ABSTRACT
Porous zinc oxide (ZnO) thin films were synthesized via the calcination of molecular layer-deposited (MLD) "zincone" layers. The effect of the MLD process temperature (110 °C, 125 °C) and of the calcination temperature (340 °C, 400 °C, 500 °C) on the chemical, morphological, and crystallographic properties of the resulting ZnO was thoroughly investigated. Spectroscopic ellipsometry reveals that the thickness of the calcinated layers depends on the MLD temperature, resulting in 38-43% and 52-56% of remaining thickness for the 110 °C and 125 °C samples, respectively. Ellipsometric porosimetry shows that the open porosity of the ZnO thin films depends on the calcination temperature as well as on the MLD process temperature. The maximum open porosity of ZnO derived from zincone deposited at 110 °C ranges from 14.5% to 24%, rising with increasing calcination temperature. Compared with the 110 °C samples, the ZnO obtained from 125 °C zincone yields a higher porosity for low calcination temperatures, namely 18% for calcination at 340 °C; and up to 24% for calcination at 500 °C. Additionally, the porous ZnO thin films were subjected to piezoelectric measurements. The piezoelectric coefficient, d33, was determined to be 2.8 pC/N, demonstrating the potential of the porous ZnO as an, e.g., piezoelectric sensor or energy harvester.
ABSTRACT
In this study, liquid droplets of 1-allyl-3-methylimidazolium dicyanamide have been processed by initiated chemical vapor deposition (iCVD) with a cross-linked polymer film consisting of (hydroxyethyl)methacrylate and ethylene glycol dimethacrylate to develop free-standing, ion-conductive membranes. We found that the obtained films are solids and have a conductivity of up to 18 ± 6 mS/cm, associated with the negatively charged counterion, indicating no loss of conductivity, compared to the ionic liquid in the liquid state. The membranes were conductive within a large process window and in air, thanks to the fact that the iCVD process does not affect the mobility of the anion in the ionic liquid. Furthermore, we demonstrate that varying the deposition conditions can influence the homogeneity and conductivity of the resulting membranes. The promising results of this study represent an important stepping stone on the way to novel ion-conductive membranes.
