1.
Appl Opt
; 38(4): 684-91, 1999 Feb 01.
Article
in English
| MEDLINE
| ID: mdl-18305664
ABSTRACT
The surface roughness of polished glass substrates and optical thin-film coatings is studied with atomic force microscopy and x-ray scattering. It is demonstrated that both methods permit the determination of power spectral density functions in a wide range of spatial frequencies. The results are in good quantitative agreement.