demonstrated on silicon substrates with 0.5% uniformity in thickness. Refractive indices and extinction coefficients are characterized over a broad wavelength range to demonstrate the optical performance of this novel aqueous phase spin-on deposited hybrid titanium oxide material.

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