1.
Opt Lett
; 39(2): 402-4, 2014 Jan 15.
Article
in English
| MEDLINE
| ID: mdl-24562157
ABSTRACT
A Fourier spectrum method to determine the dose-to-clear in a photoresist is proposed. The frequency content of scanning electron microscope resist images is used to determine whether the resist has been dissolved. Using this method, the dose to clear the resist is calculated automatically instead of via visual inspection, a method in which operator influence can affect the result.
2.
Harv Bus Rev
; 81(1): 107-16, 2003 Jan.
Article
in English
| MEDLINE
| ID: mdl-12545927
3.
Buenos Aires; Paidos; 1a. ed; 1970. 406 p. ^e14 cm.(Biblioteca Mundo Moderno, vol. 43).
Monography
in Spanish
|
LILACS-Express
| BINACIS
| ID: biblio-1199456
4.
Buenos Aires; Paidos; 1a. ed; 1970. 406 p. 14 cm.(Biblioteca Mundo Moderno, vol. 43). (74478).
Monography
in Spanish
| BINACIS
| ID: bin-74478
