ABSTRACT
Metalnanoparticles(NPs) can exhibit unique electronic, magnetic, optical, and catalytic properties. Highly ordered, dense arrays of non-close-packed, surface-supported metal NPs are thus of potential use in a wide range of applications. Implementing such arrays over large surfaces can, however, be both technologically challenging and prohibitively expensive using conventional top-down nanofabrication techniques. Moreover, many existing patterning methods are too harsh for sensitive substrate surfaces and their applications. To address this, we here investigate a fabrication protocol involving a water-based lift-off scheme in which the template pattern generation is rapidly and inexpensively achieved throughblock copolymer(BCP) self-assembly. A three-layer lift-off stack consisting of, from top to bottom, a poly(styrene-block-2-vinyl pyridine) template, a SiOxintermediate hardmask, and a water-soluble poly(vinyl alcohol) sacrificial layer is employed in this endeavor.Solvent-induced surface reconstruction(SISR) is used to generate an initial surface topography in the BCP template which is subsequently transferred to the layers beneath in a sequence of reactive ion etching steps. Through judicious selection of stack materials and dry etch chemistries, a layered, high-aspect-ratio, nanoporous mask is thus implemented. After metal deposition, the mask and excess material are simply removed in a lift-off step by dissolving the bottommost sacrificial layer in water. The incorporation of an intermediate hardmask and a water-soluble sacrificial layer obviates the need for harmful and/or corrosive lift-off solvents and decouples the BCP self-assembly process from the influence of substrate properties. We demonstrate the generation of well-ordered arrays of Au NPs capable of supporting sharp, localized surface plasmon resonances. We also investigate improvements to large-scale uniformity, as this is found sensitive to the SISR termination step in the original protocol. Extensions of the technique to other BCP morphologies and materials deposited ought to be straightforward.
ABSTRACT
The controlled growth of surface-supported metal nanoparticles (NPs) is essential to a broad range of applications. To this end, we explore the seeded growth of highly ordered arrays of substrate-supported Au NPs through a fully orthogonal design of experiment (DoE) scheme applied to a reaction system consisting of HAuCl4, citrate, and hydrogen peroxide. Scanning electron microscopy in combination with digital image analysis (DIA) is used to quantitatively characterize the resultant NP populations in terms of both particle and array features. The effective optical properties of the NP arrays are additionally analyzed using spectroscopic ellipsometry (SE), allowing characteristics of the localized surface plasmon resonances (LSPRs) of the arrays to be quantified. We study the dependence of the DIA- and SE-extracted features on the different reagent concentrations through modeling using multiple linear regression with backward elimination of independent variables. A process window is identified for which uniform arrays of quasi-spherical Au NPs are grown over large surface areas. Aside from reagent concentrations the system is highly sensitive to the hydrodynamic conditions during the deposition. This issue is likely caused by an Au precursor mass-transport limitation of the reduction reaction and it is found that agitation of the growth medium is best avoided to ensure a macroscopically even deposition. Parasitic homogeneous nucleation can also be a challenge and was separately studied in a full DoE scheme with equivalent growth media but without substrates, using optical tracking of the solutions over time. Conditions yielding quasi-spherical surface-supported NPs are found to also be affiliated with strong tendencies for parasitic homogeneous nucleation and thereby loss of Au precursor, but addition of polyvinyl alcohol can possibly help alleviate this issue.
ABSTRACT
While seeded growth of quasi-spherical colloidal Au nanoparticles (NPs) has been extensively explored in the literature, the growth of surface supported arrays of such particles has received less attention. The latter scenario offers some significant challenges, including the attainment of sufficient particle-substrate adhesion, growth-selectivity, and uniform mass-transport. To this end, a reaction system consisting of HAuCl4, citrate, and H2O2 is here investigated for the growth of supported arrays of 10 nm Au seeds, derived via block copolymer (BCP) lithography. The effects of the reagent concentrations on the properties of the resultant NPs are evaluated. It is found that inclusion of citrate in the growth medium causes substantial particle desorption from Si surfaces. However, the presence of citrate also yields NPs with more uniformly circular top-view cross sections ("quasi-circular"), motivating the exploration of particle immobilization methods. We demonstrate that atomic layer deposition (ALD) of a single cycle of HfO2 (â¼1 Å), after the seed particle formation, promotes adhesion sufficiently to enable the use of citrate without the added oxide noticeably affecting the shape of the resultant NPs. The presented ALD-based approach differs from the conventional sequence of depositing the adhesion layer prior to the seed particle formation and may have advantages in various processing schemes, such as when surface grafting of brush layers is required in the BCP lithography process. A proof-of-concept is provided for the growth of large-area arrays of supported "quasi-circular" Au NPs, in a rapid one-step process at room temperature.
