ABSTRACT
We present a new microscopy technique that we call transmission angle deviation microscopy (TADM). It is based on common-path heterodyne interferometry and geometrical optics. An ultrahigh sensitivity surface plasmon resonance (SPR) angular sensor is used to expand dynamic measurement ranges and to improve the axial resolution in three-dimensional optical microscopy. When transmitted light is incident upon a specimen, the beam converges or diverges because of refractive and/or surface height variations. Advantages include high axial resolution (approximately 32 nm), nondestructive and noncontact measurement, and larger measurement ranges (+/- 80 microm) for a numerical aperture of 0.21 in a transparent measurement medium. The technique can be used without conductivity and pretreatment.
ABSTRACT
A high-sensitivity small-angle sensor based on surface plasmon resonance technology and heterodyne interferometry is proposed that uses a new technique with two right-angle prisms. Interestingly, the technique provides a novel method for designing small-angle sensors with high sensitivity and high resolution. Its theoretical resolution can reach 1.2x10(-7) rad over the measurement range of -0.15 degrees < or =theta< or =0.15 degrees . The method has some merits, e.g., a simple optical setup, easy operation, high resolution, high sensitivity, and rapid measurement. Its feasibility is demonstrated.
ABSTRACT
A phase geographical map for determining a right-angle prism is presented. The proposed method is based on total-internal-reflection effects and chromatic dispersion. Under the total-internal-reflection condition, the phase difference between the S and P polarizations, as a function of the wavelength and refractive index, can be extracted and measured using heterodyne interferometry. Various wavelengths correspond to various refractive index values. The proposed map is convenient in ensuring the prism material using a specific V number. The method has the following merits: high stability, ease of operation, and rapid measurement.