ABSTRACT
Soft energy storage devices, such as supercapacitors, are an essential component for powering integrated soft microsystems. However, conventional supercapacitors are mainly manufactured using hard/brittle materials that easily crack and eventually delaminate from the current collector by mechanical deformation. Therefore, to realize all-soft supercapacitors, the electrodes should be soft, stretchable, and highly conductive without compromising the electrochemical performance. This paper presents all-soft supercapacitors for integrated soft microsystems based on gallium-indium liquid metal (eutectic gallium-indium alloy, EGaIn) electrodes with integrated functionalized carbon nanotubes (CNTs). Oxygen functional groups on the surface of the CNTs ensure strong adhesion between the functionalized CNTs and the thin native oxide layer on the surface of EGaIn, which enables delamination-free soft and stretchable electrodes even under mechanical deformation. The electrochemical performances of fabricated all-soft supercapacitors in a parallel-plate arrangement were investigated without and with applied mechanical deformation. The fabricated supercapacitors exhibit areal capacitances as high as 12.4 mF cm-2 and show nearly unchanged performance under 30% applied strain. They maintain >95% of their original capacitance after >4200 charging and discharging cycles with a periodic applied strain of 30%. Finally, fabricated supercapacitors have been successfully integrated with a commercial light-emitting diode to demonstrate an integrated soft microsystem.
ABSTRACT
Lightweight, flexible, stretchable, and wireless sensing platforms have gained significant attention for personal healthcare and environmental monitoring applications. This paper introduces an all-soft (flexible and stretchable), battery-free, and wireless chemical microsystem using gallium-based liquid metal (eutectic gallium-indium alloy, EGaIn) and poly(dimethylsiloxane) (PDMS), fabricated using an advanced liquid metal thin-line patterning technique based on soft lithography. Considering its flexible, stretchable, and lightweight characteristics, the proposed sensing platform is well suited for wearable sensing applications either on the skin or on clothing. Using the microfluidic sensing platform, detection of liquid-phase and gas-phase volatile organic compounds (VOC) is demonstrated using the same design, which gives an opportunity to have the sensor operate under different working conditions and environments. In the case of liquid-phase chemical sensing, the wireless sensing performance and microfluidic capacitance tunability for different dielectric liquids are evaluated using analytical, numerical, and experimental approaches. In the case of gas-phase chemical sensing, PDMS is used both as a substrate and a sensing material. The gas sensing performance is evaluated and compared to a silicon-based, solid-state gas sensor with a PDMS sensing film.
