ABSTRACT
This study presents an approach for fabricating Wolter type-I mirrors for x-ray telescopes using a nickel electroforming replication process with quartz glass mandrels. The proposed method addresses the challenges encountered in conventional fabrication techniques, which involve using electroless nickel-coated aluminum mandrels that are susceptible to corrosion and thermal deformation. Quartz glass mandrels offer excellent chemical, thermal, and mechanical stability, enabling the efficient production of high-performance mirrors. Wolter type-I mirrors for telescopes possess a large aperture that collects x-ray photons from the universe. However, previous nickel electroforming replication processes using quartz glass mandrels have challenges in fabricating large mirrors, particularly due to bubble pit formation during nickel shell development. In this study, we introduced an efficient pitting inhibition technique via vacuum degassing. This technique facilitates the precise replication of pit-free Wolter type-I mirrors for telescopes using quartz glass mandrels. We demonstrated the fabrication process on a Wolter type-I mirror proposed for FOXSI-4 [(FOXSI) Focusing Optics X-ray Solar Imager], resulting in three mirrors obtained from the same mandrel without repolishing or repairing. The figure error of the mirror was within 1 µm over most areas in both longitudinal and circumferential directions. The ray-tracing simulation indicated that the performance of the mirror was â¼12 arcsec in half-power diameter, comparable to the performance achieved by previous high-resolution x-ray missions.
ABSTRACT
In this study, figure correction of a master mandrel of a Wolter mirror by organic abrasive machining (OAM) was demonstrated. In OAM, a flow of slurry, dispersed with organic particles, locally removes the surface of a workpiece in contact with a rotating machining tool. A computer-controlled machining system was used to perform the selective removal of a fused silica surface at a spatial resolution of 200 µm. A master mandrel of a Wolter mirror for soft x-ray microscopes was fabricated with a figure accuracy of <1 nm root mean square, which is sufficient for diffraction-limited imaging at a wavelength of 10 nm.
ABSTRACT
A soft X-ray ptychography system using a Wolter mirror for the illumination optics has been developed. By taking advantage of the achromaticity of the optics, the system is capable of seamlessly imaging at half-period resolution of 50 nm with a broad photon-energy range from 250 eV to 2 keV while maintaining the focal position. Imaging a mammalian cell at various wavelengths was demonstrated, and high-resolution visualization of organelle was achieved. Stereo imaging was also performed with a long working distance of 20 mm. In combination with in-situ/operando and tomographic measurements, this system will be a powerful tool for observing biological and material targets with complex features.
Subject(s)
Lighting , Optics and Photonics , Animals , Equipment Design , Mammals , Radiography , X-RaysABSTRACT
The monolithic Wolter mirror is an ideal optical device for focusing soft x rays to a submicron-sized spot, with the advantages of high efficiency, large acceptance, achromaticity, and robustness to alignment error. The fabrication process for this type of mirror has not been established because of the difficulty in highly accurate figure measurement of free-form surfaces with small radii of curvature and steep profiles. In this study, we employed tactile scanning measurement for surface characterization to fabricate a high-precision Wolter mirror. First, it was demonstrated that the touch probe measurement did not leave scratches on the raw surface of the mirror substrate. Next, the measurement capability of the surface profiler was assessed, and the data analysis conditions were determined. Finally, the Wolter mirror was fabricated through repeated figure correction based on the tactile measurement, and the figure error of the final surface was evaluated. Wave-optical simulations that used this error as reference suggested that the size of the beam focused by the mirror was equivalent to the theoretical value at 1000 eV. The reflected image with uniform intensity distribution obtained at SPring-8 also revealed the effectiveness of the present fabrication approach based on tactile measurement.
ABSTRACT
We developed a copper electroforming replication (CER) process to fabricate precise ellipsoidal mirrors for soft x-ray focusing. Some applications of ellipsoidal mirrors in x-ray microscopy require that all components that are close to samples, including the mirrors, are made of non-magnetic materials. In this study, a non-magnetic copper ellipsoidal mirror was fabricated by replicating a figured and super-polished quartz glass mandrel using an electroforming technique. It was found that the CER process has a high replication accuracy of 8 nm. The focusing performance of the mirror was characterized using a soft x-ray free-electron laser with a photon energy of 100 eV. A small focus size of 370 × 400 nm2 was achieved with a high reflectivity of 65%.
ABSTRACT
We developed a full-field microscope with twin Wolter mirrors for soft X-ray free-electron lasers. The Wolter mirrors for a condenser and an objective were fabricated using an electroforming process with a precisely figured master mandrel. In the imaging system constructed at SACLA BL1, sub-micrometer spatial resolution was achieved at wavelengths of 10.3 and 3.4â nm. Single-shot bright-field images were acquired with a maximum illumination intensity of 7×1014 W/cm2.
ABSTRACT
Intense sub-micrometre focusing of a soft X-ray free-electron laser (FEL) was achieved by using an ellipsoidal mirror with a high numerical aperture. A hybrid focusing system in combination with a Kirkpatrick-Baez mirror was applied for compensation of a small spatial acceptance of the ellipsoidal mirror. With this system, the soft X-ray FEL pulses were focused down to 480â nm × 680â nm with an extremely high intensity of 8.8×1016â Wâ cm-2 at a photon energy of 120â eV, which yielded saturable absorption at the L-edge of Si (99.8â eV) with a drastic increase of transmittance from 8% to 48%.
Subject(s)
Lasers , Optics and Photonics/instrumentation , Calibration , Electrons , Equipment DesignABSTRACT
An x-ray ellipsoidal mirror is an ideal tool for focusing soft x-rays. Because nanometer-level shape accuracy is required in the internal surface of a mirror having a small diameter, it is difficult to fabricate the mirror by processing the surface directly. We developed a fabrication process for soft x-ray ellipsoidal mirrors in which the surface of a high-precision quartz mandrel with the inverted shape of the designed mirror is replicated by nickel sulfamate electroforming. In this study, an ellipsoidal mirror of 40-mm length was fabricated and the shape accuracy of the replicated surface was evaluated by a measurement method using a contact probe. The root mean square (RMS) of the replication error in the entire measured surface was 27.2 nm. When the evaluated area was half the replicated surface near the middle of the mirror, the RMS of the replication error was 14.7 nm. Wave-optical simulation suggested that it is possible to focus soft x-rays to a spot with a diameter of 400 nm.
ABSTRACT
In X-ray focusing, grazing incidence mirrors offer advantages of no chromatic aberration and high focusing efficiency. Although nanofocusing mirrors have been developed for the hard X-ray region, there is no mirror with nanofocusing performance in the soft X-ray region. Designing a system with the ability to focus to a beam size smaller than 100 nm at an X-ray energy of less than 1 keV requires a numerical aperture larger than 0.01. This leads to difficulties in the fabrication of a soft X-ray focusing mirror with high accuracy. Ellipsoidal mirrors enable soft X-ray focusing with a high numerical aperture. In this study, we report a production process for ellipsoidal mirrors involving mandrel fabrication and replication processes. The fabricated ellipsoidal mirror was assessed under partial illumination conditions at the soft X-ray beamline (BL25SU) of SPring-8. A focal spot size of less than 250 nm was confirmed at 300 eV. The focusing tests indicated that the proposed fabrication process is promising for X-ray mirrors that have the form of a solid of revolution, including Wolter mirrors.
