ABSTRACT
Solidly mounted (SMR-type) thin film bulk acoustic resonators operating at 2.2, 4.1, and 8.0 GHz and with lateral extents from 30 to 500 microm were fabricated and their performance as mass sensors was evaluated theoretically as well as experimentally. It was found that increasing the frequency leads to a principally improved performance of these devices. Problems arising for the horizontal as well as the vertical dimension and structure are investigated.
Subject(s)
Acoustics/instrumentation , Electrochemistry/instrumentation , Manometry/instrumentation , Models, Theoretical , Transducers , Computer Simulation , Computer-Aided Design , Electrochemistry/methods , Equipment Design , Equipment Failure Analysis , Manometry/methods , Membranes, Artificial , Reproducibility of Results , Sensitivity and SpecificityABSTRACT
Solidly mounted film bulk acoustic resonators (FBAR) operating at 850 MHz in the shear vibration mode have been fabricated. C-axis inclined zinc oxide (ZnO) thin films realized by modified reactive magnetron sputtering were used: Coupling factors k2 of 1.7% and Q-factors of 312 were determined in air. Q-factors of 192 were measured in water, making these devices attractive for sensing applications in liquids, e.g., biosensing.
