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1.
Rev Sci Instrum ; 94(8)2023 Aug 01.
Article in English | MEDLINE | ID: mdl-38065142

ABSTRACT

During deposition, modification, and etching of thin films and nanomaterials in reactive plasmas, many active species can interact with the sample simultaneously. This includes reactive neutrals formed by fragmentation of the feed gas, positive ions, and electrons generated by electron-impact ionization of the feed gas and fragments, excited states (in particular, long-lived metastable species), and photons produced by spontaneous de-excitation of excited atoms and molecules. Notably, some of these species can be transiently present during the different phases of plasma processing, such as etching of thin layer deposition. To monitor plasma-surface interactions during materials processing, a new system combining beams of neutral atoms, positive ions, UV photons, and a magnetron plasma source has been developed. This system is equipped with a unique ensemble of in-plasma surface characterization tools, including (1) a Rutherford Backscattering Spectrometer (RBS), (2) an Elastic Recoil Detector (ERD), and (3) a Raman spectroscopy system. RBS and ERD analyses are carried out using a differentially pumped 1.7 MV ion beam line Tandetron accelerator generating a beam at grazing incidence. The ERD system is equipped with an absorber and is specifically used to detect H initially bonded to the surface; higher resolution of surface H is also available through nuclear reaction analysis. In parallel, an optical port facing the substrate is used to perform Raman spectroscopy analysis of the samples during plasma processing. This system enables fast monitoring of a few Raman peaks over nine points scattered on a 1.6 × 1.6 mm2 surface without interference from the inherent light emitted by the plasma. Coupled to the various plasma and beam sources, the unique set of in-plasma surface characterization tools detailed in this study can provide unique time-resolved information on the modification induced by plasma. By using the ion beam analysis capability, the atomic concentrations of various elements in the near-surface (e.g., stoichiometry and impurity content) can be monitored in real-time during plasma deposition or etching. On the other hand, the evolution of Raman peaks as a function of plasma processing time can contribute to a better understanding of the role of low-energy ions in defect generation in irradiation-sensitive materials, such as monolayer graphene.

2.
Nanotechnology ; 25(43): 435606, 2014 Oct 31.
Article in English | MEDLINE | ID: mdl-25299752

ABSTRACT

Nominally pure GaN nanowires (NWs) and InGaN/GaN dot-in-a-wire heterostructures were exposed to the flowing afterglow of a N2 microwave plasma and characterized by photoluminescence (PL) spectroscopy. While the band-edge emission from GaN NWs and the GaN matrix of the InGaN/GaN NWs strongly decreased due to the creation of non-radiative recombination centers in the near-surface region, the emission from the InGaN dots strongly increased. PL excitation measurements indicate that such an increase cannot be explained by a plasma-induced shift of the GaN absorption edge. It is rather ascribed to the passivation of grown-in defects and dynamic annealing due to the presence of plasma-generated N atoms and N2 metastables without excessive introduction of ion-induced damage.

3.
Nanotechnology ; 24(4): 045702, 2013 Feb 01.
Article in English | MEDLINE | ID: mdl-23299780

ABSTRACT

We have performed room-temperature time-resolved photoluminescence measurements on samples that comprise InGaN insertions embedded in GaN nanowires. The decay curves reveal non-exponential recombination dynamics that evolve into a power law at long times. We find that the characteristic power-law exponent increases with emission photon energy. The data are analyzed in terms of a model that involves an interplay between a radiative state and a metastable charge-separated state. The agreement between our results and the model points towards an emission dominated by carriers localized on In-rich nanoclusters that form spontaneously inside the InGaN insertions.


Subject(s)
Crystallization/methods , Gallium/chemistry , Indium/chemistry , Nanotubes/chemistry , Nanotubes/ultrastructure , Silicon/chemistry , Macromolecular Substances/chemistry , Materials Testing , Molecular Conformation , Particle Size , Surface Properties
4.
Phys Rev B Condens Matter ; 53(23): 15413-15416, 1996 Jun 15.
Article in English | MEDLINE | ID: mdl-9983359
7.
Phys Rev B Condens Matter ; 52(23): 16561-16566, 1995 Dec 15.
Article in English | MEDLINE | ID: mdl-9981054
10.
Phys Rev B Condens Matter ; 51(11): 6842-6851, 1995 Mar 15.
Article in English | MEDLINE | ID: mdl-9977237
15.
Phys Rev B Condens Matter ; 46(23): 15550-15553, 1992 Dec 15.
Article in English | MEDLINE | ID: mdl-10003687
16.
Phys Rev B Condens Matter ; 46(3): 1468-1471, 1992 Jul 15.
Article in English | MEDLINE | ID: mdl-10003788
18.
Opt Lett ; 17(23): 1652-4, 1992 Dec 01.
Article in English | MEDLINE | ID: mdl-19798273

ABSTRACT

The changes in refractive index, optical absorption, and volume of synthetic fused silica resulting from the implantation of germanium and silicon ions at energies of 3 and 5 MeV are reported. Implantation changes the density and generates ultraviolet color centers in the silica, which increases the refractive index at visible wavelengths by ~1%. Irradiation of the implanted samples with 249-nm light from a KrF excimer laser photobleaches the color centers and reduces the index by more than 0.1%. Photobleaching is used to write a 4.3-microm pitch diffraction grating in the implanted silica.

19.
Riv Neurol ; 59(4): 164-6, 1989.
Article in English | MEDLINE | ID: mdl-2617029

ABSTRACT

Risk factors, neurological, neuroradiological and ophthalmological features of 13 cases of acute pseudotumor cerebri were studied. After a 53-month period of mean follow-up, ophthalmological complications were taken into consideration: one patient (8%) showed unilateral optic atrophy with complete loss of vision, another subject complained of visual field constriction, and a third one of transient horizontal diplopia. Papilledema, which was present in 100% of the patients in the acute phase, persisted in 62%.


Subject(s)
Pseudotumor Cerebri/pathology , Vision Disorders/etiology , Adolescent , Adult , Female , Humans , Male , Middle Aged , Prognosis , Pseudotumor Cerebri/complications , Risk Factors
20.
Phys Rev B Condens Matter ; 38(15): 10903-10906, 1988 Nov 15.
Article in English | MEDLINE | ID: mdl-9945951
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