1.
J Electron Microsc (Tokyo)
; 50(3): 235-41, 2001.
Article
in English
| MEDLINE
| ID: mdl-11469412
ABSTRACT
A new scanning transmission electron microscope has been developed for three-dimensional (3D) observations of nanostructures. Using double spherical fulcra, accurate eucentric rotation was achieved. Cylindrical specimens for 3D-observation were prepared by a microsampling technique using a focused ion beam. Copper via-holes of a semiconductor memory device and ZnO particles were observed by the 3D-STEM from different directions, and 3D-data of the ZnO particles were successfully reconstructed in a topography mode.
2.
3.
Phys Rev B Condens Matter
; 40(2): 1159-1163, 1989 Jul 15.
Article
in English
| MEDLINE
| ID: mdl-9991939