ABSTRACT
A continuous wave cavity ring-down (cw-CRD) spectrometer has been developed for the measurement of trace levels of water vapor by absorption spectroscopy at wavelengths in the vicinity of 1358 nm and 1392 nm. The speed of data acquisition and selectivity make cavity ringdown spectroscopy potentially more useful than current techniques for measurement of trace water in process gases and vacuum environments used for semiconductor manufacture where water vapor contamination has a detrimental effect on the final product. The pressure broadening coefficients (gamma) for bath gases N(2), air, and Ar and semiconductor process gases SiH(4), PH(3), and CF(4) were determined for a range of absorption lines in the 2nu(1) and nu(1) + nu(3) bands of H(2)O. For the transitions investigated, the concentration of water vapor in the sample gas varied from 1.7 x 10(12) to 2.9 x 10(15) molecule cm(-3) in N(2) at a total pressure of <10 mbar and was mixed with the bath gas of increasing pressure up to approximately 200 mbar. The values of gamma quantify the reduction in peak absorption cross-sections with bath gas pressure and, thus, their effects on the detection limit of water vapor. For a CRD spectrometer with a ring-down time of tau = 12.0 mus measured with a precision of 0.6%, detection limits for the measurement of water vapor in 1 atm N(2) and of CF(4) were estimated to be 18 and 14 ppbv, respectively. Competing absorption by SiH(4) and PH(3) in the 1.3 mum wavelength region results in respective detection limits for water vapor of 98 and 319 ppbv (relative to 1 atm) in 0.2 atm SiH(4) and 0.37 atm PH(3).
ABSTRACT
A potentiometric device based on interfacing a solid electrolyte oxygen ion conductor with a thin platinum film acts as a robust, reproducible sensor for the detection of hydrocarbons in high- or ultrahigh-vacuum environments. Sensitivities in the order of approximately 5 x 10(-10) mbar are achievable under open circuit conditions, with good selectivity for discrimination between n-butane on one hand and toluene, n-octane, n-hexane, and 1-butene on the other hand. The sensor's sensitivity may be tuned by operating under constant current (closed circuit) conditions; injection of anodic current is also a very effective means of restoring a clean sensing surface at any desired point. XPS data and potentiometric measurements confirm the proposed mode of sensing action: the steady-state coverage of Oa, which sets the potential of the Pt sensing electrode, is determined by the partial pressure and dissociative sticking probability of the impinging hydrocarbon. The principles established here provide the basis for a viable, inherently flexible, and promising means for the sensitive and selective detection of hydrocarbons under demanding conditions.
