Ultra-compact and high-performance suspended aluminum scandium nitride Lamb wave humidity sensor with a graphene oxide layer.

The utilization of Microelectromechanical Systems (MEMS) technology holds great significance for developing compact and high-performance humidity sensors in human healthcare, and the Internet of Things. However, several drawbacks of the current MEMS humidity sensors limit their applications, including their long response time, low sensitivity, relatively large sensing area, and incompatibility with a complementary metal-oxide-semiconductor (CMOS) process. To address these problems, a suspended aluminum scandium nitride (AlScN) Lamb wave humidity sensor utilizing a graphene oxide (GO) layer is firstly designed and fabricated. The theoretical and experimental results both show that the AlScN Lamb wave humidity sensor exhibits high sensing performance. The mass loading sensitivity of the sensor is one order higher than that of the normal surface acoustic wave (SAW) humidity sensor based on an aluminum nitride (AlN) film; thus the AlScN Lamb wave humidity sensor achieves high sensitivity (∼41.2 ppm per % RH) with only an 80 nm-thick GO film. In particular, the as-prepared suspended AlScN Lamb wave sensors are able to respond to the wide relative humidity (0-80% RH) change in 2 s, and the device size is ultra-compact (260 µm × 72 µm). Moreover, the sensor has an excellent linear response in the 0-80% RH range, great repeatability and long-term stability. Therefore, this work brings opportunities for the development of ultra-compact and high-performance humidity sensors.

Soft Robotic Perception System with Ultrasonic Auto-Positioning and Multimodal Sensory Intelligence.

Flexible electronics such as tactile cognitive sensors have been broadly adopted in soft robotic manipulators to enable human-skin-mimetic perception. To achieve appropriate positioning for randomly distributed objects, an integrated guiding system is inevitable. Yet the conventional guiding system based on cameras or optical sensors exhibits limited environment adaptability, high data complexity, and low cost effectiveness. Herein, a soft robotic perception system with remote object positioning and a multimodal cognition capability is developed by integrating an ultrasonic sensor with flexible triboelectric sensors. The ultrasonic sensor is able to detect the object shape and distance by reflected ultrasound. Thereby the robotic manipulator can be positioned to an appropriate position to perform object grasping, during which the ultrasonic and triboelectric sensors can capture multimodal sensory information such as object top profile, size, shape, hardness, material, etc. These multimodal data are then fused for deep-learning analytics, leading to a highly enhanced accuracy in object identification (∼100%). The proposed perception system presents a facile, low-cost, and effective methodology to integrate positioning capability with multimodal cognitive intelligence in soft robotics, significantly expanding the functionalities and adaptabilities of current soft robotic systems in industrial, commercial, and consumer applications.

Noncontact Human-Machine Interface Using Complementary Information Fusion Based on MEMS and Triboelectric Sensors.

Current noncontact human-machine interfaces (HMIs) either suffer from high power consumption, complex signal processing circuits, and algorithms, or cannot support multidimensional interaction. Here, a minimalist, low-power, and multimodal noncontact interaction interface is realized by fusing the complementary information obtained from a microelectromechanical system (MEMS) humidity sensor and a triboelectric sensor. The humidity sensor composed of a two-port aluminum nitride (AlN) bulk wave resonator operating in its length extensional mode and a layer of graphene oxide (GO) film with uniform and controllable thickness, possesses an ultra-tiny form factor (200 × 400 µm2 ), high signal strength (Q = 1729.5), and low signal noise level (±0.31%RH), and is able to continuously and steadily interact with an approaching finger. Meanwhile, the facile triboelectric sensor made of two annular aluminum electrodes enables the interaction interface to rapidly recognize the multidirectional finger movements. By leveraging the resonant frequency changes of the humidity sensor and output voltage waveforms of the triboelectric sensor, the proposed interaction interface is successfully demonstrated as a game control interface to manipulate a car in virtual reality (VR) space and a password input interface to enter high-security 3D passwords, indicating its great potential in diversified applications in the future Metaverse.

Heterogeneous Wafer Bonding Technology and Thin-Film Transfer Technology-Enabling Platform for the Next Generation Applications beyond 5G.

Wafer bonding technology is one of the most effective methods for high-quality thin-film transfer onto different substrates combined with ion implantation processes, laser irradiation, and the removal of the sacrificial layers. In this review, we systematically summarize and introduce applications of the thin films obtained by wafer bonding technology in the fields of electronics, optical devices, on-chip integrated mid-infrared sensors, and wearable sensors. The fabrication of silicon-on-insulator (SOI) wafers based on the Smart CutTM process, heterogeneous integrations of wide-bandgap semiconductors, infrared materials, and electro-optical crystals via wafer bonding technology for thin-film transfer are orderly presented. Furthermore, device design and fabrication progress based on the platforms mentioned above is highlighted in this work. They demonstrate that the transferred films can satisfy high-performance power electronics, molecular sensors, and high-speed modulators for the next generation applications beyond 5G. Moreover, flexible composite structures prepared by the wafer bonding and de-bonding methods towards wearable electronics are reported. Finally, the outlooks and conclusions about the further development of heterogeneous structures that need to be achieved by the wafer bonding technology are discussed.

One-step and large-scale fabrication of flexible and wearable humidity sensor based on laser-induced graphene for real-time tracking of plant transpiration at bio-interface.

The rapidly growing demand for humidity sensing in various applications such as noninvasive epidermal sensing, water status tracking of plants, and environmental monitoring has triggered the development of high-performance humidity sensors. In particular, timely communication with plants to understand their physiological status may facilitate preventing negative influence of environmental stress and enhancing agricultural output. In addition, precise humidity sensing at bio-interface requires the sensor to be both flexible and stable. However, challenges still exist for the realization of efficient and large-scale production of flexible humidity sensors for bio-interface applications. Here, a convenient, effective, and robust method for massive production of flexible and wearable humidity sensor is proposed, using laser direct writing technology to produce laser-induced graphene interdigital electrode (LIG-IDE). Compared to previous methods, this strategy abandons the complicated and costly procedures for traditional IDE preparation. Using graphene oxide (GO) as the humidity-sensitive material, a flexible capacitive-type GO-based humidity sensor with low hysteresis, high sensitivity (3215.25 pF/% RH), and long-term stability (variation less than ± 1%) is obtained. These superior properties enable the sensor with multifunctional applications such as noncontact humidity sensing and human breath monitoring. In addition, this flexible humidity sensor can be directly attached onto the plant leaves for real-time and long-term tracking transpiration from the stomata, without causing any damage to plants, making it a promising candidate for next-generation electronics for intelligent agriculture.

Surface acoustic wave humidity sensors based on uniform and thickness controllable graphene oxide thin films formed by surface tension.

Graphene oxide (GO) is a promising candidate for humidity sensing, and the uniformity and thickness of GO films are important for the reproducibility and test signal strength of humidity sensors. In this paper, uniform and thickness-controllable GO films are first formed by the surface tension of different concentrations of GO solution and then transferred to surface acoustic wave (SAW) humidity sensors. This GO film formation and transfer process has very good repeatability and stability, as evidenced by the humidity response of the sensors. With the help of the uniform and highly oxidized GO film, the humidity sensors show a significantly high sensitivity (absolute sensitivity of 25.3 kHz/%RH and relative sensitivity of 111.7 p.p.m./%RH) in a wide test range from 10%RH to 90%RH with very little hysteresis (<1%RH). The sensors achieve good reversibility, excellent short-term repeatability and stability. Moreover, the humidity sensors also show a fast response and recovery time of <10 s.