Production of electron cyclotron resonance plasma by using multifrequencies microwaves and active beam profile control on a large bore electron cyclotron resonance ion source with permanent magnets.

A new concept on magnetic field with all magnets on plasma production and confinement has been proposed to enhance efficiency of an electron cyclotron resonance (ECR) plasma for broad and dense ion beam source under the low pressure. The magnetic field configuration is constructed by a pair of magnets assembly, i.e., comb-shaped magnet which cylindrically surrounds the plasma chamber. The resonance zones corresponding to the fundamental ECR for 2.45 GHz and 11-13 GHz frequencies are constructed at different positions. The profiles of the plasma parameters in the ECR ion source are different from each frequency of microwave. Large bore extractor is set at the opposite side against the microwave feeds. It is found that differences of their profiles also appear at those of ion beam profiles. We conducted to launch simultaneously multiplex frequencies microwaves controlled individually, and tried to control the profiles of the plasma parameters and then those of extracted ion beam.

Induction heating pure vapor source of high temperature melting point materials on electron cyclotron resonance ion source.

Multicharged ions that are needed are produced from solid pure material with high melting point in an electron cyclotron resonance ion source. We develop an evaporator by using induction heating (IH) with multilayer induction coil, which is made from bare molybdenum or tungsten wire without water cooling and surrounding the pure vaporized material. We optimize the shapes of induction coil and vaporized materials and operation of rf power supply. We conduct experiment to investigate the reproducibility and stability in the operation and heating efficiency. IH evaporator produces pure material vapor because materials directly heated by eddy currents have no contact with insulated materials, which are usually impurity gas sources. The power and the frequency of the induction currents range from 100 to 900 W and from 48 to 23 kHz, respectively. The working pressure is about 10(-4)-10(-3) Pa. We measure the temperature of the vaporized materials with different shapes, and compare them with the result of modeling. We estimate the efficiency of the IH vapor source. We are aiming at the evaporator's higher melting point material than that of iron.