ABSTRACT
We propose a new, to our knowledge, method for determining the two main critical parameters of periodic one-dimensional lamellar structures, namely, linewidths and etched depths. The method is simple and requires only two measurements for the phase of the zero-transmitted order under two orthogonal polarizations. It is inspired by the analogy between subwavelength gratings and anisotropic homogeneous thin films. The method is tested with experimental data obtained with a Mach-Zehnder interferometer. Etched depths and linewidths derived from the interferograms and electromagnetic theory are compared with scanning-electron-microscope observations.
ABSTRACT
By ion irradiation through a lithographically made resist mask, the magnetic properties of cobalt-platinum simple sandwiches and multilayers were patterned without affecting their roughness and optical properties. This was demonstrated on arrays of 1-micrometer lines by near- and far-field magnetooptical microscopy. The coercive force and magnetic anisotropy of the irradiated regions can be accurately controlled by the irradiation fluence. If combined with high-resolution lithography, this technique holds promise for ultrahigh-density magnetic recording applications.
ABSTRACT
We propose the use of high-index materials for the fabrication of subwavelength diffractive components operating in the visible domain. This approach yields a reduction of fabrication constraints and an improvement of theoretical performance. A blazed grating with subwavelength binary features and with a period of 5.75 wavelengths is designed and fabricated in a TiO(2) layer coated upon a glass substrate. The first-order diffraction efficiency measured with a He-Ne laser beam is 83%, which is slightly larger than that achieved theoretically by the best standard (continuous profile) blazed grating fabricated in glass with the same period.
ABSTRACT
We introduce a new structural cutoff beyond which subwavelength gratings cease to behave as homogeneous media and discuss its effects on the proper selection of the sampling periods of subwavelength diffractive elements. According to this analysis, a 3lambda-period blazed binary grating composed of square pillars is designed for He-Ne operation and is fabricated by etching of a TiO>(2) layer deposited upon a glass substrate. Its first-order measured diffraction efficiency is 12% larger than the theoretical efficiency of an ideal blazed échelette grating in glass with the same period.
ABSTRACT
We present the design, fabrication, and characterization of a subwavelength-pulse-width spatially modulated diffractive array illuminator for an operating wavelength of 0.633 microm. Electromagnetic and scalar diffraction theories are used to reduce manufacturing difficulties while yielding high diffraction efficiency coupled with low reconstruction error. We employ direct electron beam writing and reactive ion etching to realize a transmission-type three-beam array illuminator in photoresist.
