ABSTRACT
Thermionic emission sources are key components of electron impact gas ion sources used in measuring instruments, such as mass spectrometers, ionization gauges, and apparatus for ionization cross-section measurements. The repeatability of the measurements taken with such instruments depends on the stability of the ion current, which is a function, among other things, of the electron beam current and electron accelerating voltage. In this paper, a laboratory thermionic electron beam current and accelerating voltage controller is presented, based on digital algorithm implementation. The average value of the percentage standard deviation of the emission current is 0.021%, and the maximum electron accelerating voltage change versus the emission current is smaller than 0.011% in the full operating range of the emission current. Its application as a trap current or emission current-regulated ion source power supply could be useful in many measuring instruments, such as in microelectromechanical system (MEMS) mass spectrometers as universal gas sensors, where a stable emission current and electron energy are needed.
