ABSTRACT
A silicon based chip device with a regular array of more than 100,000 cylindrical sub-microelectrodes has been developed for the dielectrophoretic (DEP) manipulation of nanoparticles and molecules in solution. It was fabricated by a standard CMOS (complementary metal oxide semiconductor) compatible process. The distribution of the electrical field gradient was calculated to predict the applicability of the setup. Heating due to field application was determined microscopically using a temperature sensitive fluorescent dye. Depending on voltage and frequency, temperature increase was found to be compatible with protein function. Successful field controlled immobilisation of biomolecules from solution was demonstrated with the autofluorescent protein R-phycoerythrin (RPE) and with fluorescently labelled IgG antibodies. Biological activity after DEP application was proven by immobilisation of an anti-RPE antibody and subsequent binding of RPE. These results demonstrate that the developed chip system allows the directed immobilisation of proteins onto microelectrodes by dielectrophoresis without the need for any chemical modification and that protein function is preserved. Being based on standard lithographical methods, further miniaturisation and on-chip integration of electronics towards a multiparameter single cell analysis system appear near at hand.
Subject(s)
Antibodies/immunology , Electrophoresis , Microarray Analysis/methods , Animals , Antibodies, Immobilized/chemistry , Antibodies, Immobilized/immunology , Fluorescent Dyes/chemistry , Goats , Humans , Microarray Analysis/instrumentation , Microelectrodes , Miniaturization , Nanoparticles/chemistry , Phycoerythrin/immunology , Phycoerythrin/metabolism , Semiconductors , TemperatureABSTRACT
A simulation study of Rayleigh wave devices based on a stacked AlN/SiO2/Si(100) device was carried out. Dispersion curves with respect to acoustic phase velocity, reflectivity and electromechanical coupling efficiency for tungsten W and aluminium Al electrodes and different layer thicknesses were quantified by 2D FEM COMSOL simulations. Simulated acoustic mode shapes are presented. The impact of these parameters on the observed Rayleigh wave modes was discussed. High coupling factors of 2% and high velocities up to 5000 m/s were obtained by optimizing the AlN/SiO2 thickness ratio.
Subject(s)
Aluminum Compounds/chemistry , Micro-Electrical-Mechanical Systems/instrumentation , Silicon Dioxide/chemistry , Sound , Transducers , Transistors, Electronic , Aluminum Compounds/radiation effects , Computer-Aided Design , Equipment Design , Equipment Failure Analysis , Finite Element Analysis , Scattering, Radiation , Silicon Dioxide/radiation effectsABSTRACT
The enzyme horseradish peroxidase has been immobilized on nanoelectrode arrays by alternating current dielectrophoresis (DEP). Preservation of its enzymatic function after field application was demonstrated by oxidizing dihydrorhodamine 123 with hydrogen peroxide as co-oxidant to create its fluorescent form, rhodamine 123 (Rh123). Localization of the fluorescently labeled enzyme and its product was conducted by fluorescence microscopy. Nanoelectrodes were prepared as tungsten pins arranged in square arrays. Experimental parameters for dielectrophoretic immobilization were optimized for even enzyme distribution and for enzymatic efficiency. Enzyme activity was quantified by determination of fluorescence intensities of immobilized enzyme molecules and of Rh123 produced. These results demonstrate that DEP can be applied to immobilize enzyme molecules while retaining their activity and rendering any chemical modifications unnecessary. This introduces a novel way for the preparation of bioactive surfaces for processes such as biosensing.
