Integrated Amplitude and Phase Monitor for Micro-Actuators.

Micro-actuators driven on resonance maximize reach and speed; however, due to their sensitivity to environmental factors (e.g., temperature and air pressure), the amplitude and phase response must be monitored to achieve an accurate actuator position. We introduce an MEMS (microelectromechanical system) amplitude and phase monitor (MAPM) with a signal-to-noise ratio of 51 dB and 11.0 kHz bandwidth, capable of simultaneously driving and sensing the movement of 1D and 2D electrostatically driven micro-actuators without modifying the chip or its packaging. The operational principle is to electromechanically modulate the amplitude of a high-frequency signal with the changing capacitance of the micro-actuator. MAPM operation is characterized and verified by simultaneously measuring the amplitude and phase frequency response of commercial micromirrors. We demonstrate that the MAPM circuitry is insensitive to complex relationships between capacitance and position of the MEMS actuators, and it is capable of giving real-time read-out of the micromirror motion. Our measurements also reveal and quantify observations of phase drift and crosstalk in 2D resonant operation. Measurements of phase changes over time under normal operation also verify the need for phase monitoring. The open-loop, high-sensitivity position sensor enables detailed characterization of dynamic micro-actuator behavior, leading to new insights and new types of operation, including improved control of nonlinear motion.

Pneumatic stimulation of C. elegans mechanoreceptor neurons in a microfluidic trap.

New tools for applying force to animals, tissues, and cells are critically needed in order to advance the field of mechanobiology, as few existing tools enable simultaneous imaging of tissue and cell deformation as well as cellular activity in live animals. Here, we introduce a novel microfluidic device that enables high-resolution optical imaging of cellular deformations and activity while applying precise mechanical stimuli to the surface of the worm's cuticle with a pneumatic pressure reservoir. To evaluate device performance, we compared analytical and numerical simulations conducted during the design process to empirical measurements made with fabricated devices. Leveraging the well-characterized touch receptor neurons (TRNs) with an optogenetic calcium indicator as a model mechanoreceptor neuron, we established that individual neurons can be stimulated and that the device can effectively deliver steps as well as more complex stimulus patterns. This microfluidic device is therefore a valuable platform for investigating the mechanobiology of living animals and their mechanosensitive neurons.

A microarray MEMS device for biolistic delivery of vaccine and drug powders.

We report a biolistic technology platform for physical delivery of particle formulations of drugs or vaccines using parallel arrays of microchannels, which generate highly collimated jets of particles with high spatial resolution. Our approach allows for effective delivery of therapeutics sequentially or concurrently (in mixture) at a specified target location or treatment area. We show this new platform enables the delivery of a broad range of particles with various densities and sizes into both in vitro and ex vivo skin models. Penetration depths of ∼1 mm have been achieved following a single ejection of 200 µg high-density gold particles, as well as 13.6 µg low-density polystyrene-based particles into gelatin-based skin simulants at 70 psi inlet gas pressure. Ejection of multiple shots at one treatment site enabled deeper penetration of ∼3 mm in vitro, and delivery of a higher dose of 1 mg gold particles at similar inlet gas pressure. We demonstrate that particle penetration depths can be optimized in vitro by adjusting the inlet pressure of the carrier gas, and dosing is controlled by drug reservoirs that hold precise quantities of the payload, which can be ejected continuously or in pulses. Future investigations include comparison between continuous versus pulsatile payload deliveries. We have successfully delivered plasmid DNA (pDNA)-coated gold particles (1.15 µm diameter) into ex vivo murine and porcine skin at low inlet pressures of ∼30 psi. Integrity analysis of these pDNA-coated gold particles confirmed the preservation of full-length pDNA after each particle preparation and jetting procedures. This technology platform provides distinct capabilities to effectively deliver a broad range of particle formulations into skin with specially designed high-speed microarray ejector nozzles.