Flow-Independent Thermal Conductivity and Volumetric Heat Capacity Measurement of Pure Gases and Binary Gas Mixtures Using a Single Heated Wire.

Among the different techniques for monitoring the flow rate of various fluids, thermal flow sensors stand out for their straightforward measurement technique. However, the main drawback of these types of sensors is their dependency on the thermal properties of the medium, i.e., thermal conductivity (k), and volumetric heat capacity (ρcp). They require calibration whenever the fluid in the system changes. In this paper, we present a single hot wire suspended above a V-groove cavity that is used to measure k and ρcp through DC and AC excitation for both pure gases and binary gas mixtures, respectively. The unique characteristic of the proposed sensor is its independence of the flow velocity, which makes it possible to detect the medium properties while the fluid flows over the sensor chip. The measured error due to fluctuations in flow velocity is less than ±0.5% for all test gases except for He, where it is ±6% due to the limitations of the measurement setup. The working principle and measurement results are discussed.

Compact Micro-Coriolis Mass-Flow Meter with Optical Readout.

This paper presents the first nickel-plated micro-Coriolis mass-flow sensor with integrated optical readout. The sensor consists of a freely suspended tube made of electroplated nickel with a total length of 60 mm, an inner diameter of 580 µm, and a wall thickness of approximately 8 µm. The U-shaped tube is actuated by Lorentz forces. An optical readout consisting of two LEDs and two phototransistors is used to detect the tube motion. Mass-flow measurements were performed at room temperature with water and isopropyl alcohol for flows up to 200 g/h and 100 g/h, respectively. The measured resonance frequencies were 1.67 kHz and 738 Hz for water and 1.70 kHz and 752 Hz for isopropyl alcohol for the twist and swing modes, respectively. The measured phase shift between the two readout signals shows a linear response to mass flow with very similar sensitivities for water and isopropyl alcohol of 0.41mdegg/h and 0.43 mdegg/h, respectively.

Thermal Flow Meter with Integrated Thermal Conductivity Sensor.

This paper presents a novel gas-independent thermal flow sensor chip featuring three calorimetric flow sensors for measuring flow profile and direction within a tube, along with a single-wire flow independent thermal conductivity sensor capable of identifying the gas type through a simple DC voltage measurement. All wires have the same dimensions of 2000 µm in length, 5 µm in width, and 1.2 µm in thickness. The design theory and COMSOL simulation are discussed and compared with the measurement results. The sensor's efficacy is demonstrated with different gases, He, N2, Ar, and CO2, for thermal conductivity and thermal flow measurements. The sensor can accurately measure the thermal conductivity of various gases, including air, enabling correction of flow rate measurements based on the fluid type. The measured voltage from the thermal conductivity sensor for air corresponds to a calculated thermal conductivity of 0.02522 [W/m·K], with an error within 2.9%.

Modeling, Fabrication, and Testing of a 3D-Printed Coriolis Mass Flow Sensor.

This paper presents the modeling, fabrication, and testing of a 3D-printed Coriolis mass flow sensor. The sensor contains a free-standing tube with a circular cross-section printed using the LCD 3D-printing technique. The tube has a total length of 42 mm, an inner diameter of about 900 µm, and a wall thickness of approximately 230 µm. The outer surface of the tube is metalized using a Cu plating process, resulting in a low electrical resistance of 0.5 Ω. The tube is brought into vibration using an AC current in combination with a magnetic field from a permanent magnet. The displacement of the tube is detected using a laser Doppler vibrometer (LDV) that is part of a Polytec MSA-600 microsystem analyzer. The Coriolis mass flow sensor has been tested over a flow range of 0-150 g/h for water, 0-38 g/h for isopropyl alcohol (IPA), and 0-50 g/h for nitrogen. The maximum flow rates of water and IPA resulted in less than a 30 mbar pressure drop. The pressure drop at the maximum flow rate of nitrogen is 250 mbar.

In-line measurements of the physical and thermodynamic properties of single and multicomponent liquids.

Microfluidic devices are becoming increasingly important in various fields of pharmacy, flow chemistry and healthcare. In the embedded microchannel, the flow rates, the dynamic viscosity of the transported liquids and the fluid dynamic properties play an important role. Various functional auxiliary components of microfluidic devices such as flow restrictors, valves and flow meters need to be characterised with liquids used in several microfluidic applications. However, calibration with water does not always reflect the behaviour of the liquids used in the different applications. Therefore, several National Metrology Institutes (NMI) have developed micro-pipe viscometers for traceable inline measurement of the dynamic viscosity of liquids used in flow applications as part of the EMPIR 18HLT08 MeDDII project. These micro-pipe viscometers allow the calibration of any flow device at different flow rates and the calibration of the dynamic viscosity of the liquid or liquid mixture used under actual flow conditions. The validation of the micro-pipe viscometers has been performed either with traceable reference oils or with different liquids typically administered in hospitals, such as saline and/or glucose solutions or even glycerol-water mixtures for higher dynamic viscosities. Furthermore, measurement results of a commercially available device and a technology demonstrator for the inline measurement of dynamic viscosity and density are presented in this paper.

Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD.

In micro-machined micro-electromechanical systems (MEMS), refilled high-aspect-ratio trench structures are used for different applications. However, these trenches often show keyholes, which have an impact on the performance of the devices. In this paper, explanations are given on keyhole formation, and a method is presented for etching positively-tapered high-aspect ratio trenches with an optimised trench entrance to prevent keyhole formation. The trench etch is performed by a two-step Bosch-based process, in which the cycle time, platen power, and process pressure during the etch step of the Bosch cycle are studied to adjust the dimensions of the scallops and their location in the trench sidewall, which control the taper of the trench sidewall. It is demonstrated that the amount of chemical flux, being adjusted by the cycle time of the etch step in the Bosch cycle, relates the scallop height to the sidewall profile angle. The required positive tapering of 88° to 89° for a keyhole-free structure after a trench refill by low-pressure chemical vapour deposition is achieved by lowering the time of the etch step.

Toward a modular, integrated, miniaturized, and portable microfluidic flow control architecture for organs-on-chips applications.

Microfluidic organs-on-chips (OoCs) technology has emerged as the trend for in vitro functional modeling of organs in recent years. Simplifying the complexities of the human organs under controlled perfusion of required fluids paves the way for accurate prediction of human organ functionalities and their response to interventions like exposure to drugs. However, in the state-of-the-art OoC, the existing methods to control fluids use external bulky peripheral components and systems much larger than the chips used in experiments. A new generation of compact microfluidic flow control systems is needed to overcome this challenge. This study first presents a structured classification of OoC devices according to their types and microfluidic complexities. Next, we suggest three fundamental fluid flow control mechanisms and define component configurations for different levels of OoC complexity for each respective mechanism. Finally, we propose an architecture integrating modular microfluidic flow control components and OoC devices on a single platform. We emphasize the need for miniaturization of flow control components to achieve portability, minimize sample usage, minimize dead volume, improve the flowing time of fluids to the OoC cell chamber, and enable long-duration experiments.

Air Damping Analysis of a Micro-Coriolis Mass Flow Sensor.

A micro-Coriolis mass flow sensor is a resonating device that measures small mass flows of fluid. A large vibration amplitude is desired as the Coriolis forces due to mass flow and, accordingly, the signal-to-noise ratio, are directly proportional to the vibration amplitude. Therefore, it is important to maximize the quality factor Q so that a large vibration amplitude can be achieved without requiring high actuation voltages and high power consumption. This paper presents an investigation of the Q factor of different devices in different resonant modes. Q factors were measured both at atmospheric pressure and in vacuum. The measurement results are compared with theoretical predictions. In the atmospheric environment, the Q factor increases when the resonance frequency increases. When reducing the pressure from 1 bar to 0.1 bar, the Q factor almost doubles. At even lower pressures, the Q factor is inversely proportional to the pressure until intrinsic effects start to dominate, resulting in a maximum Q factor of approximately 7200.

Heavily-Doped Bulk Silicon Sidewall Electrodes Embedded between Free-Hanging Microfluidic Channels by Modified Surface Channel Technology.

Surface Channel Technology is known as the fabrication platform to make free-hanging microchannels for various microfluidic sensors and actuators. In this technology, thin film metal electrodes, such as platinum or gold, are often used for electrical sensing and actuation purposes. As a result that they are located at the top surface of the microfluidic channels, only topside sensing and actuation is possible. Moreover, in microreactor applications, high temperature degradation of thin film metal layers limits their performance as robust microheaters. In this paper, we report on an innovative idea to make microfluidic devices with integrated silicon sidewall electrodes, and we demonstrate their use as microheaters. This is achieved by modifying the original Surface Channel Technology with optimized mask designs. The modified technology allows to embed heavily-doped bulk silicon electrodes in between the sidewalls of two adjacent free-hanging microfluidic channels. The bulk silicon electrodes have the same electrical properties as the extrinsic silicon substrate. Their cross-sectional geometry and overall dimensions can be designed by optimizing the mask design, hence the resulting resistance of each silicon electrode can be customized. Furthermore, each silicon electrode can be electrically insulated from the silicon substrate. They can be designed with large cross-sectional areas and allow for high power dissipation when used as microheater. A demonstrator device is presented which reached 119 . 4 ∘ C at a power of 206 . 9 m W , limited by thermal conduction through the surrounding air. Other potential applications are sensors using the silicon sidewall electrodes as resistive or capacitive readout.

Standing balance evaluation using a triaxial accelerometer.

This paper presents a new inherently triaxial accelerometer-based system for determining the ability to maintain balance while standing. In this study, the accelerometer was placed at the back of the subject at the approximate height of the centre of mass. The data were processed to obtain five performance parameters. Paired t-tests indicated that the accelerometer measurements were able to distinguish between the different test conditions as well as or better than simultaneous AMTI force platform measurements (P < or = 0.05). The accelerometer system is fully portable, independent of inclination in space, low-cost and allows long term measurements of standing balance.