ABSTRACT
We report on a spiral structure suitable for obtaining a large optical response. We constructed a structural mechanics model of the shape of the planar spiral structure when deformed and verified the effectiveness of the model. As a verification structure, we fabricated a large-scale spiral structure that operates in the GHz band by laser processing. Based on the GHz radio wave experiments, a more uniform deformation structure exhibited a higher cross-polarization component. This result suggests that uniform deformation structures can improve circular dichroism. Since large-scale devices enable speedy prototype verification, the obtained knowledge can be exported to miniaturized-scale devices, such as MEMS terahertz metamaterials.
ABSTRACT
In this study, we propose a microelectromechanical system (MEMS) force sensor for microflow measurements. The sensor is equipped with a flow sensing piezoresistive cantilever and a dummy piezoresistive cantilever, which acts as a temperature reference. Since the dummy cantilever is also in the form of a thin cantilever, the temperature environment of the dummy sensor is almost identical to that of the sensing cantilever. The temperature compensation effect was measured, and the piezoresistive cantilever was combined with a gasket jig to enable the direct implementation of the piezoresistive cantilever in a flow tube. The sensor device stably measured flow rates from 20 µL/s to 400 µL/s in a silicon tube with a 2-mm inner diameter without being disturbed by temperature fluctuations.
