Amorphous metal oxide semiconductor thin film, analog memristor, and autonomous local learning for neuromorphic systems.

Artificial intelligence is a promising concept in modern and future societies. Presently, software programs are used but with a bulky computer size and large power consumption. Conversely, hardware systems named neuromorphic systems are suggested, with a compact computer size and low power consumption. An important factor is the number of processing elements that can be integrated. In the present study, three decisive technologies are proposed: (1) amorphous metal oxide semiconductor thin films, one of which, Ga-Sn-O (GTO) thin film, is used. GTO thin film does not contain rare metals and can be deposited by a simple process at room temperature. Here, oxygen-poor and oxygen-rich layers are stacked. GTO memristors are formed at cross points in a crossbar array; (2) analog memristor, in which, continuous and infinite information can be memorized in a single device. Here, the electrical conductance gradually changes when a voltage is applied to the GTO memristor. This is the effect of the drift and diffusion of the oxygen vacancies (Vo); and (3) autonomous local learning, i.e., extra control circuits are not required since a single device autonomously modifies its own electrical characteristic. Finally, a neuromorphic system is assembled using the abovementioned three technologies. The function of the letter recognition is confirmed, which can be regarded as an associative memory, a typical artificial intelligence application.

Memristive Characteristic of an Amorphous Ga-Sn-O Thin-Film Device with Double Layers of Different Oxygen Density.

We have found a memristive characteristic of an amorphous Ga-Sn-O (α-GTO) thin-film device with double layers of different oxygen density. The double layers are deposited using radio frequency (RF) magnetron sputtering, whose gas for the lower layer contains less oxygen, whereas that for the upper layer contains more oxygen, and it is assumed that the former contains more oxygen vacancies, whereas the latter contains fewer vacancies. The characteristic is explained by drift of oxygen and is stable without forming operation because additional structures such as filament are unnecessary. The fabrication is easy because the double layers are successively deposited simply by changing the oxygen ratio in the chamber.