Power Scavenging Microsystem for Smart Contact Lenses.

On-the-eye microsystems such as smart contacts for vision correction, health monitoring, drug delivery, and displaying information represent a new emerging class of low-profile (≤ 1 mm) wireless microsystems that conform to the curvature of the eyeball surface. The implementation of suitable low-profile power sources for eye-based microsystems on curved substrates is a major technical challenge addressed in this paper. The fabrication and characterization of a hybrid energy generation unit composed of a flexible silicon solar cell and eye-blinking activated Mg-O2 metal-air harvester capable of sustainably supplying electrical power to smart ocular devices are reported. The encapsulated photovoltaic device provides a DC output with a power density of 42.4 µW cm-2 and 2.5 mW cm-2 under indoor and outdoor lighting conditions, respectively. The eye-blinking activated Mg-air harvester delivers pulsed power output with a maximum power density of 1.3 mW cm-2 . A power management circuit with an integrated 11 mF supercapacitor is used to convert the harvesters' pulsed voltages to DC, boost up the voltages, and continuously deliver ≈150 µW at a stable 3.3 V DC output. Uniquely, in contrast to wireless power transfer, the power pack continuously generates electric power and does not require any type of external accessories for operation.

Refractive-type varifocal liquid-crystal Fresnel lenses for smart contacts.

We demonstrate the implementation of a low-power, low-profile, varifocal liquid-crystal Fresnel lens stack suitable for tunable imaging in smart contact lenses. The lens stack consists of a high-order refractive-type liquid crystal Fresnel chamber, a voltage-controlled twisted nematic cell, a linear polarizer and a fixed offset lens. The lens stack has an aperture of 4 mm and thickness is ∼980 µm. The varifocal lens requires ∼2.5 VRMS for a maximum optical power change of ∼6.5 D consuming electrical power of ∼2.6 µW. The maximum RMS wavefront aberration error was 0.2 µm and the chromatic aberration was 0.008 D/nm. The average BRISQUE image quality score of the Fresnel lens was 35.23 compared to 57.23 for a curved LC lens of comparable power indicating a superior Fresnel imaging quality.

Flexible and Semi-Transparent Silicon Solar Cells as a Power Supply to Smart Contact Lenses.

Supplying electric power to wearable IoT devices, particularly smart contact lenses (SCLs), is one of the main obstacles to widespread adoption and commercialization. In the present study, we have successfully designed, fabricated, and characterized semi-transparent, self-supported, and flexible single crystalline silicon solar cells using a single-sided micromachining procedure. Optical, mechanical, and electrical simulations, together with the practical measurements, verify the application of our developed solar cells to be mounted on a limited-footprint and flexible SCL. The 15 µm-thick silicon solar cells conformally fit on a dome-shaped contact lens (ROC = 8 mm) without any mechanical and electrical degradation. This homojunction photovoltaic device containing an array of micro-holes exhibits a V oc, J sc, and maximum power density of 504 mV, 6.48 mA cm-2, and 1.67 mW cm-2, respectively, at 25% visible light transparency under an AM1.5 one sun condition. Furthermore, the measurements were conducted under low-intensity indoor light conditions and resulted in a maximum power output of 25 and 42 µW cm-2 for the 50 and 25% transparent solar cells, respectively.

Correcting Presbyopia With Autofocusing Liquid-Lens Eyeglasses.

OBJECTIVE: Presbyopia, an age-related ocular disorder, is characterized by the loss in the accommodative abilities of the human eye. Conventional methods of correcting presbyopia divide the field of view, thereby resulting in significant vision impairment. We demonstrate the design, assembly and evaluation of autofocusing eyeglasses for restoration of accommodation without dividing the field of view. METHODS: The adaptive optics eyeglasses comprise of two variable-focus liquid lenses, a time-of-flight range sensor and low-power, dual microprocessor control electronics, housed within an ergonomic frame. Subject-specific accommodation deficiency models were utilized to demonstrate high-fidelity accommodative correction. The abilities of this system to reduce accommodation deficiency, its power consumption, response time, optical performance and MTF were evaluated. RESULTS: Average corrected accommodation deficiencies for 5 subjects ranged from -0.021 D to 0.016 D. Each accommodation correction calculation was performed in ∼67 ms which consumed 4.86 mJ of energy. The optical resolution of the system was 10.5 cycles/degree, and featured a restorative accommodative range of 4.3 D. This system was capable of running for up to 19 hours between charge cycles and weighed ∼132 g. CONCLUSION: The design, assembly and performance of an autofocusing eyeglasses system to restore accommodation in presbyopes has been demonstrated. SIGNIFICANCE: The new autofocusing eyeglasses system presented in this article has the potential to restore pre-presbyopic levels of accommodation in subjects diagnosed with presbyopia.

Low-Profile Induced-Voltage Distance Ranger for Smart Contact Lenses.

OBJECTIVE: In this paper, we present a novel, low-profile, scleral-coil based, distance ranging system which is suitable for smart, accommodating contact lenses. METHODS: We measure the induced emf between a set of four thin semi-circular coils patterned on flexible Kapton substrates that conform to the eyes' sclera. This induced emf is a function of eye gaze angles. The system then determines the distance from the eyes to the desired object via the triangulation of these eye gaze angles Results: Experiments on eyeball simulated tissue gels indicate an accurate prediction of object distance in the 0.1-15 D range with a 0.15 D RMS error and object direction in the -15 to 15-degree arc with 0.4-degree RMS error, respectively. The energy required was determined to be as low as 20 µJ per range reading. CONCLUSION: Experimental data shows that our proposed new method of eye-tracking and distance ranging system can accurately predict eye-gaze angles and object-distance, whilst using only 20 µJ per range reading. SIGNIFICANCE: The high-accuracy, low-profile and reduced energy requirements of the proposed eye-tracking technique, make it suitable for applications in the vast field of adaptive optics such as smart contact lenses and other low-power vision corrective applications.

Isomer separation enabled by a micro circulatory gas chromatography system.

Isomers, holding similar chemical and physical properties, are difficult to separate especially by utilizing a microfabricated gas chromatography system due to limited column lengths mainly imposed by low-pressure (<20 kPa) micropump capability. In this paper, we demonstrated the separation of a pair of structural isomers, isopentane and pentane, in a micro-scale gas chromatography system with a circulatory loop of two 25-cm micro open tubular columns, while operating under a minimal pressure requirement of <10 kPa. The developed micro circulatory gas chromatography (MCGC) system achieved an effective column length of 12.5 meters by circulating the isomer gases for 25 cycles, the longest micro open tubular column length ever reported by any microfabricated GC systems yet.

In-air EIS sensor for in situ and real-time monitoring of in vitro epithelial cells under air-exposure.

This paper reports in-air monitoring of in vitro monolayer cells under air-exposure utilizing electrochemical impedance spectroscopy (EIS). In-air impedance measurement was performed by placing integrated electrodes laterally, instead of vertically, to a cell membrane, avoiding electrical disconnection, unlike conventional transepithelial-electrical-resistance (TEER). The in-air EIS sensor platform mainly consisted of two chambers, separated by a porous membrane where cells were cultured, that enabled cell exposure to both air (apical side) and liquid (basal side) for long-term measurement. On top of the membrane, EIS interdigitated electrodes were patterned and lung epithelial cells (A549 type II) were cultured with air exposure on one side. The fabricated in-air EIS sensor successfully demonstrated in situ real-time measurement of cell populations in confluency in the range of 7.8 × 104 and 9.6 × 105 cells per cm2 at a sensitivity of 3.0 × 10-2 Ω per cell in impedance and in the range of 1.0 × 104 and 9.6 × 105 cells per cm2 at a sensitivity of 0.17 × 10-15 F per cell in capacitance under AC frequencies of 100 kHz and 1 MHz, respectively. It also successfully monitored transient modulation of tight-junctions that collectively began to open in 30 minutes after the injection of 100 ng ml-1 TNF-α (a relaxation agent), reached maximum relaxation with a 12.6% increase in impedance value and a 12% decrease in capacitance in 60 minutes, and recovered back to its original junction status after 720 minutes, which confirmed the observation in animal models in the literature. Note that the opposite trends in impedance and capacitance allowed the in-air EIS sensor to distinguish cell population changes from tight junction modulation. It was concluded that the developed in-air EIS sensor in an in vitro platform can enable in situ and real-time monitoring of the population of the 'air-exposed' cells as well as the modulation of tight-junctions, which has not been demonstrated yet.

Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor.

We present the design, fabrication, and response of a polymer-based Laterally Amplified Chemo-Mechanical (LACM) humidity sensor based on mechanical leveraging and parametric amplification. The device consists of a sense cantilever asymmetrically patterned with a polymer and flanked by two stationary electrodes on the sides. When exposed to a humidity change, the polymer swells after absorbing the analyte and causes the central cantilever to bend laterally towards one side, causing a change in the measured capacitance. The device features an intrinsic gain due to parametric amplification resulting in an enhanced signal-to-noise ratio (SNR). Eleven-fold magnification in sensor response was observed via voltage biasing of the side electrodes without the use of conventional electronic amplifiers. The sensor showed a repeatable and recoverable capacitance change of 11% when exposed to a change in relative humidity from 25-85%. The dynamic characterization of the device also revealed a response time of ~1 s and demonstrated a competitive response with respect to a commercially available reference chip.

Batch-Fabricated α-Si Assisted Nanogap Tunneling Junctions.

This paper details the design, fabrication, and characterization of highly uniform batch-fabricated sidewall etched vertical nanogap tunneling junctions for bio-sensing applications. The device consists of two vertically stacked gold electrodes separated by a partially etched sacrificial spacer layer of sputtered α-Si and Atomic Layer Deposited (ALD) SiO2. A ~10 nm wide air-gap is formed along the sidewall by a controlled dry etch of the spacer. The thickness of the spacer layer can be tuned by adjusting the number of ALD cycles. The rigorous statistical characterization of the ultra-thin spacer films has also been performed. We fabricated nanogap electrodes under two design layouts with different overlap areas and spacer gaps, from ~4.0 nm to ~9.0 nm. Optical measurements reported an average non-uniformity of 0.46 nm (~8%) and 0.56 nm (~30%) in SiO2 and α-Si film thickness respectively. Direct tunneling and Fowler-Nordheim tunneling measurements were done and the barrier potential of the spacer stack was determined to be ~3.5 eV. I-V measurements showed a maximum resistance of 46 × 103 GΩ and the average dielectric breakdown field of the spacer stack was experimentally determined to be ~11 MV/cm.

A Low-Profile Digital Eye-Tracking Oculometer for Smart Eyeglasses.

Wearable eye tracking devices have broad uses in medicine, psychology, augmented & virtual reality and consumer market research. Most mobile eye trackers available today utilize infrared imaging of the pupil and corneal reflections with video cameras. This tracking method requires sophisticated real-time processing of video signals consuming substantial electrical power. This method is thus unsuitable for light weight wearables such as adaptive smart eyeglasses for correction of presbyopia. In this paper we present a low-profile, low-power (7.7 mJ/sample) digital eye tracker oculometer based on infrared sclera tracking. The system is implemented using eight, 24-bit infrared proximity sensors and synchronous infrared LEDs. The pupil location is determined from 32 reflected pulsed light measurements independent of ambient illumination. The digital oculometer is 3.1 mm thick and weighs ~3 g. The tracker mounts adjacent to the tunable lenses in the smart eyeglasses frame. The eye tracker showed a pointing error of 1.3 degrees rms over a vertical and horizontal range of 30 degrees when tested by an observer.

Tunable-focus lens for adaptive eyeglasses.

We demonstrate the implementation of a compact tunable-focus liquid lens suitable for adaptive eyeglass application. The lens has an aperture diameter of 32 mm, optical power range of 5.6 diopter, and electrical power consumption less than 20 mW. The lens inclusive of its piezoelectric actuation mechanism is 8.4 mm thick and weighs 14.4 gm. The measured lens RMS wavefront aberration error was between 0.73 µm and 0.956 µm.

Large aperture tunable-focus liquid lens using shape memory alloy spring.

A tunable-focus large aperture liquid lens is constructed using shape memory alloy (SMA) springs as actuators. The lens mainly consists of a shallow liquid-filled cylindrical cavity bound by a thin compressible annular rim and encapsulated by a flexible circular membrane on the top of the rim and a rigid circular plate at the rim bottom. The lens optical power is adjusted by a controlled compression of the annular rim via actuation of the three shape-memory alloy (SMA) springs. Since the volume of the cavity liquid is constant, the rim compression bulges the flexible membrane outward thus reducing its radius of curvature and the lens focal length. The fabricated tunable lens demonstrated an optical power range of 0-4 diopters utilizing a driving voltage less than 3V. Lens optical wavefront profiling was done using a Shack-Hartmann sensor displaying a RMS wave front error of 0.77 µm and 1.68 µm at 0 D and + 4 D. The aperture diameter and thickness of the fabricated lens are 34 mm and 9 mm, respectively, while weighing 16.7 g.

A miniature closed-loop gas chromatography system.

This paper reports the characterization of a miniaturized circulatory column system that is capable of magnifying the effective column length by forming a circulatory loop with chip-scale columns, thus ultimately achieving high-efficiency target separation. The circulatory column system is composed of a tandem of 25 cm microcolumns and six valves for fluidic flow control in order to enable chromatographic separation in circulatory motions while requiring only 5.5 kPa of pressure, which current micropumps are currently capable of supplying. The developed column system (1) successfully demonstrated 16 times elongation of a virtual column length up to 800 cm by only utilizing two 25 cm microcolumns, which is the longest column length reported by any MEMS-scale functioning GC column, (2) achieved a high theoretical plate number of 68,696 with pentane circulating after 15.5 circulatory cycles, which corresponds to the plate number per length-pressure of 1611 plate m(-1) kPa(-1), the highest record reported yet, and (3) demonstrated successful separation of target molecules during circulation by utilizing a pentane/hexane mixture, resulting in magnification of the two corresponding peaks via circulation.

A bubble-based microfluidic gas sensor for gas chromatographs.

We report a new proof-of-concept bubble-based gas sensor for a gas chromatography system, which utilizes the unique relationship between the diameters of the produced bubbles with the gas types and mixture ratios as a sensing element. The bubble-based gas sensor consists of gas and liquid channels as well as a nozzle to produce gas bubbles through a micro-structure. It utilizes custom-developed software and an optical camera to statistically analyze the diameters of the produced bubbles in flow. The fabricated gas sensor showed that five types of gases (CO2, He, H2, N2, and CH4) produced (1) unique volumes of 0.44, 0.74, 1.03, 1.28, and 1.42 nL (0%, 68%, 134%, 191%, and 223% higher than that of CO2) and (2) characteristic linear expansion coefficients (slope) of 1.38, 2.93, 3.45, 5.06, and 5.44 nL/(kPa (µL s(-1))(-1)). The gas sensor also demonstrated that (3) different gas mixture ratios of CO2 : N2 (100 : 0, 80 : 20, 50 : 50, 20 : 80 and 0 : 100) generated characteristic bubble diameters of 48.95, 77.99, 71.00, 78.53 and 99.50 µm, resulting in a linear coefficient of 10.26 µm (µL s(-1))(-1). It (4) successfully identified an injection (0.01 µL) of pentane (C5) into a continuous carrier gas stream of helium (He) by monitoring bubble diameters and creating a chromatogram and demonstrated (5) the output stability within only 5.60% variation in 67 tests over a month.

Characterization of a microfluidic in vitro model of the blood-brain barrier (µBBB).

The blood-brain barrier (BBB), a unique selective barrier for the central nervous system (CNS), hinders the passage of most compounds to the CNS, complicating drug development. Innovative in vitro models of the BBB can provide useful insights into its role in CNS disease progression and drug delivery. Static transwell models lack fluidic shear stress, while the conventional dynamic in vitro BBB lacks a thin dual cell layer interface. To address both limitations, we developed a microfluidic blood-brain barrier (µBBB) which closely mimics the in vivo BBB with a dynamic environment and a comparatively thin culture membrane (10 µm). To test validity of the fabricated BBB model, µBBBs were cultured with b.End3 endothelial cells, both with and without co-cultured C8-D1A astrocytes, and their key properties were tested with optical imaging, trans-endothelial electrical resistance (TEER), and permeability assays. The resultant imaging of ZO-1 revealed clearly expressed tight junctions in b.End3 cells, Live/Dead assays indicated high cell viability, and astrocytic morphology of C8-D1A cells were confirmed by ESEM and GFAP immunostains. By day 3 of endothelial culture, TEER levels typically exceeded 250 Ω cm(2) in µBBB co-cultures, and 25 Ω cm(2) for transwell co-cultures. Instantaneous transient drop in TEER in response to histamine exposure was observed in real-time, followed by recovery, implying stability of the fabricated µBBB model. Resultant permeability coefficients were comparable to previous BBB models, and were significantly increased at higher pH (>10). These results demonstrate that the developed µBBB system is a valid model for some studies of BBB function and drug delivery.