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Opt Express ; 23(13): 16857-65, 2015 Jun 29.
Article in English | MEDLINE | ID: mdl-26191697

ABSTRACT

A novel high-speed Mach-Zehnder modulator (MZM) fully integrated into a 90 nm CMOS process is presented. The MZM features 'double-pass' optical phase shifter segments, and the first use of integrated inductors in a 'velocity-matched' distributed-electrode configuration.

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