ABSTRACT
A high-quality ultrathin dielectric film is important in the field of microelectronics. We designed a composite structure composed of Al2O3/HfO2 with different Al2O3/HfO2 cycles prepared by atomic layer deposition (ALD) to obtain high-quality ultrathin (1-12 nm) dielectric films. Al2O3 protected HfO2 from interacting with the Si substrate and inhibited the crystallization of the HfO2 film. High permittivity material of HfO2 was adopted to guarantee the good insulating property of the composite film. We investigated the physical properties as well as the growth mode of the composite film and found that the film exhibited a layer growth mode. The water contact angle and grazing-incidence small-angle X-ray scattering analyses revealed that the film was formed physically at 3 nm, while the thickness of the electrically stable film was 10 nm from grazing-incidence wide-angle X-ray scattering and dielectric constant analyses. The composite film was applied as a dielectric layer in thin-film transistors (TFTs). The threshold voltage was decreased to 0.27 V compared to the organic field-effect transistor with the single HfO2 dielectric, and the subthreshold swing was as small as 0.05 V/dec with a carrier mobility of 49.2 cm2/V s. The off-current was as low as 10-11 A, and the on/off ratio was as high as 5.5 × 106. This ALD-prepared composite strategy provides a simple and practical way to obtain the high-quality dielectric film, which shows the potential application in the field of microelectronics.
ABSTRACT
Daily continuous glucose monitoring is very helpful in the control of glucose levels for people with diabetes and impaired glucose tolerance. In this study, a multisensor-based, noninvasive continuous glucometer was developed, which can continuously estimate glucose levels via monitoring of physiological parameter changes such as impedance spectroscopy at low and high frequency, optical properties, temperature and humidity. Thirty-three experiments were conducted for six healthy volunteers and three volunteers with diabetes. Results showed that the average correlation coefficient between the estimated glucose profiles and reference glucose profiles reached 0.8314, with a normalized root mean squared error (NRMSE) of 14.6064. The peak time of postprandial glucose was extracted from the glucose profile, and its estimated value had a correlation coefficient of 0.9449 with the reference value, wherein the root mean square error (RMSE) was 6.8958 min. Using Clarke error grid (CEG) analysis, 100% of the estimated glucose values fell in the clinically acceptable zones A and B, and 92.86% fell in zone A. The application of a multisensor-based, noninvasive continuous glucometer and time series analysis can endure the time delay between human physiological parameters and glucose level changes, so as to potentially accomplish noninvasive daily continuous glucose monitoring.
