Thermal conductivity measurements of sub-surface buried substrates by steady-state thermoreflectance.

Measuring the thermal conductivity of sub-surface buried substrates is of significant practical interests. However, this remains challenging with traditional pump-probe spectroscopies due to their limited thermal penetration depths. Here, we experimentally and numerically investigate the TPD of the recently developed optical pump-probe technique steady-state thermoreflectance (SSTR) and explore its capability for measuring the thermal properties of buried substrates. The conventional definition of the TPD (i.e., the depth at which temperature drops to 1/e value of the maximum surface temperature) does not truly represent the upper limit of how far beneath the surface SSTR can probe. For estimating the uncertainty of SSTR measurements of a buried substrate a priori, sensitivity calculations provide the best means. Thus, detailed sensitivity calculations are provided to guide future measurements. Due to the steady-state nature of SSTR, it can measure the thermal conductivity of buried substrates that are traditionally challenging by transient pump-probe techniques, exemplified by measuring three control samples. We also discuss the required criteria for SSTR to isolate the thermal properties of a buried film. Our study establishes SSTR as a suitable technique for thermal characterizations of sub-surface buried substrates in typical device geometries.

High In-Plane Thermal Conductivity of Aluminum Nitride Thin Films.

High thermal conductivity materials show promise for thermal mitigation and heat removal in devices. However, shrinking the length scales of these materials often leads to significant reductions in thermal conductivities, thus invalidating their applicability to functional devices. In this work, we report on high in-plane thermal conductivities of 3.05, 3.75, and 6 µm thick aluminum nitride (AlN) films measured via steady-state thermoreflectance. At room temperature, the AlN films possess an in-plane thermal conductivity of ∼260 ± 40 W m-1 K-1, one of the highest reported to date for any thin film material of equivalent thickness. At low temperatures, the in-plane thermal conductivities of the AlN films surpass even those of diamond thin films. Phonon-phonon scattering drives the in-plane thermal transport of these AlN thin films, leading to an increase in thermal conductivity as temperature decreases. This is opposite of what is observed in traditional high thermal conductivity thin films, where boundaries and defects that arise from film growth cause a thermal conductivity reduction with decreasing temperature. This study provides insight into the interplay among boundary, defect, and phonon-phonon scattering that drives the high in-plane thermal conductivity of the AlN thin films and demonstrates that these AlN films are promising materials for heat spreaders in electronic devices.

Bioinspired Manufacturing of Aerogels with Precisely Manipulated Surface Microstructure through Controlled Local Temperature Gradients.

The freeze casting process has been widely used for fabricating aerogels due to its versatile and environmentally friendly nature. This process offers a variety of tools to tailor the entire micropore morphology of the final product in a monolithic fashion through manipulation of the freezing kinetics and precursor suspension chemistry. However, aerogels with nonmonolithic micropore morphologies, having pores of various sizes located in certain regions of the aerogels, are highly desired by certain applications such as controlled drug-delivery, bone tissue engineering, extracellular simulation, selective liquid sorption, immobilized catalysts, and separators. Furthermore, aerogels composed of micropores with predesigned size, shape, and location can open up a new paradigm in aerogel design and lead to new applications. In this study, a general manufacturing approach is developed to control the size, shape, and location of the pores on the aerogel surface by applying a precise control on the local thermal conductivity of the substrate used in a unidirectional freeze casting process. With our method, we created patterned low and high thermal conductivity regions on the substrate by depositing patterned photoresist polymer features. The photoresist polymer has a much lower thermal conductivity, which resulted in lower cooling/freezing rates compared to the silicon substrate. Patterned thermal conductivity created a designed temperature profile yielding to local regions with faster and slower freezing rates. Essentially, we fabricated aerogels whose micropore morphology on their surface was a replica of the patterned substrates in terms of size and location of the micropores. Using the same substrates, we further showed the possibility of 3D printed aerogels with precisely controlled, surface micropore morphologies. To the best of our knowledge, this is the first study that reports aerogels having micropore morphologies (e.g., size, shape, and location) that are precisely controlled through locally controlled thermal conductivity of the substrates.

Thermal transport in phononic crystals and the observation of coherent phonon scattering at room temperature.

Large reductions in the thermal conductivity of thin silicon membranes have been demonstrated in various porous structures. However, the role of coherent boundary scattering in such structures has become a matter of some debate. Here we report on the first experimental observation of coherent phonon boundary scattering at room temperature in 2D phononic crystals formed by the introduction of air holes in a silicon matrix with minimum feature sizes >100 nm. To delaminate incoherent from coherent boundary scattering, phononic crystals with a fixed minimum feature size, differing only in unit cell geometry, were fabricated. A suspended island technique was used to measure the thermal conductivity. We introduce a hybrid thermal conductivity model that accounts for partially coherent and partially incoherent phonon boundary scattering. We observe excellent agreement between this model and experimental data, and the results suggest that significant room temperature coherent phonon boundary scattering occurs.

Thermal conductivity and nanocrystalline structure of platinum deposited by focused ion beam.

Pt deposited by focused ion beam (FIB) is a common material used for attachment of nanosamples, repair of integrated circuits, and synthesis of nanostructures. Despite its common use little information is available on its thermal properties. In this work, Pt deposited by FIB is characterized thermally, structurally, and chemically. Its thermal conductivity is found to be substantially lower than the bulk value of Pt, 7.2 W m(-1) K(-1) versus 71.6 W m(-1) K(-1) at room temperature. The low thermal conductivity is attributed to the nanostructure of the material and its chemical composition. Pt deposited by FIB is shown, via aberration corrected TEM, to be a segregated mix of nanocrystalline Pt and amorphous C with Ga and O impurities. Ga impurities mainly reside in the Pt while O is homogeneously distributed throughout. The Ga impurity, small grain size of the Pt, and the amorphous carbon between grains are the cause for the low thermal conductivity of this material. Since Pt deposited by FIB is a common material for affixing samples, this information can be used to assess systematic errors in thermal characterization of different nanosamples. This application is also demonstrated by thermal characterization of two carbon nanofibers and a correction using the reported thermal properties of the Pt deposited by FIB.

Mechanical and Electrical Characterization of Entangled Networks of Carbon Nanofibers.

Entangled networks of carbon nanofibers are characterized both mechanically and electrically. Results for both tensile and compressive loadings of the entangled networks are presented for various densities. Mechanically, the nanofiber ensembles follow the micromechanical model originally proposed by van Wyk nearly 70 years ago. Interpretations are given on the mechanisms occurring during loading and unloading of the carbon nanofiber components.

Microfabricated suspended island platform for the measurement of in-plane thermal conductivity of thin films and nanostructured materials with consideration of contact resistance.

A technique based on suspended islands is described to measure the in-plane thermal conductivity of thin films and nano-structured materials, and is also employed for measurements of several samples with a single measurement platform. Using systematic steps for measurements, the characterization of the thermal resistances of a sample and its contacts are studied. The calibration of the contacts in this method is independent of the geometry, size, materials, and uniformity of contacts. To verify the technique, two different Si samples with different thicknesses and two samples of the same SiN(x) wafer are characterized on a single device. One of the Si samples is also characterized by another technique, which verifies the current results. Characterization of the two SiN(x) samples taken from the same wafer showed less than 1% difference in the measured thermal conductivities, indicating the precision of the method. Additionally, one of the SiN(x) samples is characterized and then demounted, remounted, and characterized for a second time. The comparison showed the change in the thermal resistance of the contact in multiple measurements could be as small as 0.2 K/µW, if a similar sample is used.

Sub-pg mass sensing and measurement with an optomechanical oscillator.

Mass sensing based on mechanical oscillation frequency shift in micro/nano scale mechanical oscillators is a well-known and widely used technique. Piezo-electric, electronic excitation/detection and free-space optical detection are the most common techniques used for monitoring the minute frequency shifts induced by added mass. The advent of optomechanical oscillator (OMO), enabled by strong interaction between circulating optical power and mechanical deformation in high quality factor optical microresonators, has created new possibilities for excitation and interrogation of micro/nanomechanical resonators. In particular, radiation pressure driven optomechanical oscillators (OMOs) are excellent candidates for mass detection/measurement due to their simplicity, sensitivity and all-optical operation. In an OMO, a high quality factor optical mode simultaneously serves as an efficient actuator and a sensitive probe for precise monitoring of the mechanical eigen-frequencies of the cavity structure. Here, we show the narrow linewidth of optomechanical oscillation combined with harmonic optical modulation generated by nonlinear optical transfer function, can result in sub-pg mass sensitivity in large silica microtoroid OMOs. Moreover by carefully studying the impact of mechanical mode selection, device dimensions, mass position and noise mechanisms we explore the performance limits of OMO both as a mass detector and a high resolution mass measurement system. Our analysis shows that femtogram level resolution is within reach even with relatively large OMOs.

Thermo-optomechanical oscillator for sensing applications.

We demonstrate and characterize a thermo-optomechanical oscillator based on a PMMA-coated silica microtoroid and employ it as a sensor. The observed thermo-optomechanical oscillation has a unique waveform that consists of fast and slow oscillation periods. A model based on thermal and optical dynamics of the cavity is used to describe the bi-frequency oscillation and experiments are conducted to validate the theoretical model in order to explore the origin of the two oscillatory phenomena. As opposed to previously shown hybrid toroidal microcavities, the excessive PMMA coating boosts the thermo-mechanical (expansion) effect that results in bi-frequency oscillation when coupled with the thermo-optical effect. The influences of the input power, quality factor, and wavelength detuning on oscillation frequencies are studied experimentally and verified theoretically. Finally the application of this oscillator as a sensor is explored by demonstrating the sensitivity of oscillation frequency to humidity changes.

Reduction in the thermal conductivity of single crystalline silicon by phononic crystal patterning.

Phononic crystals (PnCs) are the acoustic wave equivalent of photonic crystals, where a periodic array of scattering inclusions located in a homogeneous host material causes certain frequencies to be completely reflected by the structure. In conjunction with creating a phononic band gap, anomalous dispersion accompanied by a large reduction in phonon group velocities can lead to a massive reduction in silicon thermal conductivity. We measured the cross plane thermal conductivity of a series of single crystalline silicon PnCs using time domain thermoreflectance. The measured values are over an order of magnitude lower than those obtained for bulk Si (from 148 W m(-1) K(-1) to as low as 6.8 W m(-1) K(-1)). The measured thermal conductivity is much smaller than that predicted by only accounting for boundary scattering at the interfaces of the PnC lattice, indicating that coherent phononic effects are causing an additional reduction to the cross plane thermal conductivity.